A substrate liquid processing apparatus includes: at least one liquid pipe through which a processing liquid flows; a discharge nozzle configured to discharge the processing liquid supplied via the at least one liquid pipe; a valve mechanism configured to regulate a flow of the processing liquid in the at least one liquid pipe; and a liquid detection sensor configured to detect presence or absence of the processing liquid in the at least one liquid pipe, wherein in a state in which the valve mechanism is operating so that the processing liquid in the at least one liquid pipe is located at an upstream of a first pipe measurement site of the at least one liquid pipe, the liquid detection sensor detects the presence or absence of the processing liquid at the first pipe measurement site located at a first measurement point.

A device and method for dispensing a flowable medium has a housing with an interior space and a rod mounted in the housing that is movable between a first end position and a second end position and passes through a diaphragm mounted in a sealed manner in the housing radially on the outside and in the rod radially on the inside. The diaphragm divides the interior space into a first cavity and a second cavity separated from the first cavity in a fluid tight manner. The flowable medium can flow through at least one channel that opens into the first cavity, and is dispensed through a dispensing opening. A sealing section of the rod closes the dispensing opening in the first end position and is at a distance from the dispensing opening in the second end position. A pressure medium acts on the diaphragm in the second cavity.

A substrate processing apparatus includes a processing tub, a liquid recovery unit, a liquid recovery unit drain line, a storage, a first and a second liquid supply lines, a discharge line, a first and a second liquid flow rate controllers. The liquid recovery unit receives a processing liquid overflown from the processing tub. The liquid recovery unit drain line drains the processing liquid from the liquid recovery unit. The first and the second liquid supply lines supply a first and a second liquids, respectively. The cleaning liquid contains the first liquid and the second liquid, and removes a precipitate from the processing liquid. The discharge line discharges the cleaning liquid, the first liquid or the second liquid toward the liquid recovery unit. The first and the second liquid flow rate controllers are provided at the first and the second liquid supply lines, and adjust flow rates thereof, respectively.

A reciprocating glue dispenser dispensing switch includes a switching device main body, a needle holding base, a sliding wear-resistant plate, and a driving device. The switching device main body is equipped with a double liquid inlet, the needle holding base is equipped with a mixed glue outlet, the sliding wear-resistant plate is installed between the switching device main body and the needle holding base, and the sliding wear-resistant plate is equipped with a sliding wear-resistant plate opening. The driving device is utilized to move the sliding wear-resistant plate. A mixed double-liquid glue passes through the double liquid inlet, the sliding wear-resistant plate opening and the glue outlet to dispense a mixed double-liquid glue while the double liquid inlet, the sliding wear-resistant plate opening and the glue outlet are overlapped.

A dual-valve automatic calibration system comprises a primary positioner, a first secondary positioner and a second secondary positioner: the first secondary positioner and the second secondary positioner are connected with a first fluid coating unit and a second fluid coating unit, respectively; the primary positioner comprises a primary X-axis positioner and a primary Y-axis positioner; both the first secondary positioner and the second secondary positioner are connected with the primary X-axis positioner. In contrast to the prior art that a secondary positioner is installed on a primary Z-axis positioner, a dual-valve automatic calibration system contributes to promotion of positioning precision on the Z-axis and reduction of a burden imposed on the Z-axis.

A liquid material discharge device and method capable of suppressing generation of bubbles caused with a rod raising operation in a negative pressure environment. In a liquid material discharge device used in a negative pressure space and including a storage container; a compressed-gas supply source pressurizing the storage container; a nozzle having a discharge flow path; a reciprocating valve rod; an actuator driving the valve rod; a valve seat having a communication hole that is communicated with the discharge flow path; and a discharge control device controlling the actuator to open and close the communication hole by a tip of the valve rod, the discharge control device controls an acceleration time A.sub.u in rising of the valve rod by the actuator to be held within a range of 2 to 300 [ms], thus preventing generation of bubbles caused with the rising of the valve rod.

The present disclosure provides a coating device including a first storage tank for storing a material to be coated, a needle cannula to which the first storage tank is connected by means of a corresponding first line, a gas output device for outputting a first pressurized gas from a gas source, including a first gas output line extending into the first storage tank, wherein the gas output device is capable of outputting the first pressurized gas to the first storage tank through the first gas output line such that the material to be coated stored in the first storage tank is discharged under a gas pressure and enters the needle cannula through the first line.

A seal structure that keeps a needle from sliding with respect to a seal and is easily detachable, and a device having the seal structure. A needle of a valve device is inserted through a seal. A valve device includes a fluid chamber having an outflow hole and au inflow hole, and the needle of which fore end reciprocates in the fluid chamber. The seal includes a main body made of an elastic body having a needle fitting insertion hole formed for the needle to be inserted and fit into. A flange portion is made of an elastic body annularly extending from the main body in a radial direction outward. One end opening diameter (D.sub.3) of the needle fitting insertion hole is smaller than the other end opening diameter (D.sub.2) of the needle fitting insertion hole.

An apparatus for coating carpet webs in a coating apparatus with varying adhesives includes a controller, one or more sensors for detecting a volume of a puddle of the adhesive pooled in front of an application roller, and an electronic valve in fluid communication with each of a plurality of mixers. The electronic valve directs flow of the adhesive from any of the mixers to the coating apparatus. To switch from one of the adhesives to new adhesive as a next carpet web passes through the coating apparatus, the controller calculates a remaining length of the carpet web that can be coated with the adhesive in the puddle of adhesive based on the volume of the puddle, so that the puddle of the adhesive coats the carpet web, and then proximate a seam to the next carpet web, the new adhesive begins to coat the next carpet web.

Technical Problem Provide is a discharge device capable of easily controlling an operation of a plunger at the time of supplying a viscous material to a cylinder and a liquid supply method capable of forming a desired overlap portion. Solution to Problem The discharge device 10 includes the supply valve 40 which controls the supply of the viscous material M to the cylinder 30, the plunger 50 which applies a pressure to the viscous material supplied to the cylinder, the ball screw 60 which is movable in the same direction as the back-and-forth direction of the plunger, and the motor 120 which is connected to the ball screw through the power transmission mechanism 110, wherein the plunger and the ball screw are not connected.