The present application relates to multifunctional hierarchically microstructured surfaces and three-dimensional anchored interfacial domain structures. The multifunctional properties are extremal. In one aspect the microstructured surfaces may be super-adhesive. Examples of super-adhesive mechanisms may include gas trapping, fluid trapping, and solid wrinkle trapping. In another aspect the micro structured surfaces may be nearly adhesive-less. Examples of adhesive-less mechanisms may include inter-solid surface lubrication, energy conserving fluid flows, and super-low drag phase-phase lateral displacement. The extremal structures may be obtained by anchoring mechanisms. Examples of anchoring mechanisms may include Wenzel-Cassie formation, contact angle confusion, and capillary effects.

One example is an antenna structure with a metamaterial having a flexible metamaterial layer, a two-dimensional antenna layer and a spacer layer. The flexible metamaterial layer has a metamaterial thickness allowing the metamaterial layer to be attached to a curved conducting surface of a vehicle. The metamaterial layer is formed with a two-dimensional array of elements having a passive magnetic property with the array of elements formed with elongated individual elements each having a top end and a bottom end. The elongated individual elements have curved outer surfaces between the top end and the bottom end. The two-dimensional antenna layer receives electromagnetic signals. The spacer layer is located between the metamaterial layer and the antenna layer separating the metamaterial layer and the antenna layer.

A microelectromechanical element is provided with patterned regions of wafer material and glass material. The regions of glass material include at least a first glass region and a second glass region formed of a first glass material and a second glass material, respectively. The first glass material enables anodic bonding with the wafer material. An alkali metal content of the second glass material is less than an alkali metal content of the first glass material.

A CMOS single chip includes a movable film, at least one support pillar, a base metal layer and a circuit integration. The movable film is disposed on a top layer of the CMOS single chip and has a plurality of through-vias. The support pillar is disposed under the movable film to provide a supporting force of the movable film. The base metal layer is formed under the support pillars and isolated from the support pillars, and faces towards the movable film to form a micro capacitor to sense one of the outside sensing signals. The area of the base metal layer is larger than the area of the movable film. The circuit integration is formed under the base metal layer, or formed under the base metal layer and on the side of the movable film, and connected to the movable film and the base metal layer.

A method of forming a micro-structure involves forming a multi-layered structure including i) an oxidizable material layer on a substrate and ii) another oxidizable material layer on the oxidizable material layer. The oxidizable material layer is formed of an oxidizable material having an expansion coefficient, during oxidation, that is more than 1. The method further involves forming a template, including a plurality of pores, from the other oxidizable material layer, and growing a nano-pillar inside each pore. The nano-pillar has a predefined length that terminates at an end. A portion of the template is selectively removed to form a substantially even plane that is oriented in a position opposed to the substrate. A material is deposited on at least a portion of the plane to form a film layer thereon, and the remaining portion of the template is selectively removed to expose the nano-pillars.

A method for forming a MEMS device includes following operations. A first semiconductor layer is formed over a substrate. A plurality of first pillars are formed over the first layer. A second layer is formed over the first pillars and the first layer. A plurality of second pillars are formed over the second layer. A third layer is formed over the second pillars and the second layer.

In an example, a wet cleaning process is performed to clean a structure having features and openings between the features while preventing drying of the structure. After performing the wet cleaning process, a polymer solution is deposited in the openings while continuing to prevent any drying of the structure. A sacrificial polymer material is formed in the openings from the polymer solution. The structure may be used in semiconductor devices, such as integrated circuits, memory devices, MEMS, among others.

A system for performing fluid level measurements on a biological subject, the system including at least one substrate including a plurality of microstructures configured to breach a stratum corneum of the subject, at least some microstructures including an electrode, a signal generator operatively connected to at least one microstructure to apply an electrical stimulatory signal to the at least one microstructure and at least one sensor operatively connected to at least one microstructure, the at least one sensor being configured to measure electrical response signals from at least one microstructure. The system also includes one or more electronic processing devices that determine measured response signals, the response signals being at least partially indicative of a bioimpedance and perform an analysis at least in part using the measured response signals to determine at least one indicator at least partially indicative of fluid levels in the subject.

One example is an antenna structure with a metamaterial having a flexible metamaterial layer, a two-dimensional antenna layer and a spacer layer. The flexible metamaterial layer has a metamaterial thickness allowing the metamaterial layer to be attached to a curved conducting surface of a vehicle. The metamaterial layer is formed with a two-dimensional array of elements having a passive magnetic property with the array of elements formed with elongated individual elements each having a top end and a bottom end. The elongated individual elements have curved outer surfaces between the top end and the bottom end. The two-dimensional antenna layer receives electromagnetic signals. The spacer layer is located between the metamaterial layer and the antenna layer separating the metamaterial layer and the antenna layer.

A two-layer optical beam steering device, system, method of utilization and method of fabrication are disclosed. The solid-state device enables beam steering in two dimensions with dramatically fewer control lines than prior devices. This renders the device more technically realizable, easier to control, and more affordable to manufacture. Because less data need be transferred to the device, the device is also able to operate at faster speeds.