A method of manufacturing a plurality of through-holes in a layer of first material, for example for the manufacturing of a probe comprising a tip containing a channel. To manufacture the through-holes in a batch process, a layer of first material is deposited on a wafer comprising a plurality of pits a second layer is provided on the layer of first material, and the second layer is provided with a plurality of holes at central locations of the pits; using the second layer as a shadow mask when depositing a third layer at an angle, covering a part of the first material with said third material at the central locations, and etching the exposed parts of the first layer using the third layer as a protective layer.

A microfluidic chip and a fabrication method of the microfluidic chip are provided. The microfluidic chip includes an array substrate, and a hydrophobic layer disposed on a side of the array substrate. The hydrophobic layer includes at least one through-hole, and a through-hole of the at least one through-hole penetrates through the hydrophobic layer along a direction perpendicular to a plane of the array substrate. The microfluidic chip also includes at least one hydrophilic structure. A hydrophilic structure of the at least one hydrophilic structure is disposed in the through-hole.

A method of manufacturing a plurality of through-holes in a layer of first material by subjecting part of the layer of said first material to ion beam milling.

For batch-wise production, the method comprises after a step of providing the layer of first material and before the step of ion beam milling, providing a second layer of a second material on the layer of first material, providing the second layer of the second material with a plurality of holes, the holes being provided at central locations of pits in the first layer, and subjecting the second layer of the second material to said step of ion beam milling at an angle using said second layer of the second material as a shadow mask.

A wiring structure includes a connecting terminal array formed on a first substrate and a connected terminal array formed on a second substrate, which are electrically connected, wherein a dummy terminal that is not used for transmission and reception of an electrical signal is provided on at least one end of the connecting terminal array in a terminal arrangement direction, and an anisotropic conductive film containing a conductive particle which is disposed between the first substrate and the second substrate extends to the dummy terminal such that an end of the anisotropic conductive film is located on a surface of the dummy terminal.

Provided is photoactivated selective release (or PHASR) of droplets from a microwell array enabled by a photoresponsive polymer layer integrated into the microfluidic device. This photoresponsive layer is placed in between a microwell array that traps a large number of droplets and a monolithic flow chamber that can be used for recovery. By using focused light, the photoresponsive layer can either be punctured or induced to create local heating to selectively release droplets. The type of photoacoustic dye and the physical properties of the photoresponsive layer can be engineered to induce either puncture of the membrane or pushing of droplets out of the microwells with low thermal impact on the droplets. This approach has broad application in the field of soft lithography-based microfluidic devices for various applications including photoresponsive valves as well as high throughput single cell sequencing.

The present disclosure provides a microfluidic chip, and belongs to the field of biological detection technology. The microfluidic chip is divided into a middle region and a peripheral region surrounding the middle region; the middle region includes a liquid storage region and a detection region; the microfluidic chip includes a first substrate and a second substrate opposite to each other; the first substrate includes a first base plate and a first electrode layer; the second substrate includes a second base plate and a second electrode layer; wherein a liquid storage tank and a liquid inlet are on a side of the first base plate proximal to the second substrate, the liquid inlet penetrates through a bottom of the liquid storage tank; the liquid storage tank and the liquid inlet are both in the liquid storage region.

A method of manufacturing a MEMS device comprising a main body and a protrusion. To provide a generic method of manufacturing a protrusion with reduced vulnerability, the method includes creating a recess in a wafer substrate, said recess having an upper recess section and a lower recess section. The upper recess section is created using anisotropic etching and the lower recess section is formed using corner lithography followed by directional etching. Finally, a filler material is introduced in the recess and at least part of the wafer substrate material is removed so as to expose the filler material introduced in the recess. Additionally, the method allows for the batch-wise production of protrusions having oblique ends.

An object of the present invention is to provide an anti-adhesive/anti-clogging and/or color marked/tinted micro-capillary tube (microtube), microneedle, or micropipette. Typically, the color/tint will be selected such that the tip of the microneedle or micropipette is in contrast (e.g., visually) to the biological material. The tint/color may be selected to contrast the stained biological material. In some aspects, the color mark comprises nanoparticles that are modified by adding a non-adhesive coating/material that minimizes protein adhesion/adsorption. The microtubes and/or micropipettes may be treated with an anti-clogging reagent and an anti-adhesive reagent to prevent or reduce clogging and adhesion of the micropipette or microneedle to biological materials. The microtubes and/or micropipettes may be formed using additive printing processes and additive manufacturing techniques or from micropipette and microneedle pullers.

The invention provides a microfluidic device (1), specifically a nozzle for an inhalation device, comprising at least two microfluidic structures (2A, 2A), each of said structures (2A, 2A) is located at a front end (1B) of the microfluidic device; characterized in that the microfluidic device (1) is made at least in part from a mono-crystalline material and wherein said front end (1B) of the microfluidic device (1) and the microfluidic structures (2A, 2A) are aligned with the crystal orientation line and methods producing said devices and uses thereof.

A microdroplet/bubble-generating device comprising a slit and a row of a plurality of microflow paths is constructed, in such a manner that either a continuous phase or dispersion phase is supplied to the slit, and so that the end of the slit, the other supply port for the continuous phase or dispersion phase and the liquid recovery port are connected. The plurality of microflow paths each have a narrow part where the cross-sectional area of the flow channel is locally narrowed adjacent to or near the connection point between the slit and the microflow path. The continuous phase and dispersion phase that have met at the connection points flow into the narrow parts, and the dispersion phase is sheared at the narrow parts with the continuous phase flow as the driving force, forming droplets or gas bubbles of the dispersion phase. The product is recovered from the liquid recovery port.