A mini personal computer (PC) is described. The mini PC includes a housing, at least one heat-generating structure coupled with the housing, and a cooling system. The cooling system includes at least one active cooling cell. The heat-generating structure(s) are coupled with the cooling system. The active cooling cell(s) are configured to utilize vibrational motion to drive a fluid for transferring heat from the heat-generating structure(s). The cooling system is coupled with and contained by the housing.

A method for producing at least one deformable membrane micropump including a first substrate and a second substrate assembled together, the first substrate including at least one cavity and the second substrate including at least one deformable membrane arranged facing the cavity. In the method: the cavity is produced in the first substrate; then the first and second substrates are assembled together; then the deformable membrane is produced in the second substrate.

A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.

A device includes a processor or integrated circuit package and at least one MEMS device coupled to the processor or integrated circuit package. The at least one MEMS device includes a first arm, a second arm, at least one permanent magnet, a fan structure, and a coil. The second arm is coupled to, and is spaced apart from, the first arm. The at least one permanent magnet is coupled to the first arm. The fan structure is coupled to, and extends in cantilever manner from, the second arm. The coil is disposed on or within the fan. Thus, when the coil is electrically energized, a Lorentz force is generated that causes the fan structure to vibrate relative to the at least one permanent magnet and relative to the processor, to thereby cool the processor or integrated circuit package.

A micro-electro-mechanical system sensor device is disclosed. The sensor device comprises a micro-electro-mechanical system (MEMS) layer, comprising: an actuator layer and a cover layer, wherein a portion of the actuator layer is coupled to the cover layer via a dielectric; and an out-of-plane sense element interposed between the actuator layer and the cover layer, wherein the MEMS device layer is connected to a complementary metal-oxide-semiconductor (CMOS) substrate layer via a spring and an anchor.

In accordance with an embodiment, A micro electro mechanical system (MEMS) device includes a cavity configured to contain a fluid; a pump configured to generate a pressure to the fluid in the cavity, wherein the pressure is configured to cause the fluid to be emitted from the cavity; a sensor configured to sense an electrical parameter based on an electrical impedance of the pump, and configured to provide a sensor signal based on the electrical parameter; and a controller configured to control an operation of the pump; wherein the controller is configured to process the sensor signal to adapt an operation of the MEMS device or for failure detection.

A miniature gas detection system includes a separation flow channel fabricated by semiconductor processes and a filling material disposed in the main flow channel of the separation flow channel to perform adsorption and separation on compositions of compounds contained in the gas introduced into the main flow channel. Each detection flow channel is formed with a monitoring chamber, and a micro-electromechanical systems pump is formed on the bottom portion of the monitoring chamber. In each monitoring chamber, a light emitted from the light emitting element is reflected by the two mirrors and received by the light detection element. Therefore, the light detection elements obtain and output spectra of the compositions of compounds contained in the gas according to the differences in optical adsorptions of the compositions of compounds for lights with different wavelengths, so as to analyze and determine the type of the gas contained in the compositions of compounds.

Techniques described herein generally relate to generating fluid flow in a micro structure. In some examples, a micropump is described that includes at least two membranes and a spacer. The membranes can be configured to oscillate along a first and second directional path to generate fluid flow.

A MEMS actuator includes a semiconductor body with a first surface defining a housing cavity facing the first surface and having a bottom surface, the semiconductor body further defining a fluidic channel in the semiconductor body with a first end across the bottom surface. A strainable structure extends into the housing cavity, is coupled to the semiconductor body at the bottom surface, and defines an internal space facing the first end of the fluidic channel and includes at least a first and a second internal subspace connected to each other and to the fluidic channel. When a fluid is pumped through the fluidic channel into the internal space, the first and second internal subspaces expand, thereby straining the strainable structure along the first axis and generating an actuation force exerted by the strainable structure along the first axis, in an opposite direction with respect to the housing cavity.

A flexible patch pump for controllable accurate subcutaneous delivery of one or more medicaments to a patient includes a laminated layered structure. The pump may have a rigid reservoir layer including a number of rigid reservoirs disposed in a flexible material; a flexible microfluidic layer including a compliant membrane for sealing the rigid reservoirs, a network of microfluidic channels connecting the rigid reservoirs, and a number of inlet and/or outlet valves corresponding to the rigid reservoirs; and a flexible-rigid electronic circuit layer including a number of individually-addressable actuators. In operation, the rigid reservoirs may contain medicament that is dispensed in precise volumes at appropriate times due, for to example, to a pressure change in an addressed reservoir caused by displacement of the compliant membrane or other actuation element.