A scrubber for removing pollutant compounds from a gas stream. At least one gas channel introduces the gas stream to a lower portion of the scrubber. An inlet chamber directs the gas stream upwards to form a vertical gas stream. A constriction section has a vertical axis of symmetry and includes a centrally arranged venturi nozzle, and is above and in flow connection with an upper end of the inlet chamber for accelerating the vertical gas stream. A reaction chamber is arranged above and in flow connection with the constriction section. A reagent in the reaction chamber converts pollutant compounds in the gas stream to reaction products. A discharge channel in flow connection with the reaction chamber discharges gas and particles including the reaction products from the reaction chamber. A particle separator separates particles from the gas. A return channel recycles a portion of the particles to the reaction chamber.

A synergetic system for waste treatment is provided. The synergetic system includes a waste treatment system configured to perform biological treatment of waste. Additionally, the synergetic system includes a gas purification system configured to purify exhaust gas generated during the biological treatment of the waste. The synergetic system further includes a feeding system configured to feed excess heat from the gas purification system back to the waste treatment system. The waste treatment system is further configured to use the fed back excess heat for the biological treatment of the waste.

A method for producing fluorine gas including a fluorination step of obtaining a reaction mixture containing a major fluorinated substance that is a target component generated by fluorination of a raw material compound and by-product hydrogen fluoride, a separation step of separating the reaction mixture to obtain a main product component containing the major fluorinated substance and a by-product component containing the by-product hydrogen fluoride, a purification step of purifying the by-product component to obtain a recovered hydrogen fluoride component in which a concentration of an organic substance is reduced and a concentration of the by-product hydrogen fluoride is increased, an electrolysis step of performing electrolysis using the recovered hydrogen fluoride component as at least a part of an electrolyte to produce fluorine gas, and an introduction step of introducing the fluorine gas obtained in the electrolysis step into a reaction field for fluorination in the fluorination step.

Method for scrubbing sulfuryl fluoride, which is accomplished by placing a fluid comprising sulfuryl fluoride in contact with an aqueous solution of a base and a peroxide having at least oneOOH group. Also described is kit suitable for use with the sulfuryl fluoride scrubbing method.

A gas treatment system includes a first scrubber, a regenerative catalytic oxidizer (RCO) that treats gas that passes through the first scrubber, a second scrubber that treats the gas that passed through the regenerative catalytic oxidizer, and a dielectric barrier discharge (DBD) plasma reactor that treats the gas that passed through the second scrubber. The regenerative catalytic oxidizer includes a two-bed regenerative catalytic reactor.

A system is provided, wherein the system includes a remote plasma source, a process chamber, a pressure swing adsorption filter and a chemical adsorption filter. The pressure swing adsorption filter and the chemical adsorption filter the exhaust from the process chamber to produce a filtered exhaust being a fluorine rich gas stream.

A battery safety system for controlled, active gas release. The battery safety system includes a sorption element configured to absorb chemical compounds generated during gas release events, such as those caused by aging, leakage, or accidents. The system further includes a sensor or indicator configured to monitor the saturation state of the sorption element. Methods of using the battery safety system are also disclosed, including monitoring the saturation of the sorption element to ensure continued functionality and safety of the system. The use of the battery safety system in battery-powered transportation devices, household appliances, and large-scale electrochemical storage systems is also disclosed. Additionally, the use of a sensor or indicator for monitoring the saturation of sorption elements in battery systems is provided.

A process includes providing a reactor containing a compound of the formula SiO.sub.x, wherein 0x2, and receiving, at the reactor, fluorinated gas. The process also includes obtaining a gaseous mixture formed at an elevated temperature in the reactor and removing silicon tetrafluoride from the gaseous mixture. An apparatus includes a reactor containing a compound of the formula SiO.sub.x, wherein 0x2, a component for receiving fluorinated gas at the reactor, a heating element for heating the compound of the formula SiO.sub.x and the fluorinated gas in the reactor, and a separation component for removing silicon tetrafluoride from a gaseous mixture formed in the reactor. A process of semiconductor manufacturing includes defluorinating exhaust gas using the process. A system for semiconductor manufacturing includes a set of components for carrying out the process.

A fluoride ion cleaning system includes a retort for cleaning at least one component via a working fluid supplied to the retort, a post-retort subsystem for processing a post-retort fluid stream exiting the retort at a first temperature, and a scrubber downstream from the post-retort subsystem. The post-retort subsystem includes a separator in flow communication with the retort. The separator includes an inlet for receiving the post-retort fluid stream from the retort and an outlet for the post-retort fluid stream exiting the separator. The post-retort subsystem also includes a cooling device for selectively cooling the post-retort fluid stream to a second temperature, the second temperature being lower than the first temperature. The second temperature enables particulate to be separated from the post-retort fluid stream within the separator.

Provided are a catalyst treatment apparatus for heating an exhaust gas and decomposing perfluorocompounds using a catalyst, and an exhaust gas treatment system using the same. Even when an exhaust gas passes through a pretreatment wet-type treatment apparatus, the exhaust gas lacks oxygen, and a dust collecting operation is not smoothly performed at the rear due to the lack of oxygen. An exhaust gas charging unit charges fine particles in an exhaust gas by supplying air or oxygen. Thus, an operation of decomposing perfluorocompounds may be smoothly performed.