A piezoelectric motor with form-locked drive mechanism avoiding step losses and undefined step sizes caused by environmental conditions such as temperature, surface quality and air humidity by engaging actuator teeth interacting with the toothed structure of a driven rack.

A display panel is disclosed. The display panel includes a back plate, a plurality of pixel units formed on the back plate, and a plurality of deformation units for providing haptic feedback. Each deformation unit is on one or more corresponding pixel units of the plurality of pixel units, and when being applied a drive voltage, undergoes a deformation corresponding to a haptic feature of a visual object displayed by the corresponding pixel units. Thereby, there is provided a display panel with haptic feedback, which is simple in structure and easy to implement.

A biosensor for detecting the presence of a target compound in a test solution is disclosed. The biosensor includes upper and lower carrier plates, a spacer film with a micro-channel, an inlet port upstream of the micro-channel, an outlet port downstream of the micro-channel, a micro-machined transceiver, and a first molecularly imprinted polymer layer for recognizing and binding the target compound. The micro-machined transceiver includes a micro-machined transmitter for generating an acoustic wave, and micro-machined receiver for generating an acoustic wave-induced voltage. An amplitude of the acoustic wave-induced voltage is varied in response to the concentration of the target compound.

An actuator includes a laminate including an elastomer layer and an electrode, in which the laminate has a spiral or concentric shape, pre-distortion is applied to at least one member out of the elastomer layer and the electrode, and area distortion of the at least one member is 10% or larger.

Damage to a vibrator is reduced, and reliability of a display apparatus of a tactile sensation transmitting type is improved. The display apparatus includes: a display substrate having an operation surface; a support disposed away from the display substrate on an opposite side from the operation surface of the display substrate; a vibrator that is arranged between the display substrate and the support and configured to vibrate the display substrate; and an elastic support member that extends from a display substrate side surface of the support to a surface of the support on an opposite side from the display substrate in a manner wrapping around the support, and has one edge fixed to the surface of the support on the opposite side from the display substrate and the other edge elastically supporting the display substrate. The support includes a displacement restriction portion to which a portion of the elastic support member abuts, and which is configured to restrict displacement of the elastic support member in a direction perpendicular to the operation surface.

A MEMS device includes a piezoelectric layer made of a piezoelectric single crystal, a first electrode on a first surface of the piezoelectric layer, and a first layer covering the first surface of the piezoelectric layer. At least a portion of the piezoelectric layer is included in a membrane portion. The first electrode is covered with the first layer and includes a recess. The piezoelectric layer includes a through hole that passes through the piezoelectric layer between a surface of the piezoelectric layer, which is opposite to the first direction, and the recess at a position corresponding to at least a portion of the first electrode.

An MEMS piezoelectric transducer and a method for manufacturing the same are provided. The first substrate includes a first base, at least one conductive layer, a signal processing circuit and/or a driving circuit arranged on a side of the first base, where the signal processing circuit and/or the driving circuit is electrically connected to the at least one conductive layer. The second substrate includes a second base, a first electrode arranged on a side of the second base, and a piezoelectric layer arranged on the first electrode. A side of the first substrate where the at least one conductive layer is arranged is attached and fixed to a side of the second substrate where the first electrode and the piezoelectric layer are arranged. The first electrode and the at least one conductive layer are electrically connected through a conductive through via.

Provided is a vibration panel including an inner member, a first outer member, a second outer member, a piezoelectric actuator, an actuator bonding layer, and a filler. The inner member includes first and second main surfaces. The first outer member includes third and fourth main surfaces, the third main surface including a first region and a second region. The second outer member includes fifth and sixth main surfaces, the fifth main surface including a third region and a fourth region. The piezoelectric actuator causes vibration. The actuator bonding layer is disposed between the piezoelectric actuator and the second region and bonds the piezoelectric actuator to the second region. The filler fills a space between the second region and the fourth region and covers the piezoelectric actuator.

A display panel is disclosed. The display panel includes a back plate, a plurality of pixel units formed on the back plate, and a plurality of deformation units for providing haptic feedback. Each deformation unit is on one or more corresponding pixel units of the plurality of pixel units, and when being applied a drive voltage, undergoes a deformation corresponding to a haptic feature of a visual object displayed by the corresponding pixel units. Thereby, there is provided a display panel with haptic feedback, which is simple in structure and easy to implement.

A transducer comprising a transducer element including a plate with a through-hole and a collar projecting from the plate and defining an interior cavity in communication with the through-hole. A piezoelectric bender includes at least first and second wafer layers stacked together. The bender is coupled to a peripheral end face of the collar. The first and/or second piezoelectric wafer layers bend at a resonant frequency and generate ultrasonic waves that flow through the collar interior cavity and the plate through-hole and create an in-air pressure pattern and acoustic field at a location spaced from the transducer. A plurality of transducers may be made by providing a monolithic transducer element structure including a plurality of the transducer elements formed thereon, coupling either a plurality of benders or a monolithic bender to the plurality of transducer elements, and then cutting the monolithic transducer element structure to define a plurality of individual transducers.