B81B2203/051

MICROELECTROMECHANICAL ACCELERATION SENSOR
20260062281 · 2026-03-05 ·

A microelectromechanical acceleration sensor. The sensor has a substrate, a movably suspended heavy mass, four movably suspended lightweight masses, and four electrode systems, and is designed to be at least rotationally symmetrical. The heavy mass laterally encloses the lightweight masses and the electrode systems. Each electrode system has two electrode structures. Each electrode structure has fixed electrodes and movable electrodes. The movable electrodes are connected to the masses. Movable and fixed electrode surfaces interlock and form electrical capacitances. The masses are coupled to one another such that a deflection of the heavy mass parallel to the substrate and in a direction perpendicular to fixed and movable electrode surfaces of two opposing electrode systems causes the lightweight masses connected to the opposing electrode systems to be deflected in the opposite direction.

TRIAXIAL MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED PERFORMANCES

A MEMS gyroscope has a structure with a main extension in a horizontal plane formed by first and second horizontal axes. The gyroscope includes a first driving mass that performs a translation driving movement along the second horizontal axis of the horizontal plane, and a first sensing mass, having an anchoring element arranged centrally with respect to the first sensing mass and connected to the anchoring element by an elastic arrangement. The first sensing mass is coupled to the first driving mass by an elastic coupling element and performs a rotation movement in the horizontal plane around the anchoring element, dragged by the first driving mass, and a sensing movement of rotation outside the horizontal plane around a rotation axis defined by the elastic arrangement, in response to an angular velocity around the first horizontal axis. The rotation axis extends along the second horizontal axis, parallel to the driving movement.