An optical element driving mechanism is provided. The optical element driving mechanism includes a fixed assembly, a movable part, and a driving assembly. The movable part is movable relative to the fixed assembly. The driving assembly is configured to drive the movable part to move relative to the fixed assembly. The optical element driving mechanism further includes a holding assembly, and the driving assembly drives the movable part to move relative to the fixed assembly by the holding assembly.

An optical system is provided, including a first optical module and a second optical module. The first optical module is used for changing the direction of light emitted from a light source. The second optical module corresponds to the first optical module and is used for changing the direction of the light. The direction of the light exit the first optical module is different from the direction of the light exit the second optical module.

An optical element driving mechanism used for driving a first optical element is provided. The optical element driving mechanism includes a fixed portion and a first driving assembly. The first optical element is movable relative to the fixed portion. The first driving assembly is used for driving the first optical element to move relative to the fixed portion.

An optical element driving mechanism used for driving an optical element is provided. The optical element driving mechanism includes a fixed portion, a driving assembly, and a support assembly. The driving assembly is used for driving the optical element to move relative to the fixed portion in a first dimension. The optical element is movable relative to the fixed portion through the support assembly.

A method for controlling an optical element driving mechanism is provided, including driving a movable portion to move relative to a fixed portion by a driving mechanism, and defining the movable portion to move relative to the fixed portion in a limit range. The movable portion is used for connecting to an optical element, and the movable portion is movable relative to the fixed portion.

An optical element driving mechanism used for driving an optical element is provided. The optical element driving mechanism includes a fixed portion and a driving assembly. The driving assembly is used for driving the optical element to move relative to the fixed portion in a first dimension.

An optical element driving mechanism used for driving a first optical element is provided. The optical element driving mechanism includes a fixed portion and a first driving assembly. The first driving assembly is used for driving the first optical element to move relative to the fixed portion in a first dimension.

An optical element driving mechanism used for driving an optical element is provided. The optical element driving mechanism includes a fixed portion and a support assembly. The optical element is movable in a first dimension relative to the fixed portion through the support assembly.

A deposition system is provided capable of cleaning itself by removing a target material deposited on a surface of a collimator. The deposition system in accordance with the present disclosure includes a substrate process chamber. The deposition includes a substrate pedestal in the substrate process chamber, the substrate pedestal configured to support a substrate, a target enclosing the substrate process chamber, and a collimator having a plurality of hollow structures disposed between the target and the substrate, a vibration generating unit, and cleaning gas outlet.

Method for the prevention and/or removal of biofilm and sediment formation in borehole tubes (5) or distribution tubes (7), with the following steps: (i) mounting one or more ultrasonic transducers (9, 9) on an aboveground part of the tube (6, 7); (ii) sending the ultrasonic waves whereby both the power and the frequency of the ultrasonic waves are varied in time, with a frequency between 20 and 60 kHz and a power between 1 and 6 Watt for smaller tubes and between 6 and 40 Watt for larger tubes; (iii) sending the varying ultrasonic waves (15a-15e) through the water (2) that flows or is pumped through the tube (5, 7); (iv) providing an automatic interruption of the effect of the ultrasonic waves when the flow of the water (2) through the tube stops, either by shutting off the transducers (9, 9′), or by the automatic operation of a non-return valve (14) which interrupts the water column between the transducer (9′) and the underlying mass of water (2).