Refrigeration systems with a purge for removing non-condensables from the refrigerant and an acid filter for remove acid from the refrigerant are provided. The acid filter can be operatively connected to the purge. Optionally, the purge can include a separating device for separating non-condensable gases from condensable refrigerant gases and an acid filter is provided to remove acid from the condensable refrigerant gases.

The invention relates to a method for increasing the absorbency of a material containing alkaline-earth carbonate and alkaline-earth hydroxide with regard to sulfur oxides and/or other pollutants, in particular in flue gas, wherein the material containing alkaline-earth carbonate and alkaline-earth hydroxide is activated by heating said material to approximately 250° C. to approximately 750° C. for a time period of 1 minute to 12 hours.

Disclosed are methods and systems for capturing carbon dioxide from a gas stream. The methods and systems can also be used to reduce pollutants from a gas stream. The nozzle alignment of the system avoids droplet collision and merger with a corresponding loss of surface area. The high surface area of the droplets allows for increased efficiency of CO.sub.2 capture.

A method for removing a halogen fluoride in a mixed gas by reacting the mixed gas containing a halogen fluoride including bromine or iodine with a removing agent, wherein the removing agent is a chloride, bromide or iodide of potassium, sodium, magnesium, calcium and barium. Also disclosed is a quantitative analysis method as well as a quantitative analyzer for a gas component contained in a hydrogen fluoride mixed gas, the method characterized by reacting a mixed gas containing a halogen fluoride and another gas component with a removing agent, thereby removing the halogen fluoride in the mixed gas, further removing produced by-products, and quantitatively analyzing a residual gas by a gas chromatograph.

The use of a composition including at least one acido-basic neutralising agent for decontaminating an atmosphere contaminated by a corrosive gas, the acido-basic neutralising agent having at least 2 pKa's and being characterised by: pKa 1≤pKa 2, pKa 1>2, pKa 2<12, 4<½ (pKa 1+pKa 2)<10 pKa 1, representing the smallest of the basic pKa's and pKa 2 representing the largest of the acidic pKa's. Also, a method for decontaminating an atmosphere contaminated by a corrosive gas comprising the spraying of the neutralising agent, and to a decontamination device.

An apparatus and method for treating a semiconductor process gas comprises a gas inlet allowing a treatment target gas (or gas to be treated) to flow therethrough; a catalytic reaction portion including a catalyst and configured to allow the treatment target gas to be brought into contact with the catalyst; a space velocity controller between the gas inlet and the catalytic reaction portion, the space velocity controller extending from the gas inlet in a diagonal direction in relation to the gas inlet; a differential pressure buffer portion between the space velocity controller and the catalytic reaction portion and including a filter; and a gas outlet configured to externally discharge a product formed as the treatment target gas comes into contact with the catalyst.

A method and device for purifying heptafluoroisobutyronitrile and a dilution gas from a used gas mixture comprising heptafluoroisobutyronitrile, a dilution gas and arcing by-products. The method comprising the steps of (a) contacting the used gas mixture with at least one adsorbent material to generate a gas stream depleted in arcing by-products; (b) contacting the gas stream depleted in by-products with a first membrane to obtain a first permeate stream rich in the dilution gas, and a first retentate stream rich in heptafluoroisobutyronitrile; (c) contacting the first permeate stream rich in the dilution gas with a second membrane to obtain a second permeate stream rich in the dilution gas and a second retentate stream rich in heptafluoroisobutyronitrile; and (d) combining the first and second retentate streams rich in heptafluoroisobutyronitrile.

A process for purifying a feed gas stream containing at least 90% of CO.sub.2, at least 20% RH and at least one impurity chosen from chlorinated, sulfur-bearing, nitrated or fluorinated compounds is provided. The process includes a) subjecting the feed gas stream to catalytic oxidation producing a stream containing at least one of HCl, NOx, SOx or hydrofluoric acid; b) maintaining the temperature of the gas stream above the highest value between the dew points of water and the acid(s) contained in the gas; c) removing at least a part of the acid impurities by bringing the gas stream into contact with a corrosion-resistant heat exchanger to condense the acid compounds while regulating the temperature of the gas stream exiting below the dew point of water; and d) separating the acid condensates with a corrosion-resistant separator in such a way as to produce a CO.sub.2-enriched gas stream.

Disclosed is a system for treating exhaust fluid from semiconductor manufacturing equipment in which cleaning gases decomposed by a plastic apparatus alternately flow towards a front rotor region (a main rotor unit) and a rear rotor region (a subsidiary rotor unit) of a booster pump and then flow towards a dry pump, and thus uniformly react with process byproducts present throughout the whole area in a vacuum pump including the booster pump and the dry pump so as to improve removal efficiency of the process byproducts. Further, the retention time of the cleaning gases decomposed by the plasma apparatus in the vacuum pump is increased by adjusting the pressure in the pump with the rotational speed of a motor, and thus the reaction time of the cleaning gases with the process byproducts is increased, so as to further improve removal efficiency of the process byproducts, such as SiO.sub.2 powder.

Refrigeration systems with a purge for removing non-condensables from the refrigerant and an acid filter for remove acid from the refrigerant are provided. The acid filter can be operatively connected to the purge. Optionally, the purge can include a separating device for separating non-condensable gases from condensable refrigerant gases and an acid filter is provided to remove acid from the condensable refrigerant gases.