A method of cleaning a treatment liquid coating apparatus, the method includes an operation of moving a spraying portion to a sucking position, an operation of discharging, by the spraying portion, a treatment liquid to the inside of a cleaning container in the sucking position, a first suck-back operation of suck-backing the treatment liquid remaining in the spraying portion, a first cleaning operation of cleaning an accommodation space of the cleaning container by supplying a preset supply amount of cleaning liquid, a second cleaning operation of cleaning a nozzle tip of the spraying portion by supplying a preset second supply amount of cleaning liquid, a second suck-back operation of suck-backing and moving the treatment liquid further backwards than in the first suck-back operation, and a third suck-back operation of suck-backing and moving the suck-backed treatment liquid further backwards than in the second suck-back operation.

A method of cleaning a treatment liquid coating apparatus, the method includes an operation of moving a spraying portion to a sucking position, an operation of discharging, by the spraying portion, a treatment liquid to the inside of a cleaning container in the sucking position, a first suck-back operation of suck-backing the treatment liquid remaining in the spraying portion, a first cleaning operation of cleaning an accommodation space of the cleaning container by supplying a preset supply amount of cleaning liquid, a second cleaning operation of cleaning a nozzle tip of the spraying portion by supplying a preset second supply amount of cleaning liquid, a second suck-back operation of suck-backing and moving the treatment liquid further backwards than in the first suck-back operation, and a third suck-back operation of suck-backing and moving the suck-backed treatment liquid further backwards than in the second suck-back operation.