A tool holder has a main body and a holding pin onto which a rotary tool having a corresponding holding bore can be placed. At least one channel for transporting coolant or lubricant, the channel leading to the outer circumference of the holding pin, is arranged in the tool holder. In order to enable cooling of the cutting edges of the rotary tool without great production complexity, at least one longitudinal groove for conducting the coolant or lubricant in a longitudinal direction of the holding pin is arranged on the outer circumference of the holding pin.

A tool holder has a main body and a holding pin onto which a rotary tool having a corresponding holding bore can be placed. At least one channel for transporting coolant or lubricant, the channel leading to the outer circumference of the holding pin, is arranged in the tool holder. In order to enable cooling of the cutting edges of the rotary tool without great production complexity, at least one longitudinal groove for conducting the coolant or lubricant in a longitudinal direction of the holding pin is arranged on the outer circumference of the holding pin.

A tool holder includes a main body defining a mounting end and a receiving end, the mounting end positioned opposite from the receiving end, the main body defining a main body bore extending into the receiving end toward the mounting end; an extension defining a tool head attached to a rod, the tool head defining a tool head end opposite from the rod, a tool holder length defined between the mounting end and the tool head end, the tool head configured to receive at least one cutting tool, the rod received within the main body bore; and a locking mechanism engaging the extension and the main body in a locked position, the locking mechanism being disengaged from either the main body or the extension in an unlocked position, the locking mechanism being selectively positionable about and between the locked position and the unlocked position.

A tool holder includes a main body defining a mounting end and a receiving end, the mounting end positioned opposite from the receiving end, the main body defining a main body bore extending into the receiving end toward the mounting end; an extension defining a tool head attached to a rod, the tool head defining a tool head end opposite from the rod, a tool holder length defined between the mounting end and the tool head end, the tool head configured to receive at least one cutting tool, the rod received within the main body bore; and a locking mechanism engaging the extension and the main body in a locked position, the locking mechanism being disengaged from either the main body or the extension in an unlocked position, the locking mechanism being selectively positionable about and between the locked position and the unlocked position.

A cutting device in accordance with some example embodiments is provided for use with an arbor assembly. The cutting device includes a blade having a plurality of teeth, and a back plate at a proximal end of the blade. The back plate has an outer end surface in which a plurality of ramp surfaces and pin locking recess are provided. A central through hole extending through the back plate. The ramp surfaces only allow the cutting device to be rotated relative to the arbor assembly in one direction.

A cutting device in accordance with some example embodiments is provided for use with an arbor assembly. The cutting device includes a blade having a plurality of teeth, and a back plate at a proximal end of the blade. The back plate has an outer end surface in which a plurality of ramp surfaces and pin locking recess are provided. A central through hole extending through the back plate. The ramp surfaces only allow the cutting device to be rotated relative to the arbor assembly in one direction.

A tool holder having a main body for coupling the tool holder to the spindle of a machine tool and having a clamping surface connected thereto for clamping a tool, characterized in that the tool holder has at least one portion shaped in one piece by primary shaping, which in its interior has one or more cavities that form an enclave in the portion shaped by primary shaping.

A tool holder having a main body for coupling the tool holder to the spindle of a machine tool and having a clamping surface connected thereto for clamping a tool, characterized in that the tool holder has at least one portion shaped in one piece by primary shaping, which in its interior has one or more cavities that form an enclave in the portion shaped by primary shaping.

A film deposition apparatus for sequentially supplying reaction gases, which mutually react, into a chamber to deposit a film on a substrate includes a turntable rotatable and including a concave portion on an upper surface, a bottom portion of the concave portion having a through hole, a substrate supporting member attachable to and detachable from the concave portion, an upper surface of the substrate supporting member mounting the substrate, a lower surface of the substrate supporting member having a first protruding portion, a drive mechanism moving up and down the turntable and revolving the turntable, a lid member located lower than the turntable, an upper surface of the lid member having a second protruding portion, and a control unit revolving the turntable to cause the first protruding portion to contact the second protruding portion and cause the substrate supporting member to be spun a predetermined angle relative to the turntable.

A treatment assembly for securing a treatment member to a shaft that includes the treatment member and a female attachment member. The treatment member defines a longitudinal axis, and has a distal end and a proximal end. The proximal end includes an attachment recess defined therein. The female attachment member has a distal end, a proximal end, and a shaft recess defined in the proximal end. The female attachment member is secured in the attachment recess of the treatment member. The shaft recess is defined by an interior surface that includes a first flat surface. The interior surface includes a first detent defined therein. When the shaft is received in the shaft recess, the first flat surface is operatively engaged with a first opposing flat surface on a male attachment member and a first ball is biased into the first detent.