A cleaning apparatus, method, and dry chamber are provided for cleaning a wafer carrier that holds wafers as part of a semiconductor fabrication process. The cleaning apparatus includes a wet chamber that receives the wafer carrier to be washed and a reservoir in fluid communication with the wet chamber. The reservoir stores a cleaning liquid that is introduced to the wafer carrier within the wet chamber during a washing operation, and a dry chamber is spaced apart from the wet chamber. The dry chamber receives the wafer carrier after the wafer carrier is washed in the wet chamber and holds the wafer carrier during a drying operation. A transport system transports the wafer carrier between the wet chamber and the dry chamber during a cleaning process.

A cleaning apparatus, method, and dry chamber are provided for cleaning a wafer carrier that holds wafers as part of a semiconductor fabrication process. The cleaning apparatus includes a wet chamber that receives the wafer carrier to be washed and a reservoir in fluid communication with the wet chamber. The reservoir stores a cleaning liquid that is introduced to the wafer carrier within the wet chamber during a washing operation, and a dry chamber is spaced apart from the wet chamber. The dry chamber receives the wafer carrier after the wafer carrier is washed in the wet chamber and holds the wafer carrier during a drying operation. A transport system transports the wafer carrier between the wet chamber and the dry chamber during a cleaning process.

An embodiment of the present subject matter including a FOUP body and a FOUP cover includes: a loading and unloading part configured to load or unload the FOUP; a standby part which is provided at one side of the loading and unloading part and on which the FOUP body and the FOUP cover are separated from or coupled to each other; a cleaning chamber configured to clean the FOUP body and the FOUP cover using steam; and a robot configured to transport the FOUP body and the FOUP cover between the standby part and the cleaning chamber.

An autonomous cleaner includes a suction enhancer arrangement for mounting adjacent to an intake opening provided on a base surface of the autonomous cleaner. The suction enhancer arrangement includes at least one barrier member having a mounting end side mounted to the base surface and a free end side downwardly extended from the base surface. The at least one barrier member is made of elastic material and arranged to be positioned and extended between two side portions of the base surface and adjacent to the intake opening, defining a space below the base surface and the at least one barrier member as an intaking space, such that a flow of liquid to be sucked into the intake opening is speed up in the intaking space to enhance a suction effect thereat.

An automated can adjustment system for a can cleaning system and associated method is disclosed. The automated can adjustment system can store different stage height information corresponding to various cans with different heights in a controller. The stage height information corresponding to the different can heights is associated with and recallable by various preset buttons operatively coupled with the controller. The controller is configured to communicate with the one or more drive mechanisms to adjust one or more stage heights based on the stage height information recalled when a particular preset button is selected. Different stage heights may be changed by then selecting a different preset button associated with a can having a different height.

An automated can adjustment system for a can cleaning system and associated method is disclosed. The automated can adjustment system can store different stage height information corresponding to various cans with different heights in a controller. The stage height information corresponding to the different can heights is associated with and recallable by various preset buttons operatively coupled with the controller. The controller is configured to communicate with the one or more drive mechanisms to adjust one or more stage heights based on the stage height information recalled when a particular preset button is selected. Different stage heights may be changed by then selecting a different preset button associated with a can having a different height.

The invention discloses a device for cleaning, recycling, and compressing a plastic beverage bottle, which includes a body. The body is provided with a working cavity. The working cavity is provided with a moving conveyor belt. The conveyor belt is provided with a fixed cavity. The cavity is provided with a fixing device for fixing the water bottle. The motor is first moved away, and the plastic bottles are fixed between the fixing blocks, and then water is injected into the water injection port. The device can wash and clean the plastic bottles after drinking, thus completing the automatic preliminary treatment of plastic bottles. Compared with traditional processing methods, the device does not require manual processing of plastic bottles, saving manpower and material resources. At the same time, the device cleans plastic bottles, which can ensure that during subsequent reprocessing, there can be health protection.

A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, and a station for treatment of transport boxes for conveyance and atmospheric storage of substrates, the method including: at least one plasma treatment in which at least one interior wall of the transport box is subjected to a plasma of a treatment gas at a gas pressure lower than 10000 pascals.

The present invention is directed to providing a front opening unified pod (FOUP) cleaning device capable of improving cleaning and drying efficiency for a FOUP body and a FOUP cover and a FOUP cleaning method. To this end, the FOUP cleaning device for cleaning a FOUP including a FOUP body and a FOUP cover includes: a loading and unloading part configured to load or unload the FOUP; a standby part which is provided at one side of the loading and unloading part and on which the FOUP body and the FOUP cover are separated from or coupled to each other; a cleaning chamber configured to clean the FOUP body and the FOUP cover using steam; and a robot configured to transport the FOUP body and the FOUP cover between the standby part and the cleaning chamber. The FOUP cleaning method for cleaning a FOUP including a FOUP body and a FOUP cover includes loading the FOUP on a loading and unloading part; transporting the loaded FOUP to a standby part; transporting the FOUP body and the FOUP cover transported to the standby part to a cleaning chamber using a robot; and cleaning the FOUP body and the FOUP cover by supplying steam into the cleaning chamber.

An automated system and method for washing bins. The system includes an infeed conveyor zone having a first conveyor platform for transporting the bins in a conveying direction. The system also includes a bin rotator disposed next to the infeed conveyor zone and rotates upward to allow the bins to be flipped and then loaded onto the first conveyor platform. The system further includes a bin washer zone located downstream from the infeed conveyor zone and having a second conveyor platform for receiving and transporting the bins in the conveying direction. The bin washer zone has sprayers for washing and sanitizing the bins with pressurized liquid. A flipping zone is located downstream from the bin washer zone for allowing the bins to be flipped and transferred onto an outfeed zone that allows the bins to be transported into a loading position at the end of the outfeed zone for reuse.