A rotary coating sprayer including a spray bowl rotating about an axis of rotation and an air turbine for driving the bowl. The turbine includes a rotor and a body forming a support for the rotor and defining at least one air feedline for a rotation chamber wherein the rotor blades are arranged. The feedline includes an intermediate chamber defined, radially to the rotation axis, between the body and a ring mounted around the body. In this way, lowering of temperature of an element of the sprayer housing due to flow of exhaust air from the turbine, is limited.

A process for making multiparticulates, comprising providing a molten feed comprising an active ingredient and an excipient, and providing a spinning disc sprayer comprising a rotating disc having a feed-receiving surface driven from above by a hollow drive shaft, wherein axes of rotation of the hollow drive shaft and rotatable disc are coaxial and a downward end of the hollow drive shaft is disposed with a distributor for regulating flow of the molten feed into the well, the distributor and the well together configured for providing a substantially radial, uniform outward flow of the molten feed across the feed-receiving surface.

According to one embodiment, a method for manufacturing a semiconductor device includes: preparing a workpiece formed with a recess; supplying a material containing halogen elements in a liquid form into the recess; cooling the material supplied in the liquid form to solidify the material supplied in the liquid form; and etching the recess using plasma while the material solidified is in the recess.