A fluid mixer configured to stably supply a mixed fluid having a desired mixing ratio, and which can be reduced in size. This fluid mixer includes a Venturi tube having a constriction section at which the flow path area is reduced, the Venturi tube having formed therein a first inflow opening and a second inflow opening through which a second fluid flows into a low-pressure region produced due to an increase in fluid velocity when a first fluid passes through the constriction section. A valve body that is disposed within the Venturi tube, the valve body closing due to the pressure of the first fluid passing through the Venturi tube and changing the flow path area of the Venturi tube, blocking off the first inflow opening when closed, and opening the first inflow opening when opened; and a biasing part (elastic body) applying a biasing force in the valve closing direction of the valve body.

Gas injectors for providing uniform flow of fluid are provided herein. The gas injector includes a plenum body. The plenum body includes a recess, a protrusion adjacent to the recess and extending laterally away from the plenum body, and a plurality of nozzles extending laterally from an exterior surface of the plenum body. The plenum body has a plurality of holes in an exterior wall of the plenum body. Each nozzle is in fluid communication with an interior volume of the plenum body. By directing the flow of fluid, the gas injector provides for a uniform deposition.

A vacuum pumping system which comprises a plurality of vacuum pumping arrangements for evacuating a flammable gas stream and exhausting the gas stream through an exhaust outlet. A housing houses the vacuum pumping arrangements and forms an air flow duct for an air flow for mixing with the exhaust gas stream output from the exhaust outlet in a mixing region in the housing. An airflow generator generates an air flow through the air flow duct to cause mixing of air with the flammable gas stream to a percentage of the flammable gas in the air flow lower than the lower flammability limit of the flammable gas. An airflow sensor senses the flow of air for determining if the air flow is sufficient to dilute the flammable gas to lower than said percentage.

A method of co-producing a nitrogen containing stream and a methanol stream, including producing at least an oxygen enriched stream and a nitrogen enriched stream in an air separation unit, introducing at least a portion of the oxygen enriched stream into an oxygen-based reformer, thereby producing a first syngas stream, introducing at least a portion of the first syngas stream into a methanol synthesis reactor, thereby producing at least a hydrogen containing stream and a methanol containing stream, introducing at least a portion of the methanol containing stream into a methanol distillation system, thereby producing a methanol product stream, introducing at least a portion of the nitrogen enriched stream, at least a portion of the first enriched hydrogen containing stream, and at least a portion of the second enriched hydrogen containing stream into an ammonia synthesis reactor, thereby producing an ammonia product stream.

A supply part includes a first partition, a second partition under the first partition, a third partition under the second partition, a first flow path between the first partition and the second partition allowing a first gas to be introduced therein, a second flow path between the second partition and the third partition allowing a second gas to be introduced therein, a first piping extending from the second partition to reach below the third partition and being communicated with the first flow path, a second piping extending from the third partition to reach below the third partition and being communicated with the second flow path, and a convex portion provided on an outer circumferential surface of the first piping or an inner circumferential surface of the second piping protruding from one of the outer circumferential surface and the inner circumferential surface toward the other one.

A control device for an internal combustion engine includes an intake channel, an exhaust gas recirculation channel which enters into the intake channel, a control element, a mixing housing which forms the intake channel, a connection element, a compressor, and a shaft. The mixing housing has a mouth of the exhaust gas recirculation channel in a lower area, an outlet, a mixing housing section, and a bowl-shaped recess. The cross-sectional extension is formed via the mixing housing to provide an axial stop face. The connection element abuts against the axial stop face and is radially limited by an axially opposite inner wall surface on the stop face. The mixing housing section has a recess arranged at the lowest point of the mixing housing section and below the axially opposite inner wall surface. The recess enters into the bowl-shaped recess of the mixing housing.

A gas chamber supply system includes a gas source configured to fluidly connect to a gas chamber and to supply a gas mixture to the gas chamber, the gas source including: a pre-prepared gas supply including a gas mixture, the gas mixture including a plurality of gas components and lacking a halogen; a recycled gas supply including the gas mixture; and a fluid flow switch connected to the pre-prepared gas supply and to the recycled gas supply. The gas chamber supply also includes a control system configured to: determine if the relative concentration between the gas components within the recycled gas supply is within an acceptable range; and provide a signal to the fluid flow switch to thereby select one of the pre-prepared gas supply and the recycled gas supply to as the gas source based on the determination.

A gas recycle system includes a gas purifier system; a gas analysis system; a gas blending system that prepares a recycled gas mixture; and a control system configured to: determine whether a measured amount of at least one intended gas component is within a first range of acceptable values; and determine whether a measured amount of the at least one impurity gas component is within a second range of acceptable values. If the measured amount of the at least one intended gas component is not within the first range of acceptable values, the control system causes the gas blending system to add an additional gas component to the purified gas mixture to prepare the recycled gas mixture; and if the measured amount of the at least one impurity gas is not within the second range of acceptable values, the control system generates an error signal.

A method comprises transporting a first stream of a carrier gas to a delivery device that contains a liquid precursor compound. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream after emanating from the delivery device and the second stream are combined to form a third stream, such that the dew point of the vapor of the liquid precursor compound in the third stream is lower than the temperature of the plumbing that transports the vapor to a CVD reactor or a plurality of CVD reactors. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.

A method for generating a continuous carrier gas/vapour mixture stream containing a carrier gas, and a vapour of a liquid. The method includes provision of a first metered carrier gas stream, provision of a second metered carrier gas stream, provision of a metered, vapour-saturated carrier gas/vapour mixture stream, mixing of the second stream and the metered stream to provide a first gaseous mixture stream; and provision of a metered liquid stream fed to an evaporation/mixing device for evaporating the liquid and mixing with the first gaseous mixture stream to provide a second gaseous mixture stream.