A system for stabilizing gas-infused liquid, includes a tubular flow path configured to receive and pass therethrough the gas-infused liquid under a pressure of at least 20 psi, wherein a surface of the flow path configured to engage the gas-infused liquid flowing through the flow path is formed of material having a surface roughness (Ra) in a range of 0.1 m-10.0 m, and the flow path has a length which is at least 100 times a mean inner diameter thereof.

First and second concentration measurement parts (415, 425) are provided in first and second supply liquid lines (412, 422) in which first and second supply liquids flow, respectively. A dissolved concentration of gas in the second supply liquid is lower than that in the first supply liquid. In the first and second supply liquid lines, respective one ends of first and second branch lines (51, 52) are connected to respective positions on the upstream side of the concentration measurement parts. The other ends of the first and second branch lines are connected to a mixing part (57), and by mixing the first and second supply liquids, a processing liquid is generated. Respective flow rate adjustment parts (58) of the first and second branch lines are controlled on the basis of respective measured values of the first and second concentration measurement parts so that the dissolved concentration of the gas in the processing liquid can become a set value. It is thereby possible to prevent the supply liquid containing particles or the like caused by the concentration measurement part from being contained into the processing liquid to be supplied to a substrate and also to adjust the dissolved concentration of the gas in the processing liquid to the set value with high accuracy.

First and second concentration measurement parts (415, 425) are provided in first and second supply liquid lines (412, 422) in which first and second supply liquids flow, respectively. A dissolved concentration of gas in the second supply liquid is lower than that in the first supply liquid. In the first and second supply liquid lines, respective one ends of first and second branch lines (51, 52) are connected to respective positions on the upstream side of the concentration measurement parts. The other ends of the first and second branch lines are connected to a mixing part (57), and by mixing the first and second supply liquids, a processing liquid is generated. Respective flow rate adjustment parts (58) of the first and second branch lines are controlled on the basis of respective measured values of the first and second concentration measurement parts so that the dissolved concentration of the gas in the processing liquid can become a set value. It is thereby possible to prevent the supply liquid containing particles or the like caused by the concentration measurement part from being contained into the processing liquid to be supplied to a substrate and also to adjust the dissolved concentration of the gas in the processing liquid to the set value with high accuracy.

First and second concentration measurements are provided in lines for first and second supply liquid lines. A dissolved concentration of gas in the second supply liquid is lower than that in the first supply liquid. In the first and second lines, first ends of branch lines are connected upstream of the concentration measurements. The second ends of the branch lines are connected to a mixing part. By mixing the first and second supply liquids, a processing liquid is generated. Respective flow rates in the branch lines are based on the first and second concentration measurements to set the dissolved concentration of the gas in the processing liquid. Thus, particles or the like can be removed from the processing liquid to be supplied to a substrate, and the dissolved concentration of the gas in the processing liquid can be set with high accuracy.

A system for stabilizing gas-infused liquid, includes a tubular flow path configured to receive and pass therethrough the gas-infused liquid under a pressure of at least 20 psi, wherein a surface of the flow path configured to engage the gas-infused liquid flowing through the flow path is formed of material having a surface roughness (Ra) in a range of 0.1 m-10.0 m, and the flow path has a length which is at least 100 times a mean inner diameter thereof.

A bubble-generating apparatus comprises: a casing defining a casing bore extending longitudinally therethrough; and a diffuser located in the casing bore, the diffuser defining a diffuser bore extending longitudinally therethrough. The diffuser bore comprises a fluid-input region at or near a fluid-input end of the diffuser and a fluid-output region at or near a fluid-output end of the diffuser. A cross-sectional area of the diffuser bore in the fluid-input region is greater than the cross-sectional area of the diffuser bore in the fluid-output region. At least a portion of the diffuser is porous for permitting a flow of pressurized gas from a region of the casing bore located outside of the diffuser bore, through the porous portion of the diffuser and into the diffuser bore.

A dispensing device having a fitting housing with at least one first conduit for a carbonated liquid, a nozzle insert disposed in the at least one first conduit, wherein the nozzle insert has a guide channel with a first diameter, with which the carbonated liquid can be guided to a baffle wall of the nozzle insert so that the carbonated liquid can be vortexed by the baffle wall, an expansion space located downstream of the nozzle insert, wherein the expansion space has a second diameter which is greater than the first diameter of the guide channel, and an outlet opening disposed downstream of the expansion space and through which the vortexed carbonated liquid can exit the dispensing device.

Disclosed are methods for continuous production of ozone strong water, the methods comprising the steps of injecting an acidification agent into a pressurized feed water to maintain a pH value of the pressurized feed water below 7, diffusing a two-phase mixture of O.sub.2-O.sub.3 gas) and recirculated water into a body of acidic pressurized water to dissolve ozone into the acidic pressurized water. The disclosed methods include simultaneously maintaining a start-up mode in an upper portion of the dissolution column that favors high efficiency of ozone mass transfer into the acidic pressurized water and a steady state mode in a lower portion of the dissolution column that favors a high concentration of dissolved ozone in the acidic pressurized water coexistent in the body of the acidic pressurized water, wherein an ozone concentration gradient is formed along a height of the body of the acidic pressurized water.

Disclosed are systems for continuous production of ozone strong water, the systems comprising an injection device that injects an acidification agent into a pressurized feed liquid, a diffuser device that injects ozone into a body of the acidic pressurized feed water, and injection nozzles each controlled by a valve that adjust a flow rate of the ozone strong water discharged from a dissolution column to match a flow rate of the acidic pressurized feed water fed to the dissolution column, thereby maintaining a start-up mode in an upper portion of the dissolution column that favors a high efficiency of ozone mass transfer and a steady-state mode in a lower portion of the dissolution column that favors a high dissolved ozone concentration coexistent in the body of the acidic pressurized liquid, wherein a concentration gradient of dissolved ozone is formed along a height of the body of the acidic pressurized liquid.

Disclosed are systems and methods for mixing a gas-free liquid oxidant with a process liquid to form a homogeneous and gas-free mixture with minimized degassing. The mixing system comprises an injection device, integrating with a pipe through which a process liquid flows, configured and adapted to inject a gas-free liquid oxidant into the process liquid, and a mixer, fluidly connected to the pipe and the injection device, configured and adapted to mix the process liquid and the gas-free liquid oxidant therein to form a homogeneous and gas-free mixture of the process liquid and the gas-free liquid oxidant with minimal degassing. The method comprises the steps of a). injecting the gas-free liquid oxidant into the process liquid, and b). mixing the gas-free liquid oxidant and the process liquid to form the homogeneous and gas-free mixture. The gas-free liquid oxidant is ozone strong water.