Patent classifications
B
B81
B81C
1/00
B81C1/00841
B81C1/00857
B81C1/00857
CLEANING COMPOSITION WITH MOLYBDENUM ETCHING INHIBITOR
20260043148
·
2026-02-12
·
The present disclosure relates to removal compositions for at least partially removing post-chemical mechanical polishing (post-CMP) residues from the surface of a microelectronic device. The removal compositions comprise an aqueous base composition and various molybdenum etching inhibitors that reduce the amount of molybdenum removed from the surface of the microelectronic device compared to the aqueous base composition.