Methods, apparatuses and methods of manufacture are described for a MEMS mirror array with reduced crosstalk. The MEMS mirror array has a plurality of reflective surfaces wherein each reflective surface has a resonant frequency, and further wherein adjacent reflective surfaces do not have the same resonant frequency.

A movable device includes a movable portion including a reflecting surface; a pair of drive beams to support the movable portion rotatably around a predetermined rotation axis with the movable portion disposed between the pair of drive beams; and a support portion configured to support the pair of drive beams. The support portion has a light passing portion on each of both sides of the movable portion in a direction intersecting with the rotation axis in a plane along the reflecting surface in a state in which the movable portion is not rotated, the light passing portion allowing light reflected by the reflecting surface to pass through the light passing portion.

A microelectromechanical system (MEMS) device including an oscillator structure configured to oscillate about a rotation axis; a frame that is rotationally fixed, the frame including a frame recess within which the oscillator structure is suspended; and a suspension assembly mechanically coupled to and between the oscillator structure and the frame, the suspension assembly configured to suspend the oscillator structure within the frame recess. The suspension assembly includes a central support beam that extends lengthwise along the rotation axis, the central support beam being mechanically coupled to and between the oscillator structure and the frame; a first outer support beam mechanically coupled to the oscillator structure and laterally displaced from the central support beam in a first direction orthogonal to the rotation axis; and at least one first interior support beam directly coupled to and between the central support beam and the first outer support beam.

In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module is provided. The apparatus comprises a microelectromechanical system (MEMS) and a substrate. The MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprises: a first flexible support structure and a second flexible support structure connected to the substrate; a micro-mirror comprising a first connection structure and a second connection structure, the first connection structure being connected to the first flexible support structure at a first connection point, the second connection structure being connected to the second flexible support structure at a second connection point, the first and second connection points being aligned with a rotation axis around which the micro-mirror rotates, the first flexible support structure and the second flexible support structure being configured to allow the first and second connection points to move when the micro-mirror rotates.

In one example, an apparatus that is part of a Light Detection and Ranging (LiDAR) module of a vehicle comprises a semiconductor integrated circuit comprising a microelectromechanical system (MEMS) and a substrate. The MEMS comprises an array of micro-mirror assemblies, each micro-mirror assembly comprising: a micro-mirror having a first thickness; and an actuator comprising first fingers and second fingers, the first fingers being connected with the substrate, the second fingers being mechanically connected to the micro-mirror having a second thickness smaller than the first thickness, the actuator being configured to generate an electrostatic force between the first fingers and the second fingers to rotate the micro-mirror to reflect light emitted by a light source out of the LiDAR module or light received by the LiDAR module to a receiver.

According to an embodiment, a semiconductor device includes a first actuator, a second actuator, a first frame provided between the first actuator and the second actuator, a first connection member connecting the first actuator and the first frame to each other, a second connection member connecting the first actuator and the first frame to each other at a position different from a position at which the first connection member connects the first actuator and the first frame to each other, a third connection member connecting the second actuator and the first frame to each other, a fourth connection member connecting the second actuator and the first frame to each other at a position different from a position at which the third connection member connects the second actuator and the first frame to each other.

A micromechanical apparatus includes a substrate, a movable element disposed in a reference plane in an undeflected state, a transmission structure having a first transmission side coupled to the substrate, and a second transmission side coupled to the movable element, and an actuator configured to provide a force along a force direction parallel to the reference plane and apply the same to the first transmission side. The transmission structure is configured to transfer the force along the force direction to a movement of the movable element out of the reference plane.

A MEMS includes a substrate having an element movably suspended relative to the substrate, the element having a first main surface and an opposite second main surface. The MEMS includes a first spring element connected between the substrate and a first column structure connected to the second main surface, and includes a second spring element connected between the substrate and a second column structure connected to the second main surface.

An actuator includes an arm starting end having a piezoelectric element, a first end of the arm starting end connected to an inner side of a fixed frame, the arm starting end extending in a straight line, along a Y-axis direction through a gap between the fixed frame and a mirror surface, from the first end to beyond a middle point of an outer side of the mirror surface; an arm terminating end including a first end connected to the middle point of the outer side of the mirror surface, the arm terminating end extending parallel to the arm starting end; and an arm relay that connects a second end of the arm starting end to a second end of the arm terminating end, the arm relay being formed in a zigzag.

An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.