Disclosed herein is a substrate processing apparatus including a process chamber having a processing space defined therein to process a plurality of substrates, a gas injector provided on a upper side of the process chamber to inject a processing gas into the processing space, a plurality of substrate supports arranged inside the process chamber, the substrates being seated on the substrate supports, a substrate conveyor disposed in the process chamber to convey the plurality of substrates to different substrate supports among the substrate supports, and a substrate rotating part arranged to allow each of the plurality of substrates to be seated between neighboring ones of the plurality of substrate supports, and to rotate the substrates, wherein the substrate rotating part may include a tension adjuster disposed on at least a portion of the power transmitter to adjust a tension in the power transmitter.

An apparatus and method are provided for applying a surface treatment such as impregnation agent or water repellency agent to shoes, boots, bags, gloves or the like, where the apparatus includes a closed treatment chamber provided with an openable access to the treatment chamber from outside the treatment chamber, and where the bottom of the treatment chamber a turntable is provided, having a flat surface in an x-y plane, and an axis Z, and where one or more nozzles are arranged for spraying a mist towards the turntable where the nozzles is/are connected to a control unit, and where a plurality of markers are provided on the periphery of the turntable, and that inside the treatment chamber a scanner used, such that the nozzles are activated to issue a mist of treatment according to a preprogrammed sequence and/or count of markers registered by the scanner.

An apparatus and method are provided for applying a surface treatment such as impregnation agent or water repellency agent to shoes, boots, bags, gloves or the like, where the apparatus includes a closed treatment chamber provided with an openable access to the treatment chamber from outside the treatment chamber, and where the bottom of the treatment chamber a turntable is provided, having a flat surface in an x-y plane, and an axis Z, and where one or more nozzles are arranged for spraying a mist towards the turntable where the nozzles is/are connected to a control unit, and where a plurality of markers are provided on the periphery of the turntable, and that inside the treatment chamber a scanner used, such that the nozzles are activated to issue a mist of treatment according to a preprogrammed sequence and/or count of markers registered by the scanner.