Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
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2207/00
Microstructural systems or auxiliary parts thereof
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B81B2207/01
comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS
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B81B2207/015
the micromechanical device and the control or processing electronics being integrated on the same substrate
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