An ultrapure water supply apparatus includes a first filtering device, a second filtering device, a first tank between the first and second filtering devices, a third filtering device, a second tank between the second and third filtering devices, a fourth filtering device, a third tank between the third and fourth filtering devices, and a gas supply device connected to each of the first to third tanks and configured to supply an inert gas. Each of the first to third tanks includes a tank body and a breather valve coupled to the tank body and connected to a storage space in the tank body. Each of the first to fourth filtering devices includes at least one selected from an activated carbon filter device, an ion exchange resin device, a reverse osmosis membrane device, and a hollow fiber membrane device.

Ultrapure water supply apparatuses, substrate processing systems, and substrate processing methods are provided. An ultrapure water supply apparatus includes: a first supply device that produces first ultrapure water; a second supply device that produces second ultrapure water; a first reserved supply device that provides the second supply device with a portion of fluid in the first supply device; and a second reserved supply device that provides the first supply device with a portion of fluid in the second supply device. The first supply device includes a first front-side filtering part, a first rear-side filtering part, and a first connection part. The second supply device includes a second front-side filtering part, a second rear-side filtering part, and a second connection part. Each of the first and second reserved supply devices connects the first connection part and the second connection part to each other.

Ultrapure water supply apparatuses, substrate processing systems, and substrate processing methods are provided. An ultrapure water supply apparatus includes: a first supply device that produces first ultrapure water; a second supply device that produces second ultrapure water; a first reserved supply device that provides the second supply device with a portion of fluid in the first supply device; and a second reserved supply device that provides the first supply device with a portion of fluid in the second supply device. The first supply device includes a first front-side filtering part, a first rear-side filtering part, and a first connection part. The second supply device includes a second front-side filtering part, a second rear-side filtering part, and a second connection part. Each of the first and second reserved supply devices connects the first connection part and the second connection part to each other.

Techniques for depowdering in additive fabrication are provided. According to some aspects, techniques are provided that separate powder from additively fabricated parts through liquid immersion of the parts. Motion of the liquid, such as liquid currents, may dislodge or otherwise move powder away from additively fabricated parts to which it is adhered or otherwise proximate to. The liquid may also provide a vehicle to carry away powder from the additively fabricated parts. Removed powder may be filtered or otherwise separated from the liquid to allow recirculation of the liquid to the parts and/or to enable re-use of the powder in subsequent additive fabrication processes. Techniques for depowdering through liquid immersion may be automated, thereby mitigating challenges associated with manual depowdering operations.

Techniques for depowdering in additive fabrication are provided. According to some aspects, techniques are provided that separate powder from additively fabricated parts through liquid immersion of the parts. Motion of the liquid, such as liquid currents, may dislodge or otherwise move powder away from additively fabricated parts to which it is adhered or otherwise proximate to. The liquid may also provide a vehicle to carry away powder from the additively fabricated parts. Removed powder may be filtered or otherwise separated from the liquid to allow recirculation of the liquid to the parts and/or to enable re-use of the powder in subsequent additive fabrication processes. Techniques for depowdering through liquid immersion may be automated, thereby mitigating challenges associated with manual depowdering operations.

A mat washing system includes: a structural mainframe; a mat washing station; a conveyor structured to translate a mat, while the mat is an upright position, along the structural mainframe through the mat washing station; and a mat loading swing arm on the structural mainframe and structured to grip a fouled mat, which in use is stacked on or adjacent a mat loading zone of the structural mainframe, and tilt the fouled mat onto the conveyor into the upright position. A method involves using a mat washing system to wash a fouled mat.

A mat washing system includes: a structural mainframe; a mat washing station; a conveyor structured to translate a mat, while the mat is an upright position, along the structural mainframe through the mat washing station; and a mat loading swing arm on the structural mainframe and structured to grip a fouled mat, which in use is stacked on or adjacent a mat loading zone of the structural mainframe, and tilt the fouled mat onto the conveyor into the upright position. A method involves using a mat washing system to wash a fouled mat.

A container washing system may include a wash system, a drying system, and a conveying system. The conveying system may include a series of rollers to provide a path for a container to pass through the wash system and the drying system. The wash system and drying system may be housed in a containment structure, which may be mounted to a trailer thereby allowing the container washing system to be portable. The wash system may include one or more water jets for spraying water at a container carried by the conveying system, and the drying system may include one or more air nozzles for directing moving air at the container carried by the conveying system. The conveying system may be motorized to automatically convey the container through the wash system and the drying system. The water may be reclaimed, filtered, and recirculated through the wash system.

A container washing system may include a wash system, a drying system, and a conveying system. The conveying system may include a series of rollers to provide a path for a container to pass through the wash system and the drying system. The wash system and drying system may be housed in a containment structure, which may be mounted to a trailer thereby allowing the container washing system to be portable. The wash system may include one or more water jets for spraying water at a container carried by the conveying system, and the drying system may include one or more air nozzles for directing moving air at the container carried by the conveying system. The conveying system may be motorized to automatically convey the container through the wash system and the drying system. The water may be reclaimed, filtered, and recirculated through the wash system.

Included are methods and systems for recycling a gas emitted from non-aqueous cleaning. An example method includes contacting a contaminated equipment with a non-aqueous cleaning material; wherein the spent non-aqueous cleaning material emits the gas. The method further comprises capturing the emitted gas, filtering the emitted gas, and recycling the emitted gas into the non-aqueous cleaning material.