A micro-electrical-mechanical system (MEMS) assembly includes a micro-electrical-mechanical system (MEMS) actuator configured to be coupled, on a lower surface, to a printed circuit board, an image sensor assembly coupled to an upper surface of the micro-electrical-mechanical system (MEMS) actuator, and a holder assembly coupled to and positioned with respect to the micro-electrical-mechanical system (MEMS) actuator.

A method of manufacturing a micro-electrical-mechanical system (MEMS) assembly includes mounting a micro-electrical-mechanical system (MEMS) actuator to a metal plate. An image sensor assembly is mounted to the micro-electrical-mechanical system (MEMS) actuator. The image sensor assembly is electrically coupled to the micro-electrical-mechanical system (MEMS) actuator, thus forming a micro-electrical-mechanical system (MEMS) subassembly.

A micro-electrical-mechanical system (MEMS) actuator includes a first set of actuation fingers, a second set of actuation fingers, and a first spanning structure configured to couple at least two fingers of the first set of actuation fingers while spanning at least one finger of the second set of actuation fingers.

INVENTION #7

A micro-electrical-mechanical system (MEMS) device includes one or more slidable connection assemblies for releasably coupling the micro-electrical-mechanical system (MEMS) device to a wafer from which the micro-electrical-mechanical system (MEMS) device was made.

A micro-electrical-mechanical system (MEMS) actuator includes: a MEMS actuation core, and a multi-piece MEMS electrical connector assembly electrically coupled to the MEMS actuation core and configured to be electrically coupled to a printed circuit board, wherein the multi-piece MEMS electrical connector includes: a plurality of subcomponents, and a plurality of coupling assemblies configured to couple the plurality of subcomponents together.

The present application provides a three-axis gyroscope, which comprises a substrate on which a first plate element, a second plate element, a third plate element, a first drive module, and a second drive module are disposed. The first driving module, the first plate element, the second plate element, the third plate element and the second driving module are disposed in an axial direction. Thereby, problems caused by use of frames and coupling flexible structures of three-axis gyroscopes available now may be solved effectively.

A MEMS device. The MEMS device includes at least one movably mounted element, which performs a useful movement along a useful direction relative to a further element of the MEMS device. The movable element is for interaction with a fluid, such as a gas or a liquid. The movable element includes first and second portions. The further includes further first and second portions. The first portion has a first gap distance from the further first portion in a disturbance direction of the movable element. The second portion has a second gap distance from the further second portion in the disturbance direction of the movable element. A movement of the movably mounted element along the disturbance direction is caused by an external load, such as an external impact. The first gap distance is smaller than the second gap distance. The first portion and the further first portion form a contact region between the movable element and the further element.

The present invention provides a three-axis gyroscope and electronic products, including a drive structure used for driving the three-axis gyroscope, a first sensitive structure used for sensing an angular velocity in a first direction, a second sensitive structure used for sensing an angular velocity in the second direction, a third sensitive structure used for sensing an angular velocity in a third direction. The first sensitive structure, the second sensitive structure and the third sensitive structure can be mutually coupled in the first detection modality, the second detection modality and the third detection modality, which can effectively avoid the coupling error, achieve electrical orthogonal suppression and capacitance modality matching in the first detection modality, the second detection modality or the third detection modality, so that the structural performance loss can be compensated, thus reducing an orthogonal error and improving the detection accuracy and overall performance of the three-axis gyroscope.