B81C1/00373

Interfacial Convective Assembly for High Aspect Ratio Structures Without Surface Treatment
20190389720 · 2019-12-26 ·

A method for assembling colloidal particles onto a substrate surface through fluid transport. The method comprises placing a first fluid placed adjacent to the substrate surface, applying a colloidal dispersion on top of the first fluid layer and removal of the first fluid layer. The method is extremely versatile, and is especially useful in depositing colloidal materials in high aspect ratio channels and vias without the need for prior treatment of the surface.

Anti-stiction process for MEMS device

A method for treating a micro electro-mechanical system (MEMS) component is disclosed. In one example, the method includes the steps of providing a first wafer, treating the first wafer to form cavities and at least an oxide layer on a top surface of the first wafer using a first chemical vapor deposition (CVD) process, providing a second wafer, bonding the second wafer on a top surface of the at least one oxide layer, treating the second wafer to form a first plurality of structures, depositing a layer of Self-Assembling Monolayer (SAM) to a surface of the MEMS component using a second CVD process.

SELECTIVELY CONTROLLING APPLICATION OF A SELF-ASSEMBLED MONOLAYER COATING ON A SUBSTRATE OF A DEVICE FOR FACILITATING A REDUCTION OF ADVERSE EFFECTS OF SUCH COATING ON THE DEVICE
20190341305 · 2019-11-07 ·

Selectively controlling application of a self-assembled monolayer (SAM) coating on a substrate of a device is presented herein. A method comprises: forming a material on a first substrate; removing a selected portion of the material from a defined contact area of the first substrate; forming a SAM coating on the material and the defined contact areathe SAM coating comprising a first adhesion force with respect to the material and a second adhesion force with respect to the defined contact area, and the first adhesion force being less than the second adhesion force; removing the SAM coating that has been formed on the material; and attaching the first substrate to the second substratethe first substrate being positioned across from the second substrate, and the SAM coating that has been formed on the defined contact area being positioned across from a bump stop of the second substrate.

SET-UP AND METHOD OF ELECTROHYDRODYNAMIC JET 3D PRINTING BASED ON RESULTANT EFFECT OF ELECTRIC FIELD AND THERMAL FIELD

The present invention belongs to the field of advanced manufacturing technology and relates to one set-up and method of electrohydrodynamic jet 3D printing based on resultant effect of electric field and thermal field. This method is used to fabricate micro/nano 3D structure, under the resultant effects of electro hydrodynamic force and thermal field. First of all, the ink reaches needle orifice at a constant speed under the resultant effect of fluid field and gravity field. Then a high voltage electric field is applied between needle and substrate. And the ink is dragged to form stable micro/nano scale jet which is far smaller than the needle size using the electric field shear force generated at needle orifice. The solvent evaporation rate of ink increases combined with the radiation of thermal field at the same time. Finally, the micro/nano scale 3D structure is fabricated on substrate with the accumulation of jet layer by layer. Compared with liquid jet printing technology, this method describing in present invention owns many advantages, including wide adaptability of material and manufacturing complex micro/nano scale 3D structures.

NANOPRINTING DEVICE, MATERIALS AND METHOD
20190310548 · 2019-10-10 · ·

A device for nano-assembly of nanoparticles in nanoimprinted wells on a substrate surface includes a substrate holder, a platen, a heater and a conveyor. The substrate holder is arranged to support the substrate. The platen is arranged to have a print gap between the substrate and platen, the print gap containing a nanoink having a carrier fluid and nanoparticles within the carrier fluid. The heater is configured to provide heat to the substrate holder. The conveyor is configured to move the substrate relative to the platen such that nanoparticles are nanoassembled into the nanoimprinted wells as the substrate traverses a carrier fluid filled nano-assembly area by motion of the substrate holder.

Anti-Wetting Coating for Si-Based MEMS Fluidic Device, and Method of Application of Same
20190308875 · 2019-10-10 ·

A photo-patterned fluorocarbon monolayer directly grafted to Si surface atoms provides anti-wetting performance at controlled locations, wherein the Si surface oxide is etched and reacted with fluorocarbon chains with a terminal CC double bond, resulting in SiC surface. As the direct SiC linkages are chemically robust, and much more resistant to decomposition than SiOC bonds, the resulting surface does not suffer from the shortcomings of current MEMS dispensers.

Method of processing nano- and micro-pores

A method of processing nano- and micro-pores includes washing a substrate and cleaning a surface of the substrate; spin-coating photoresist, exposing the substrate and developing to form the substrate with a pattern; 3. depositing micro-nano metal particles on the surface of the substrate; wherein the micro-nano metal particles are centered on a magnetic core; and the surface of the magnetic core is plated with a metal nano-particle coating composed of a plurality of gold, silver or aluminum nanoparticles; removing the photoresist, and maintaining dot arrays of the micro-nano metal particles; applying laser irradiation and a strong uniform magnetic field on the substrate, so that the substrate is processed to form processed structures; and after the processed structures being formed into nano-/micro-pores with targeted pore size, shape and depth, stopping the laser irradiation and removing the strong uniform magnetic field.

Method for producing a substrate structured by nanowires, produced substrate, and use of the substrate

The invention relates to a method for producing a substrate structured by nanowires, characterized in that no lubricant and no lithographic resist mask is used in the method, and only by moving a donor substrate having nanowires relative to a substrate and by locally tribological properties on the surface of the substrate, a specified number of nanowires is deposited selectively at locally defined points of the substrate. The invention further relates to a substrate that can be produced using the method according to the invention, and which selectively contains a specified number of nanowires on a surface at locally defined points. The invention further relates to the use of the substrate according to the invention in microelectronics, microsystems technology, and/or micro-sensor systems.

Plasma micronozzle adapter

Plasma micro nozzle adapters having various configurations and operating principles are disclosed. The plasma micro nozzle adapter is employed with a commercial plasma jet printer to produce smaller printed features than those possible with the original plasma jet printer. In a first class of embodiments, the plasma micro nozzle adapter narrows a plasma jet using electrostatic or magnetostatic lensing, permitting the printing of ceramic, metallic, dielectric, or plastic features with line widths of 10 ?m or less. In a second class of embodiments, the plasma micro nozzle adapter narrows the plasma jet using a gas sheath. By adjusting the flow rate or pressure of the gas used to form the gas sheath, the cross-sectional shape of the plasma jet may form, for example, an ellipse, thereby controlling the width of the printed feature. A third class of embodiments employs both electrostatic (or magnetostatic) lensing along with the gas sheath.

SYSTEM AND METHOD FOR FORMING A BIOLOGICAL MICRODEVICE
20190240658 · 2019-08-08 ·

A method for forming a biological microdevice includes applying a biocompatible coarse scale additive process with an additive device and a biocompatible material to form an object. The coarse scale is a dimension not less than about 100 m. The method also includes applying a biocompatible fine scale subtractive process with a subtractive device to the object. The fine scale is a dimension not greater than about 1000 m. The method also includes moving the object between the additive device and the subtractive device. A system is also provided for performing the above method and includes the additive device, the subtractive device, a means for transporting the object between the additive device and subtractive device and a processor with a memory including instructions to perform one or more of the above method steps.