An insulation-coating overlay control system, an electrode plate for a secondary battery, and an insulation-coating overlay control method are provided. The system includes an insulation coater configured to coat an insulating material to allow the insulating material to cover a partial region of a coated part and a non-coated part in an electrode plate along a boundary part. The coated part has an electrode slurry coated thereon and the non-coated part does not have the electrode slurry coated thereon. An insulation-coating width measuring means is configured to measure an overlay width. An insulation coater moving means is configured to move the insulation coater and a controller is configured to control the insulation coater moving means to adjust the overlay width by comparing the measured overlay width with a predetermined overlay width setting range or an overlay width reference value.

Substrate processing apparatuses and methods of manufacturing a semiconductor device using the same may be provided. A substrate processing apparatus includes a heater in a support plate and comprising a first unit configured to heat a first portion of a substrate and a second unit configured to heat a second portion of a substrate, and processing circuitry configured to heat the heater in a transient section such that the first unit heats the first portion of the substrate to a first heating temperature, and the second unit heats the second portion of the substrate to a second heating temperature different from the first heating temperature, the transient section being a section before a temperature of the substrate reaches a steady state, a steady section being a section after the temperature of the substrate reaches the steady state.

A slot die, a slot die temperature control apparatus, and a slot die control method are provided. The slot die includes an upper die, a lower die configured to form a gap with the upper die, a slurry supply unit configured to be connected to an external slurry supply source, one or more cavities formed in the lower die and connected to the slurry supply unit, a slot connected to the one or more cavities to coat a slurry on a base material. The slot die also includes a temperature sensor configured to measure a temperature of the slurry and a temperature controller provided adjacent to the slot, with the temperature controller configured to control a temperature of the slurry discharged from the slot based on the temperature measured by the temperature sensor.

A metering system for applying a bead of a multi-component composite material to a component. The metering system comprises a mixing head including a mixing chamber. The metering system includes one supply line for each component of a multi-component composite material, leading from a source of each component to the mixing chamber. The mixing chamber is configured to mix the components of the multi-component composite material in the mixing chamber and has an outlet opening through which the mixed multi-component composite material exits the mixing head. The metering system includes a metering pump to convey a discharge of the multi-component composite material through the outlet opening. The metering system includes a control unit to output, to the metering pump, a control signal comprising control information and adjust a metering output of the multi-component composite material through the outlet opening of the mixing head based on the control signal.