Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
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2201/00
Manufacture or treatment of microstructural devices or systems
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B81C2201/05
Temporary protection of devices or parts of the devices during manufacturing
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B81C2201/056
Releasing structures at the end of the manufacturing process
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B81C2201/056

DEVICE ENCAPSULATION USING PHYSICAL VAPOR DEPOSITION
20260035238 · 2026-02-05 ·

A method includes forming a microelectromechanical system (MEMS) device wherein the MEMS device includes a cavity and one or more release holes extending from a surface of the MEMS device to the cavity, and sealing at least a portion of the MEMS device including the one or more release holes with a film utilizing a physical vapor deposition (PVD) process.