A wafer support device includes a susceptor, at least one lift pin, at least one lift pin support base and at least one pad. The susceptor has a bottom surface and a top surface configured to support a wafer. The susceptor has at least one through hole extending between the bottom surface and the top surface. The lift pin is at least partially telescopically received in the through hole of the susceptor. The lift pin support base has at least one coupling feature thereon. The pad is detachably coupled with the coupling feature and supports the lift pin.

A wafer support device includes a susceptor, at least one lift pin, at least one lift pin support base and at least one pad. The susceptor has a bottom surface and a top surface configured to support a wafer. The susceptor has at least one through hole extending between the bottom surface and the top surface. The lift pin is at least partially telescopically received in the through hole of the susceptor. The lift pin support base has at least one coupling feature thereon. The pad is detachably coupled with the coupling feature and supports the lift pin.

A transfer apparatus using an electrostatic attraction includes an electrostatic chuck for attracting and placing a workpiece as a transfer member on a placement surface by electrostatic attraction. The electrostatic chuck is grounded by an earth via a ground electrode after the electrostatic chuck receives electric power from a power supply surface of a power source via power receiving electrodes of the electrostatic chuck, so that the electrostatic chuck is configured to attract and place the workpiece on the placement surface by electrostatic attraction in a state where electrostatic balance is broken.

A transfer apparatus using an electrostatic attraction includes an electrostatic chuck for attracting and placing a workpiece as a transfer member on a placement surface by electrostatic attraction. The electrostatic chuck is grounded by an earth via a ground electrode after the electrostatic chuck receives electric power from a power supply surface of a power source via power receiving electrodes of the electrostatic chuck, so that the electrostatic chuck is configured to attract and place the workpiece on the placement surface by electrostatic attraction in a state where electrostatic balance is broken.

A tool changer is included in a manipulator of a robot and selectively fastens to a tool by a magnetic force. The tool changer may include a housing; an inner core embedded in the housing; a coil wound around the inner core, wherein a current is applied to the coil; a pair of connecting cores connected to both ends of the inner core, protruding from the housing to the tool, and inserted into a connecting groove of the tool; a switch configured to regulate the current applied to the coil; and a controller configured to open or close the switch according to a set frequency.

A rotating element operating device includes a device body having a perforation, an operating member having a limiting end and an engaging end and being received in or extended out of the device body along the perforation, and a magnetic member set at the device body or the operating member. When the operating member is received in the device body, the magnetic force of the magnetic member pulls the operating member toward the bottom end of the device body so that the engaging end is set at the top end, and the operating member is secured to the device body by the magnetic force of the magnetic member. When the operating member is pulled out of the device body, the limiting end is positioned inside the perforation so that the operating member is prohibited from leaving the device body.

A rotating element operating device includes a device body having a perforation, an operating member having a limiting end and an engaging end and being received in or extended out of the device body along the perforation, and a magnetic member set at the device body or the operating member. When the operating member is received in the device body, the magnetic force of the magnetic member pulls the operating member toward the bottom end of the device body so that the engaging end is set at the top end, and the operating member is secured to the device body by the magnetic force of the magnetic member. When the operating member is pulled out of the device body, the limiting end is positioned inside the perforation so that the operating member is prohibited from leaving the device body.

A system and devices disclosed include a tool holder apparatus device that has one or more magnets that are configured to magnetically attach to a surface of the rotating portion of a rotary tool so that when the rotating portion of the rotary tool rotates, the apparatus also rotates. The tool holder apparatus may incorporate a variety of tools such as a laser alignment system, a work surface illumination system, and sanding, grinding and polishing surfaces.

A chuck for supporting rotationally symmetrical workpieces to be machined, comprising a chuck body having at least three guideways worked into its end face running in the direction of the longitudinal axis of the chuck, at least three clamping jaws inserted individually into each of the guideways in a movable arrangement, and a driving means in a driving connection with the clamping jaws directly or via intermediate elements, with each of the clamping jaws of the chuck being adjustable during machining using driving means configured as an electric motor, with each clamping jaw having an electric motor arranged inside the chuck body, and when the chuck is stationary, the electric motors are electrically connected to a power source by means of a plug-and-socket connection and electrical cables, and/or when the chuck is rotating or at a standstill each electric motor is connected to the power source via an induction device.

A chuck for supporting rotationally symmetrical workpieces to be machined, comprising a chuck body having at least three guideways worked into its end face running in the direction of the longitudinal axis of the chuck, at least three clamping jaws inserted individually into each of the guideways in a movable arrangement, and a driving means in a driving connection with the clamping jaws directly or via intermediate elements, with each of the clamping jaws of the chuck being adjustable during machining using driving means configured as an electric motor, with each clamping jaw having an electric motor arranged inside the chuck body, and when the chuck is stationary, the electric motors are electrically connected to a power source by means of a plug-and-socket connection and electrical cables, and/or when the chuck is rotating or at a standstill each electric motor is connected to the power source via an induction device.