A nano-structure includes an outer area at an edge of the nano-structure. A width of the outer area defined by a distance from the edge of the nano-structure is less than 100 m. A depth of the nano-structure in the outer area changes gradually between 0% and at least 50% of a maximum depth of the nano-structure. A method includes forming an etch mask on a substrate and etching the substrate with the etch mask using an ion beam to form a nano-structure in the substrate. The etch mask includes an outer area near an edge of the etch mask. A width of the outer area defined by a distance from the edge of the etch mask is less than 100 m. A duty cycle of the etch mask in the outer area changes gradually between at least 10% and at least 90%.

A dry adhesive and a method of forming a dry adhesive. The method includes forming an opening through an etch layer and to a barrier layer, expanding the opening in the etch layer at the barrier layer, filling the opening with a material, removing the barrier layer from the material in the opening, and removing the etch layer from the material in the opening.

A fluid device composite member includes: a silicone member that includes a body part which is made of silicone and which has a flow-path-defining section for defining a flow path on one surface of the body part, and that includes barrier layer having hydrophilicity or hydrophobicity disposed in at least a portion of the flow-path-defining section; and a resin substrate disposed on another surface of the body part opposite to the one surface. This method for manufacturing the fluid device composite member includes a layered body manufacturing step in which a liquid silicone material is placed on a surface of the resin substrate, and the liquid silicone material is cured at a temperature of 100 C. or less to obtain a layered body in which a silicone cured product is bonded to the resin substrate.

A method for fabricating three-dimensional microstructures is presented. The method includes: disposing a substantially planar reflow material between two molds; heating the reflow material while the reflow material is disposed between the two molds; and reflowing the reflow material towards the bottom surface of one of the molds by creating a pressure gradient across the reflow material. At least one of molds includes geometrics features that help to shape the reflow material and thereby form a complex three-dimensional microstructure.

The present invention relates to a method for producing a microfluidic device, in particular, a sol-gel method for producing a microfluidic device in hybrid silica glass. The invention also relates to a microfluidic device obtainable by the method as described above and to microfluidic device in hybrid silica glass comprising at least one microchannel having a depth of at least 1 m, preferably between 1 m and 1 mm, and more preferably between 10 and 100 m.

A method for fabricating three-dimensional microstructures is presented. The method includes: disposing a substantially planar reflow material between two molds; heating the reflow material while the reflow material is disposed between the two molds; and reflowing the reflow material towards the bottom surface of one of the molds by creating a pressure gradient across the reflow material. At least one of molds includes geometrics features that help to shape the reflow material and thereby form a complex three-dimensional microstructure.

Method for manufacturing a master pattern for a mold for a horology component, wherein the method includes manufacturing a first structure from a first photosensitive resin comprising at least one layer of photosensitive resin comprising a first pattern obtained by polymerizing the first photosensitive resin by irradiation through at least one mask, then developing the first photosensitive resin; and transforming the first structure into a second structure by structuring at least one surface of the first structure by the addition of a second photosensitive resin to the at least one surface.

A method for manufacturing a metallic nanospring includes preparing a nanotemplate having a nanopore and including a working electrode disposed on its one surface, preparing a first metal precursor mixture including ascorbic acid (C.sub.6H.sub.8O.sub.6), vanadium (IV) oxide sulfate (VOSO.sub.4.xH.sub.2O), and a metal precursor solution including a metal desired to be deposited, preparing a second metal precursor mixture by mixing the first metal precursor mixture with nitric acid (HNO.sub.3), depositing a metallic nanospring into the nanopore using electrodeposition by dipping the nanotemplate into the second metal precursor mixture and applying current between a counter electrode inserted into the second metal precursor mixture and the working electrode, and selectively removing the working electrode on the nanotemplate with the deposited metallic nanospring and the nanotemplate.

A semi-finished product and a method for manufacturing a semi-finished product having at least one micro-component, which method uses a multi-component injection molding process, are disclosed, in which at least one mold chamber of an injection mold is provided with at least one lost part made of a first material, more particularly an injection-molded plastic material, and in another step for producing the micro-component, a second material, which is different from the first material and is elastomer-based, more particularly silicone-based, is injected, as a result of which a firm and form-fitting connection forms between the micro-component and the lost part. In order to be able to achieve advantageous cycle times in a risk-free way, it is proposed for the lost part to be embodied as a macroscopic object holder for the micro-component to permit manipulation of the semi-finished product and for the mold chamber to be provided with this lost part.

A microstructured surface with microfeatures formed thereon and defining spaces between the microfeatures includes least one electrode of an electrode pair in the spaces, wherein electrodes of the pair are electrically connected to one another. The at least one electrode located in the space is configured to generate a gas in between the microfeatures when an electrolyte solution penetrates into the microfeatures. Importantly, the electrodes are not connected to any external power source. Because the microstructured surface is self-powered in replenishing the gas lost in a submerged condition, no additional provision to supply energy or regulate the replenishment is necessary for implementation and use.