The invention relates to a device (10) for handling a clamping ram (100) which has a shaft (110) with a longitudinal axis (L) and a collar (112), with an arm (20) that can be moved in at least one spatial direction (X) with a first end (20a) on which a fastening unit (30) for fastening the clamping ram (100) is arranged, wherein the fastening unit (20) comprises a magnetic or magnetizable contact element (31) for magnetically fastening the clamping ram (100), as well as a method for changing a tool or a workpiece (300) on a machine tool (200) making use of such a device (10).

The invention relates to a device (10) for handling a clamping ram (100) which has a shaft (110) with a longitudinal axis (L) and a collar (112), with an arm (20) that can be moved in at least one spatial direction (X) with a first end (20a) on which a fastening unit (30) for fastening the clamping ram (100) is arranged, wherein the fastening unit (20) comprises a magnetic or magnetizable contact element (31) for magnetically fastening the clamping ram (100), as well as a method for changing a tool or a workpiece (300) on a machine tool (200) making use of such a device (10).

Provided is technology which enables suitable control of a chuck holding force. In this machine tool comprising a main shaft provided with a chuck for holding a workpiece, when an open/close mechanism has performed a closing operation on the chuck such that the chuck enters a closed state from an open state, a holding force of the chuck on the workpiece in the closed state is acquired on the basis of the magnitude of a difference between a first time taken from when a control unit emits a control signal for the closing operation to the open/close mechanism to when a first sensor detects that the chuck is no longer in the open state, and a second time taken from when the control unit emits a control signal in an open/close mechanism to when a second sensor detects that the chuck has entered the closed state.

Provided is technology which enables suitable control of a chuck holding force. In this machine tool comprising a main shaft provided with a chuck for holding a workpiece, when an open/close mechanism has performed a closing operation on the chuck such that the chuck enters a closed state from an open state, a holding force of the chuck on the workpiece in the closed state is acquired on the basis of the magnitude of a difference between a first time taken from when a control unit emits a control signal for the closing operation to the open/close mechanism to when a first sensor detects that the chuck is no longer in the open state, and a second time taken from when the control unit emits a control signal in an open/close mechanism to when a second sensor detects that the chuck has entered the closed state.

In the case of a clamping device (1) for holding a workpiece (3) to be machined by a machine tool (2), consisting of a housing (4), at least one clamping jaw (7) mounted in the housing (4) so that it is axially movable and a counter-stop (10) formed by the housing (4), between which the workpiece (3) is clamped or at least two clamping jaws (7, 8, 9) mounted in the housing (4) so they are axially movable, between which the workpiece (3) is clamped, and an electrically operated drive device (11), by means of which the movable clamping jaws (7, 8, 9) are movably controlled, and by means of which a holding force, transmitted by the clamping jaws (7, 8, 9) to the workpiece (3) or by a clamping bolt (3) coupled with the workpiece (3), is generated during the clamping process, both an automated insertion as well as a clamping device (1) are supposed to be further developed, by means of which an automated position check of the inserted workpiece (3) can be carried out, and by means of which, when the test result is available, either the beginning of the machining process is automatically initiated or a check of the position of the workpiece (3) in the clamping device (1) is conducted. This is achieved in that an electromechanical and/or inductive interface (12, 13) is provided on the housing (4), which interface is connected inductively to the drive device (11) and/or an analysis device (11) and/or by means of electric lines (16), that the interface (12, 13) for an external robotic arm (14) is accessible and communicates with said robotic arm in such a way, that electric data signals and/or electric energy between the interface (12, 13) of the housing (4) and an electromechanical and/or inductive interface (12, 13) of the robotic arm (14) can be transmitted alternately and bidirectionally.

In the case of a clamping device (1) for holding a workpiece (3) to be machined by a machine tool (2), consisting of a housing (4), at least one clamping jaw (7) mounted in the housing (4) so that it is axially movable and a counter-stop (10) formed by the housing (4), between which the workpiece (3) is clamped or at least two clamping jaws (7, 8, 9) mounted in the housing (4) so they are axially movable, between which the workpiece (3) is clamped, and an electrically operated drive device (11), by means of which the movable clamping jaws (7, 8, 9) are movably controlled, and by means of which a holding force, transmitted by the clamping jaws (7, 8, 9) to the workpiece (3) or by a clamping bolt (3) coupled with the workpiece (3), is generated during the clamping process, both an automated insertion as well as a clamping device (1) are supposed to be further developed, by means of which an automated position check of the inserted workpiece (3) can be carried out, and by means of which, when the test result is available, either the beginning of the machining process is automatically initiated or a check of the position of the workpiece (3) in the clamping device (1) is conducted. This is achieved in that an electromechanical and/or inductive interface (12, 13) is provided on the housing (4), which interface is connected inductively to the drive device (11) and/or an analysis device (11) and/or by means of electric lines (16), that the interface (12, 13) for an external robotic arm (14) is accessible and communicates with said robotic arm in such a way, that electric data signals and/or electric energy between the interface (12, 13) of the housing (4) and an electromechanical and/or inductive interface (12, 13) of the robotic arm (14) can be transmitted alternately and bidirectionally.

Disclosed is a deposition apparatus including a first electrostatic chuck configured to suction a support plate defining a pass hole, the first electrostatic chuck including a base part, and a suction part on the base part, the suction part defining a first recess for overlapping the pass hole, and second recesses spaced apart from the first recess, and having diameters that are less than a diameter of the first recess.

Disclosed is a deposition apparatus including a first electrostatic chuck configured to suction a support plate defining a pass hole, the first electrostatic chuck including a base part, and a suction part on the base part, the suction part defining a first recess for overlapping the pass hole, and second recesses spaced apart from the first recess, and having diameters that are less than a diameter of the first recess.

The invention relates to a device (10) for handling a clamping ram (100) which has a shaft (110) with a longitudinal axis (L) and a collar (112), with an arm (20) that can be moved in at least one spatial direction (X) with a first end (20a) on which a fastening unit (30) for fastening the clamping ram (100) is arranged, wherein the fastening unit (20) comprises a magnetic or magnetizable contact element (31) for magnetically fastening the clamping ram (100), as well as a method for changing a tool or a workpiece (300) on a machine tool (200) making use of such a device (10).

The invention relates to a device (10) for handling a clamping ram (100) which has a shaft (110) with a longitudinal axis (L) and a collar (112), with an arm (20) that can be moved in at least one spatial direction (X) with a first end (20a) on which a fastening unit (30) for fastening the clamping ram (100) is arranged, wherein the fastening unit (20) comprises a magnetic or magnetizable contact element (31) for magnetically fastening the clamping ram (100), as well as a method for changing a tool or a workpiece (300) on a machine tool (200) making use of such a device (10).