An actuator device includes a support portion, a movable portion, a connection portion, a first wiring provided to the connection portion, a second wiring provided to the movable portion, a first insulation layer which includes a first opening exposing a surface opposite to the movable portion in a first connection part located at the movable portion in one wiring of the first and second wirings, a second insulation layer covering the first and second wirings. The other wiring of the first and second wirings is connected to the surface of the first connection part in the first opening. A region corresponding to a corner of the other wiring of the first and second wirings in a surface opposite to the movable portion in the second insulation layer is curved in a convex shape toward an opposite side to the movable portion.

A micromirror unit, comprising a mirror and a drive apparatus. A side of the mirror facing the drive apparatus is provided with a support post. The drive apparatus comprises a supporting frame, an rotation block fixedly connected to the supporting post, and a plurality of piezoelectric drive arms provided along a peripheral edge of the rotation block. An end of each of the piezoelectric drive arms is fixed on the supporting frame, and another end thereof is connected to the rotation block via an elastic member provided between the other end and the rotation block. The piezoelectric drive arm comprises an upper electrode, a lower electrode, and a piezoelectric material clamped between the upper electrode and the lower electrode.

Provided is a technology for improving the resolution and the angle of view of an image projection device. The image projection device includes an optical waveguide element including at least one incident port on which a laser beam is incident and a plurality of emission ports from which the laser beam is emitted, and a scanning mirror that performs scanning with the laser beam emitted from the optical waveguide element, in which the laser beam with which the scanning mirror performs the scanning reaches a projection target. The image projection device further includes a hologram element that condenses the laser beam with which the scanning mirror performs the scanning on a vicinity of a pupil to allow the laser beam to reach a retina.

A displacement increasing mechanism has a fixing portion, first and second actuators coupled to the fixing portion, a first beam having first and second end portions and coupled to the first actuator at the first end portion, a second beam having third and fourth end portions and coupled to the second actuator 4 at the third end portion, and a drive target member coupled to a parallel arrangement portion at which the first and second beams are arranged in parallel with each other. The first actuator is driven to pull the first beam from a second end portion side in the direction of extending the first beam, and the second actuator is driven to push the second beam form a fourth end portion side in the direction of extending the second beam.

An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.

A method for controlling a drive apparatus (20) of a micro-oscillation mirror (16), a control device (28) and a deflector mirror apparatus (14) are described. The drive apparatus (20) has at least two comb drives (22a, 22b) which are arranged on different radial sides of a pivoting axis (18) of the micro-oscillation mirror (16). In the method, at least two actuation signals AS1, AS2) are generated, and the at least two comb drives (22a, 22b) are therefore actuated at least temporarily in such a way that they drive the micro-oscillation mirror (16) in an oscillating fashion. At least one elongation signal (P1, P2), which characterizes the elongation (26) of the micro-oscillation mirror (16) is generated using at least one comb drive (22a, 22b). At least one of the actuation signals (AS1, AS2) is adapted to the oscillation of the micro-oscillation mirror (16) on the basis of at least one of the elongation signals (P1, P2), At least one of the comb drives (22a, 22b) is connected, by means of at least one switching apparatus (34), alternately to an actuation apparatus (32) for receiving at least one actuation signal (AS1, AS2) or to an elongation-detection apparatus (24) for generating at least one elongation signal (P1, P2).

MEMS dies embedded in glass cores of integrated circuit (IC) package substrates are disclosed. An example integrated circuit (IC) package includes a package substrate including a glass core, the example integrated circuit (IC) package also includes a micro electromechanical system (MEMS) die positioned in a cavity of the glass core.

An example microelectromechanical system (MEMS) switch comprises a hinge plane having two or more intersecting hinges; a switch plate; and a plurality of electrostatic pads. Selective activation of the electrostatic pads causes torsion of at least one of the two or more intersecting hinges to tilt the switch plate to a selected one of three or more positions.

A MEMS device includes a plurality of ribbon elements, a securing portion, and a plurality of connecting portions. The securing portion supports the plurality of ribbon elements. The plurality of connecting portions are disposed on ends of each of the plurality of ribbon elements and connect each of the plurality of ribbon elements to the securing portion. An angle formed by a longitudinal extending line of each of the plurality of ribbon elements and each of the plurality of connecting portions is greater than 0 in a planar direction of each of the plurality of ribbon elements.

An all-solid state optical transmit/receive terminal includes binary optical switches to steer an optical beam, without mechanical components, phased array of emitters/collectors or large number of phase shifters. A lens optically couples a surface array of emitters/collectors to free space, giving each emitter/collector a respective direction in free space. The emitters/collectors are also coupled, via an H-tree or other branched optical waveguide network, to a common input/output port, and from there to a receiver and/or transmitter. The binary optical switches are disposed at optical junctions of the optical waveguide network. ON switches pass an optical signal through the optical waveguide network, between the common input/output port and one or more selected emitter/collectors, thereby selecting a free space direction(s). Only a relatively small subset of the binary optical switches needs to be ON, therefore powered, simultaneously at any given time.