A physical quantity measurement device includes a passage flow channel, a branch flow channel, and a physical quantity detection unit. An inflow region extending from the inflow port and a lateral region laterally arranged to the inflow region are included in at least one of the passage flow channel and the branch flow channel. The physical quantity detection unit is disposed in the lateral region. A guiding surface that guides away from the lateral region in the lateral direction foreign matter is included in at least one of an inner peripheral surface of the passage flow channel and an inner peripheral surface of the branch flow channel at a position upstream of the lateral region.

A gas delivery system for a ceramic showerhead includes gas connection blocks and a gas ring, the gas connection blocks mounted on the gas ring such that gas outlets in the blocks deliver process gas to gas inlets in an outer periphery of the showerhead. The gas ring includes a bottom ring with channels therein and a welded cover plate enclosing the channels. The gas ring can include a first channel extending the length of the gas ring, two second channels connected at midpoints thereof to downstream ends of the first channel, and four third channels connected at midpoints thereof to downstream ends of the second channels. the cover plate can include a first section enclosing the first channel, two second sections connected at midpoints thereof to ends of the first section, and third sections connected at midpoints thereof to ends of the second sections. The channels are arranged such that the process gas travels equal distances for a single gas inlet in the gas ring to eight outlets in the cover ring allowing equal gas flow.

A high volume microfluidic system for producing emulsions includes a fluid distribution network to produce uniformly sized emulsions and encapsulates.

A nozzle for spouting a liquid phase, in which one liquid phase in a two-liquid phase system can be stably jetted as highly dispersible droplets while suppressing coalescence of droplets, and accumulation of fine solid components in the nozzle hardly occurs. The nozzle has a structure in which capillary tubes or pores are assembled. Further, the capillary tubes or the pores are formed using a suitable material having a low affinity for organic or a low affinity for water, or a material subjected to appropriate surface treatment.

An exhaust module for a substrate processing apparatus having a body, a pumping ring, and a symmetric flow valve, is disclosed herein. The body has a first and second vacuum pump opening formed therethrough. The pumping ring is positioned in the body over both the first and second vacuum pump openings. The pumping ring includes a substantially ring shaped body having a top surface, a bottom surface, and an opening. The top surface has one or more through holes formed therein, arranged in a pattern concentric with the first vacuum pump opening. The bottom surface has a fluid passage formed therein, interconnecting each of the one or more through holes. The opening is formed in the substantially ring shaped body, substantially aligned with the vacuum pump opening. The symmetric flow valve is positioned in the body over the pumping ring and movable between a raised position and a lowered position.