A microelectromechanical system (MEMS) device and method of fabrication are provided. The MEMS devices includes a silicon substrate. The silicon substrate includes a top surface. An interconnect is machined from the silicon substrate. The interconnect includes at a spring body that has least two spring arms. Each spring arm includes a first end distal from a center of the interconnect, a second end proximate the center of the interconnect, and a single turn of a constant curvature. Each spring arm is configured to move rotationally in a plane parallel to the top surface of the silicon substrate.

An electrically-connected MEMS precision motion stage includes a stationary portion, one or more electrically-conductive MEMS flexure assemblies coupled to the stationary portion, a movable portion coupled to the one or more electrically-conductive MEMS flexure assemblies, one or more motion control assemblies disposed between the stationary portion and the movable portion and configured to control motion of the movable portion, and one or more position sensors disposed adjacent to the one or more motion control assemblies and configured to enable detection of movement of the one or more motion control assemblies, respectively.

According to one embodiment, a sensor includes a base including a first face, a fixed portion fixed to the first face, a movable portion supported by the fixed portion, a first fixed electrode, and a first opposing fixed electrode. The fixed portion includes a first center in a first plane parallel to the first face. The movable portion includes first and second annular portions. The first fixed electrode includes first and second regions. The first opposing fixed electrode includes first and second opposing regions. The first region is provided between the second annular portion and the first annular portion. The first opposing region is provided between the second annular portion and the first region. The second region is provided between the second annular portion and the first annular portion. The second opposing region is provided between the second annular portion and the second region.

According to one embodiment, a sensor includes a base including a first face, a fixed portion fixed to the first face, and a movable portion supported by the fixed portion. The movable portion includes a plurality of annular portions, a plurality of connect portions, and a first structure. Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first face. One of the plurality of connect portions connects two of the plurality of annular portions to each other. The plurality of annular portions include a first annular portion. The first annular portion is outermost of the plurality of annular portions. The first structure is connected to the first annular portion. The first annular portion is provided between the fixed portion and the first structure.

According to one embodiment, a sensor includes a base including a first face, a fixed portion fixed to the first face, and a movable portion supported by the fixed portion. The movable portion includes a plurality of annular portions and a plurality of connect portions. Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center on a first plane along the first face. The plurality of annular portions includes a first annular portion, a second annular portion, and a third annular portion. The plurality of connect portions includes first and second connect portions. The first connect portion is provided between the first and second annular portions, and is connected to the first and second annular portions. The second connect portion is provided between the second and third annular portions, and is connected to the second and third annular portions.

A microelectromechanical system (MEMS) transducer includes a substrate and a pair of electrodes supported by the substrate. The pair of electrodes are configured as a bias electrode-sense electrode couple. A moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode. The pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction. The moveable electrode includes a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction.

The present application discloses a MEMS device comprising a proof mass, an anchor, a main suspension, and a flexible stopper. The main suspension respectively connects to the proof mass and the anchor at both ends thereof. An end of the flexible stopper is connected to the anchor, and another end of the flexible stopper extends toward the proof mass. Thereby, the present application reduces the impact of adding the flexible stopper on the proof mass, maintaining the sensing sensitivity of the MEMS device.

A MEMS accelerometer includes a proof mass that rotates about an in-plane axis in response to a linear acceleration such that a portion of the proof mass moves out of plane along an out-of-plane axis in a direction of a bump stop. When the proof mass becomes stuck to the bump stop, a signal is applied to one or more anti-stiction electrodes in a manner that moves the proof mass along a movement axis in order to release the proof mass from the bump stop.

A nano electromechanical device includes: a first electrode formed on an upper portion of a metal wiring layer; a second electrode spaced apart from the first electrode and arranged in parallel; a movable beam arranged between the first electrode and the second electrode and moving horizontally to contact the first electrode or the second electrode; and a via anchor connected to upper and lower portions of one side of the movable beam and supporting the movable beam. Therefore, the present disclosure can improve the durability of the device, operate at low driving voltage, and improve integration.

A MEMS sensor (1) is configured to measure a physical quantity and has a substrate (10) and a movable mass (12) suspended at a distance from the substrate along a direction (Z), wherein the movable mass is coupled to the substrate so as to undergo a movement (M) along a sensing direction (S), with respect to the substrate, as a function of the physical quantity to be measured. The MEMS sensor also has a contact sensing structure (30) coupled to the substrate and which extends, at rest, at a distance (g.sub.SW) from the movable mass along the sensing direction; and at least one stator electrode (18A, 18B) coupled to the substrate and configured to form with the movable mass at least one capacitor having a capacitance variable as a function of the movement of the movable mass. A control circuit (5) is configured to: induce a voltage difference between the movable mass and the stator electrode, for sensing a capacitance variation between the movable mass and the stator electrode; sense a contact between movable mass and contact sensing structure; and in response to sensing the contact between movable mass and contact sensing structure, modify the induced voltage difference, so as to reduce an electrostatic force exerted by the at least one stator electrode on the movable mass.