Provided are methods and systems for cleaning various semiconductor substrate storage articles, in particular, FOUP doors. The FOUP doors and other similar articles often have openings that may get contaminated with cleaning liquids if not covered. The described cleaning system includes contact points for engaging the article and covering these openings. The contact points may be also used for supporting the article and for pressurizing the openings in the article with a gas. The gas may be supplied through one or more contact points. It prevents liquids from getting into the openings if even the openings are not completely sealed. The pressurization may be maintained through the entire wet portion of the cleaning process. The article may be rotated within the cleaning system while cleaning and/or other liquids or gases are dispensed through a set of spraying nozzles. Spraying nozzles may move to enhance cleaning of the article.

A substrate stocker system that may include a high-density storage chamber that comprises a plurality of compartments, each storing one or more high density substrates, one or more robots configured to move one or more compartments of the high-density storage chamber for cleaning, and a cleaning module configured to clean the one or more compartments, while the one or more compartments hold corresponding one or more substrates.

A substrate stocker system that may include a high-density storage chamber that comprises a plurality of compartments, each storing one or more high density substrates, one or more robots configured to move one or more compartments of the high-density storage chamber for cleaning, and a cleaning module configured to clean the one or more compartments, while the one or more compartments hold corresponding one or more substrates.

An apparatus for use in cleaning a portafilter includes a portafilter receiver with a central opening. A landing area extends over at least a portion of the central opening. Spent grounds fall through a hole in the landing area when an inverted portafilter is positioned over the landing area during the cleaning process. Left and right retention members are spaced vertically above the landing area and portafilter receiving slots are defined between the retention members and the landing area. The receiving slots securely hold the portafilter above the landing area and center the cup portion of the portafilter over the hole. A receiving box is mounted below the portafilter receiver and receives the spent coffee grounds. A steam tube mounted to the receiving box connects to a pressurized steam supply and, when activated, directs pressurized steam through the hole of the landing area and into the cup portion of the inverted portafilter.

A container rinsing system has a nozzle adapted to be positioned proximate an opening of the container and adapted to direct a supply of air in any orientation to the container. A vacuum member is positioned around the air nozzle and adapted to vacuum foreign particles away from the container. A system comprises an air source and a manifold having a manifold inlet, an ionization unit, and a plurality of manifold outlets along with a plurality of air nozzles. Each nozzle has a nozzle inlet, a nozzle outlet, and a nozzle passageway extending between the nozzle inlet and the nozzle outlet. The ionization unit is placed within the manifold, and the plurality of nozzles are located on the plurality of manifold outlets such that during operation air is ionized before entering the nozzles. The ionized air is used to clean containers.

A particle removal device for a filling machine configured to form, fill, and seal individual packages is provided. The particle removal device comprises an air supply pipe, and a controller being programmed to activate the particle removal device such that a jet of air is directed into a ready-to-fill package passing the particle removal device.

A method for processing containers includes introducing flushing gas into a container's interior while the interior remains connected to a vacuum source, and adjusting flow of the flushing gas and an underpressure of the vacuum source such that, while flushing gas flows through the interior, a flushing pressure in the interior lies between 0.46 and 0.9 bar.

Example air rinsing apparatus includes: a first enclosure having a first inlet and first output ports; a second enclosure within the first enclosure, the second enclosure comprising a second inlet port and a second output port, the second output port disposed on a same face of the first enclosure as the first inlet port, wherein the second output port comprises an air knife, wherein the first inlet port and the second output port are aligned in the first direction; one or more air movers configured to: urge first air into the second inlet port, the second enclosure configured to direct the first air from the second inlet port to the second output port; and pull second air from the first output port, the first enclosure configured to direct the second air from the first inlet port to the first output port; and an ionizer disposed within the second enclosure.

Cleaning tools for cleaning the pull cable of an ingot puller apparatus and methods for cleaning the pull cable are disclosed. The cleaning tool includes a chamber for receiving the pull cable. Pressurized fluid is discharged through one or more nozzles to detach debris from the pull cable. The fluid and debris are collected in an exhaust plenum of the cleaning tool and are expelled through an exhaust tube. The cleaning tool includes one or more guides that guide the cleaning tool in an upper segment of the ingot puller apparatus.

A container-treatment machine includes a rotatable transport element having container holders and arranged to be pivotable by a pivoting device about a horizontal axis to pivot the container holders between feeding and treatment positions. In the feeding position, container openings of containers held by the container holders point upward. In the treatment position, they point downward. A pivot drive pivots the pivot arm, which holds the transport element so that it is rotatable by a rotary drive.