According to an embodiment of the present invention, a substrate processing apparatus including: a chamber in which a process is performed on a substrate; a susceptor installed in the chamber to support the substrate; and a showerhead installed above the susceptor, and the showerhead includes: a plurality of inner injection holes defined in an inner area corresponding to a portion above the substrate and injecting a reaction gas downward; and a plurality of outer injection holes defined in an outer area corresponding to a portion outside the inner area and injecting an inert gas along an inner wall of the chamber.

A showerhead is disclosed including a first nozzle, a second nozzle, and a massage mode assembly in fluid communication with a fluid inlet, the first nozzle and the second nozzle. The massage mode assembly includes a turbine, a cam coupled to the turbine defining a dwell edge that extends between a leading corner and a follower corner, and a shutter movably coupled to the cam, where movement of the turbine causes the cam to drive shutter between a first position covering the first nozzle and opening the second nozzle and a second position opening the first nozzle and covering the second nozzle.

A quick-connect system for a plumbing fixture includes an arm attachment, an intermediate fitting, and a collar. A first end of the arm attachment is mountable to a fluid conduit. At least a portion of the arm attachment at a second end of the arm attachment is sized to be received within the intermediate fitting and the collar. The collar is configured to slidably engage with the intermediate fitting and press against the intermediate fitting to deform the intermediate fitting over the second end of the arm attachment.

A gas distribution system having a first plurality of apertures to supply a gas source to a reaction chamber and a second plurality of apertures surrounding the first plurality of apertures and configured to remove the gas from the reaction chamber. In one embodiment, the second plurality of apertures may gradually increase in diameter as the distance from a main exhaust channel increases. Alternatively, or in addition, the angle spacing between adjacent apertures may gradually decrease as the distance from the main exhaust channel increases.

A showerhead with a massage engine is disclosed. The showerhead may include a housing defining a chamber in fluid communication with a fluid inlet and a massage mode assembly received within the chamber. The massage mode assembly may include a drive gear comprising a plurality of drive teeth, wherein the drive gear rotates due to fluid from the fluid inlet impacting the drive gear, and a driven gear comprising a plurality of driven teeth that mesh with the drive teeth of the drive gear, such that movement of the drive gear causes the driven gear to rotate, wherein the drive gear rotates faster than the driven gear rotates to selectively direct fluid from the fluid inlet to one or more nozzles.

Embodiments disclosed herein relate to a showerhead attachment having an annular body; an attachment face plate coupled to the annular body; a plurality of openings formed through the attachment face plate; a plurality of protrusions extending from the attachment face plate in a direction opposite the annular body. The showerhead attachment is configured to be removably attached to a head portion of a showerhead. The plurality of openings are sized and shaped to correspond to corresponding a plurality of flow zones of the showerhead. Each flow zone includes one or more nozzles.

A showerhead assembly is provided which includes an outer housing and inner housing. The inner housing includes a support disk and gear housing disk for housing a selector wheel having a slot. The outer housing includes the base and a faceplate having nozzle systems connecting to complementary orifices. Water enters the internal housing via a channel where it is further diverted by the diverter arms so as to impinge on a gear train's bladed rotor, causing the gear train's individual components to rotate. Upon the rotation of the selector wheel, the selector wheel's slot aligns with a selected orifice whereby water travels through and enters a corresponding nozzle system. This sequence continues, causing water to sequentially spray from individual nozzles in systematic intervals so as to create a strobe-like spray pattern.

An extendable shower apparatus is disposed with a rain shower head and a handheld shower and includes a shower panel, a lateral spray assembly, and a switch. The shower panel is connected to the rain shower head and the handheld shower and has a pivotally connecting portion. The lateral spray assembly is movably disposed to the shower panel and includes a swinging arm and a shower head. The swinging arm is connected to the pivotally connecting portion to allow the lateral spray assembly to protrude out of a side of the shower panel. The shower head is disposed at an end of the swinging arm. The switch is adapted to control water to output from one of the rain shower head, the lateral spray assembly, and the handheld shower. Thus, the extendable shower apparatus could provide a function of lateral showering to fulfill the required demand of a user.

A fluid dispenser head (T) including a spray wall (26) that is perforated with a network of holes (O) through which the fluid under pressure passes so as to be sprayed in small droplets; the dispenser head being characterized in that the network of holes (O) comprises at least two series of holes (O), with the holes (O) of a given series presenting holes that are substantially identical in size, and with the holes (O) of different series presenting holes that are different in size, such that one series of holes (O) generates a spray of small droplets with droplet sizes that define a first Gaussian distribution, while another series of holes (O) generates a spray of small droplets with droplet sizes that define a second Gaussian distribution that is offset relative to the first Gaussian distribution, thus producing a complex spray having at least two distinct Gaussian distributions.

A showerhead includes a plurality of water outlets for providing a flow of water. The showerhead includes one or more lighting elements and a light driver communicably coupled to the one or more lighting elements. The light driver is configured to control at least a subset of the lighting elements to output light based on various conditions corresponding to the showerhead.