A dust filter barrel includes a sheet filter cylinder, a mesh cylinder and a fixation base. The sheet filter cylinder has two end faces, an inner layer and an outer layer laminated on the inner layer; wherein the inner layer has a plurality of pores having a first pore diameter, the outer layer has a plurality of pores having a second pore diameter, and the second pore diameter is smaller than the first pore diameter. The mesh cylinder is non-contact with the outer layer of the sheet filter cylinder and sleeved outside the sheet filter cylinder and has two end faces. The fixation base has a first and second cover bodies disposed on the two end faces of the sheet filter cylinder and the mesh cylinder respectively, and the second cover body is formed with at least one opening communicated with the sheet filter cylinder.

An air purifier including a body including a suction port and a discharge port, and having an inner space through which air is configured to flow from the suction port to the discharge port, a fan disposed in the inner space of the body and having a side surface separated from an inner wall of the body, a light source module including at least one UV light source disposed in the inner space of the body, a power controller mounted on the inner wall of the body, at least one filter disposed in the inner space of the body, a filter replacement region formed at the body to detachably couple the at least one filter to an interior of the body, a door detachably mounted on the body to expose the filter replacement region and including a door guide member having a groove.

A surface cleaning apparatus having an air flow path from a dirty air inlet to a clean air outlet and including an air treatment member, a suction motor and a filter assembly in the air flow path. The filter assembly includes at least two spaced apart physical filter elements with the upstream face of the second filter facing the downstream face of the first filter element. The filter assembly is configured to prevent air from bypassing the first physical filter media. The filter assembly includes a gap between the first filter element and the second filter element that acts as a header and reduces the flow rate of air incident on the second filter element.

A handheld vacuum cleaner including a fluid flow path, a main body, a fluid flow motor, a battery, and a cyclone chamber. The fluid flow path extends from a dirty air inlet to a clean air outlet, and the main body includes a handle. The fluid flow motor is positioned in the fluid flow path. The battery is positioned below the fluid flow motor. The cyclone chamber is in the fluid flow path transverse to the dirty air inlet. The cyclone chamber includes a first end wall and a second end wall, a cyclone chamber axis passing through the first end wall and the second end wall, a cyclone dirty fluid inlet, and a cyclone clean fluid outlet. The first end wall and the second end wall of the cyclone chamber both intersect a common horizontal plane when the handheld vacuum cleaner is positioned on a horizontal surface.

A handheld vacuum cleaner including a fluid flow path, a main body, a fluid flow motor, a battery, and a cyclone chamber. The fluid flow path extends from a dirty air inlet to a clean air outlet, and the main body includes a handle. The fluid flow motor is positioned in the fluid flow path. The battery is positioned below the fluid flow motor. The cyclone chamber is in the fluid flow path transverse to the dirty air inlet. The cyclone chamber includes a first end wall and a second end wall, a cyclone chamber axis passing through the first end wall and the second end wall, a cyclone dirty fluid inlet, and a cyclone clean fluid outlet. The first end wall and the second end wall of the cyclone chamber both intersect a common horizontal plane when the handheld vacuum cleaner is positioned on a horizontal surface.

A filter element has a central channel, an inner core, an inner filter member, an outer core, and an outer filter member. The inner core has vent holes formed around a portion facing the central channel. The outer core has a perforated portion having vent holes formed therearound and a non-perforated portion having no vent hole. The region over which the non-perforated portion is formed along the central channel extends from a position above the central position of the central channel in the up-down direction to the upper end of the central channel. The region over which the perforated portion is formed along the central channel extends from the lower end of the non-perforated portion to the lower end of the central channel.

A filter element has a central channel, an inner core, an inner filter member, an outer core, and an outer filter member. The inner core has vent holes formed around a portion facing the central channel. The outer core has a perforated portion having vent holes formed therearound and a non-perforated portion having no vent hole. The region over which the non-perforated portion is formed along the central channel extends from a position above the central position of the central channel in the up-down direction to the upper end of the central channel. The region over which the perforated portion is formed along the central channel extends from the lower end of the non-perforated portion to the lower end of the central channel.

An air treatment system for an agricultural vehicle includes an air filtration apparatus having an air filter housing for receiving an air filter cartridge and downstream air processing apparatus fluidly connected with the air filter housing by a duct. The system can receive first and second type air filter cartridges having corresponding first and second outlet sealing configurations. The duct has inner and outer conduits that define an inner flow path and an outer flow path. A filter sealing arrangement of the duct can engage with either type of filter cartridge. This enables two different types of filter cartridge, which may be configured to provide different levels of filtration, to be selectively mounted to the system in the same housing. Air flow may be restricted to the inner flow path when one type of air filter cartridge is fitted.

A method of fabricating a semiconductor device includes providing a wafer inside a process chamber, performing an ALD (atomic layer deposition) process inside the process chamber to deposit titanium nitride on the wafer, providing a process gas used for the ALD process to a scrubber, filtering a first powder contained in the process gas, using a filter unit disposed in the scrubber and including a plurality of filters, adsorbing a second powder remaining in the process gas after passing through the filter unit, using a fin structure extending in a vertical direction inside the filter unit, and exhausting the process gas, from which the first and second powders are removed, from the scrubber.

A method of fabricating a semiconductor device includes providing a wafer inside a process chamber, performing an ALD (atomic layer deposition) process inside the process chamber to deposit titanium nitride on the wafer, providing a process gas used for the ALD process to a scrubber, filtering a first powder contained in the process gas, using a filter unit disposed in the scrubber and including a plurality of filters, adsorbing a second powder remaining in the process gas after passing through the filter unit, using a fin structure extending in a vertical direction inside the filter unit, and exhausting the process gas, from which the first and second powders are removed, from the scrubber.