A process chamber, such as for semiconductor processing equipment, is connected with a recovery unit. The recovery unit includes a first storage tank for buffer gas and a second storage tank for rare gas. Both storage tanks are connected with a column in the recovery unit. The recovery unit and process chamber can operate as a closed system. The rare gas can be transported at a variable flow rate while separation in the recovery unit operates at a constant flow condition.

A process chamber, such as for semiconductor processing equipment, is connected with a recovery unit. The recovery unit includes a first storage tank for buffer gas and a second storage tank for rare gas. Both storage tanks are connected with a column in the recovery unit. The recovery unit and process chamber can operate as a closed system. The rare gas can be transported at a variable flow rate while separation in the recovery unit operates at a constant flow condition.

The invention relates to a process for the combined production of hydrogen and carbon dioxide from a hydrocarbon mixture, in which the residual gas of a PSA H.sub.2 (12) is separated by permeation in order to reduce the hydrocarbon content thereof and the hydrocarbon-purified gas is separated at a low temperature to produce a carbon dioxide-rich liquid (22).

The invention relates to a process for the combined production of hydrogen and carbon dioxide from a hydrocarbon mixture, in which the residual gas of a PSA H.sub.2 (12) is separated by permeation in order to reduce the hydrocarbon content thereof and the hydrocarbon-purified gas is separated at a low temperature to produce a carbon dioxide-rich liquid (22).

The present invention and embodiments thereof provide a process to separate ethylene products from impurities such as nitrogen, hydrogen, ethane, propane and isobutane without the need for distillation processes.

The present invention and embodiments thereof provide a process to separate ethylene products from impurities such as nitrogen, hydrogen, ethane, propane and isobutane without the need for distillation processes.

Structured adsorbent beds comprising a high cell density substrate, such as greater than about 1040 cpsi, and a coating comprising adsorbent particles, such as DDR and a binder, such as SiO.sub.2 are provided herein. Methods of preparing the structured adsorbent bed and gas separation processes using the structured adsorbent bed are also provided herein.

A process is disclosed for the removal of hydrogen sulfide (H.sub.2S) from natural. This process provides for passing a natural gas feedstream comprising H.sub.2S though a regenerable adsorbent media which adsorbs H.sub.2S to provide an H.sub.2S-lean natural gas product and H.sub.2S. The regenerable adsorbent media of the present invention is a tertiary amine functionalized cross-linked macroporous polymeric adsorbent media.

A process is disclosed for the removal of hydrogen sulfide (H.sub.2S) from natural. This process provides for passing a natural gas feedstream comprising H.sub.2S though a regenerable adsorbent media which adsorbs H.sub.2S to provide an H.sub.2S-lean natural gas product and H.sub.2S. The regenerable adsorbent media of the present invention is a tertiary amine functionalized cross-linked macroporous polymeric adsorbent media.

The present invention concerns the use, for gas separation, of at least one zeolite adsorbent material comprising at least one FAU zeolite, said adsorbent having an external surface area greater than 20 m.sup.2.Math.g.sup.−1, a non-zeolite phase (PNZ) content such that 0<PNZ≦30%, and an Si/Al atomic ratio of between 1 and 2.5. The invention also concerns a zeolite adsorbent material having an Si/Al ratio such that 1≦Si/Al<2.5, a mesoporous volume of between 0.08 cm.sup.3.Math.g.sup.−1 and 0.25 cm.sup.3.Math.g.sup.−1, a (Vmicro−Vmeso)/Vmicro ratio of between −0.5 and 1.0, non-inclusive, and a non-zeolite phase (PNZ) content such that 0<PNZ≦30%.