An intermittent coating device includes a die used to apply a coating material onto a material to be coated, and a first intermittent valve and a second intermittent valve capable of switching between a first state in which the coating material is supplied to the die and a second state in which the supply of the coating material is stopped. The first intermittent valve and the second intermittent valve have different timings of switching between the first state and the second state.

A method of depositing an extrudable substance onto a surface. The method comprises the step of delivering the extrudable substance from a cartridge to a flow-bypass assembly. The method further comprises the step of selectively controlling the flow-bypass assembly to purge air from the extrudable substance before the extrudable substance enters a delivery tube. The method further comprises the step of selectively controlling the flow-bypass assembly to deliver the extrudable substance from the flow-bypass assembly to a valve assembly via the delivery tube. The method further comprises the step of controlling flow of the extrudable substance from the valve assembly to a nozzle.

A seal structure that keeps a needle from sliding with respect to a seal and is easily detachable, and a device having the seal structure. A needle of a valve device is inserted through a seal. A valve device includes a fluid chamber having an outflow hole and au inflow hole, and the needle of which fore end reciprocates in the fluid chamber. The seal includes a main body made of an elastic body having a needle fitting insertion hole formed for the needle to be inserted and fit into. A flange portion is made of an elastic body annularly extending from the main body in a radial direction outward. One end opening diameter (D.sub.3) of the needle fitting insertion hole is smaller than the other end opening diameter (D.sub.2) of the needle fitting insertion hole.

An ejection device includes a nozzle that ejects an ejection fluid, an ejection-side pump, a driving-side pump, and a heating unit. The ejection-side pump includes a pressure transmitting member, and an ejection chamber and a driving chamber adjacent to each other across the pressure transmitting member. The ejection chamber is filled with the ejection fluid. The driving chamber is filled with a driving fluid. The driving-side pump is a pump that applies pressure to the driving fluid. The pressure transmitting member transmits the pressure applied to the driving fluid to the ejection fluid in the ejection chamber. The heating unit heats at least the ejection-side pump while the driving-side pump remains unheated.

Disclosed is a developing device for developing a substrate, comprising: a developing tank, a recovery box and a conveying unit provided right above the developing tank and configured to convey the substrate; wherein the developing tank comprises a first tank, a second tank and a third tank, which are spaced and are sequentially arranged; the recovery box comprises a first box and a second box; the first tank is communicated with the first box; as the substrate is arranged in the second tank, the second tank is communicated with the first box; as the substrate is arranged in the third tank, the third tank is communicated with the second box. The developing device can solve the technical problems of separately recovering the developers doped with different photoresist concentrations during the development of the substrate to reduce the cost of diluting the developer concentration in the recovery box.

A nozzle assembly may be used to apply fluid to an advancing substrate. The nozzle assembly includes a nozzle body made from a first material. The nozzle body may include one or more abrasion resistant materials fused to the nozzle body. The nozzle body may be configured to deposit a fluid, using a shim plate, onto the advancing substrate. As the substrate advances past the nozzle assembly, the substrate and/or the fluid may contact the nozzle assembly resulting in wear. The one or more abrasion resistant materials, which is different than the first material of the nozzle body, may be fused to a portion of the nozzle body to reduce the wear and prolong the life of the nozzle body. Thus, the portion of the nozzle body having the abrasion resistant material is restored rather than having to replace the entire nozzle body.

The purpose is to provide a discharge system which can minimize wear of a connecting part of a discharging device and a refilling device which is caused under the influence of particulate matters contained in fluid even if connection and disconnection for refilling the discharging device with the fluid is repeated. A discharge system includes a discharging device capable of discharging the fluid, and a refilling device capable of refilling the discharging device with the fluid. The fluid is suppliable from the refilling device side to the discharging device side by inserting one of a discharge-side coupler provided to the discharging device side and a refill-side coupler provided to the refilling device side into the other to connect the discharging device to the refilling device. A clearance size d formed between the discharge-side coupler and the refill-side coupler is determined based on the particle size distribution of the particulate matters that constitutes the fluid.

A treatment solution supply apparatus for supplying a treatment solution to a solution treatment apparatus which applies the treatment solution to a substrate to perform a predetermined treatment, there being a plurality of solution treatment apparatuses which are supply destinations of the treatment solution, the treatment solution supply apparatus includes: a sending unit common among the plurality of solution treatment apparatuses, the sending unit being configured to send the treatment solution stored in a treatment solution supply source to each of the plurality of solution treatment apparatuses; and a control unit configured to control the sending unit, wherein the sending unit includes a plurality of pumps configured to suck the treatment solution and load the treatment solution thereinto and to send the loaded treatment solution, and wherein the control unit is configured to control suction timing of each of the plurality of pumps so that at least one of the plurality of pumps becomes a state capable of sending the treatment solution to the plurality of solution treatment apparatuses at all times.

A hot melt dispensing system is described. The hot melt dispensing system includes a melter that melts solid material into hot melt, a pump that pumps the hot melt from the melter to at least one applicator, and a pressure control system that controls a pressure of pressurized air for operating the pump. The pressure control system includes a regulator assembly that controls the pressure of the pressurized air, and a drive component that actuates the regulator assembly. The hot melt dispensing system also includes a controller that determines a pressure setting for the pressurized air. The drive component receives the pressure setting from the controller and actuates the regulator assembly to a position associated with the pressure setting.

An intermittent valve device includes: an intermittent valve capable of switching between a first state in which a coating material is supplied to a die that applies the coating material onto a material to be coated and a second state in which the supply of the coating material is stopped; and a drive unit that switches the first state and the second state of the intermittent valve. The drive unit includes a cam that rotates in one direction with a circumferential surface of the cam connected to the intermittent valve. The cam includes, on the circumferential surface, a first shape part that places the intermittent valve in the first state, and a second shape part that places the intermittent valve in the second state.