A vacuum chuck is disclosed for holding and positioning wafers more stably and securely. The vacuum chuck includes a supporting assembly having a receiving groove and at least one first vacuum aperture defined in the receiving groove. A seal unit includes a seal ring bulging to form a vacuum trough. The seal ring is fixed in the receiving groove of the supporting assembly and has at least one second vacuum aperture communicating with the first vacuum aperture. A chuck connector fastened with the supporting assembly has at least one vacuum port and at least one vacuum orifice communicating with the vacuum port. At least one vacuum hose connects the first vacuum aperture, the second vacuum aperture with the vacuum orifice and the vacuum port of the chuck connector for evacuating the air of the vacuum trough to hold and position the wafer on the seal ring and the supporting assembly.

The present disclosure provides coupling systems for use in industrial systems to removably couple one or more components to the industrial system. The coupling systems discussed herein employ a flexible sleeve in addition to one or more components. The flexible sleeve can have a component disposed therein. When pressure is applied to the flexible sleeve, the flexible sleeve constricts around the component, securing the component in the coupling system and thus to the industrial system. Once the component is secured, the industrial system executes one or more processes on the component. The coupling systems discussed herein can accommodate components of varying internal and external geometries as well as internal and/or external coatings and surface finishes.

A vibration-damping hydraulic tool holder based on a multi-cavity structure is provided. The vibration-damping hydraulic tool holder based on the multi-cavity structure includes a gripper, one end of the gripper is provided with an installation groove, the installation groove is filled with a sealing sleeve, the center of the sealing sleeve is provided with a clamping hole for clamping the tool, and several independent hydraulic units are set on the gripper to apply clamping force to the tool; the hydraulic unit consists of two hydraulic components, the two hydraulic components on the same hydraulic unit are set relatively and connected with each other, an oil injection hole is set on the gripper to add hydraulic oil to the hydraulic unit; The hydraulic tool holder based on multi-cavity structure vibration reduction can solve the problem of low surface quality caused by excessive vibration of the existing hydraulic tool holder.

A drive system for driving a chuck device including a piston and a pair of fingers to be opened and closed according to the displacement of the piston, includes a controller, a detection sensor to detect an axial position of the piston, and three-port servo valves to switch a state of supply of the fluid to the chuck device. A degree of valve opening is controllable based on a control signal input from the controller, and an amount of displacement of the piston and an amount of opening and closing of the fingers are controlled by changing the degree of valve opening. One of the 3-port servo valves is connected to a first cylinder chamber of the chuck device, and another of the 3-port servo valves is connected to a second cylinder chamber of the chuck device.

A control method of controlling a chuck device in a drive system for driving the chuck device, comprising opening or closing fingers by opening a switching valve at a first degree of valve opening to supply the fluid to a first cylinder chamber of the chuck device and to discharge the fluid from a second cylinder chamber of the chuck device so that a piston moves in one direction, and stopping the fingers in an intermediate position between a fully open position and a fully closed position by opening the switching valve at a second degree of valve opening to stop supplying the fluid to the first cylinder chamber and to stop discharging the fluid from the second cylinder chamber when the axial position of the piston reaches a target position set in advance while the fingers are being opened or closed.

The present disclosure relates to a long boring bar device of a machine tool and, more particularly, to a long boring bar device of a machine tool, wherein a boring bar is detachably fastened to a holder, and a head tool is detachably fastened to the boring bar to automatically exchange a head tool through an automatic tool changer, thereby reducing non-processing time and improving productivity of the machine tool.

Utilities supplied through a first utility path of a turning tool holder via a docking device is supplied to a second utility path of an adjacent rotating tool holder through a communication means, there is no need to provide a complex hydraulic line, a pneumatic line and a coupler for receiving the utilities from the docking device at a rearward side of the rotating tool holder. A rearward size of the rotating tool holder may be minimized, so that even when the rotating tool holder is mounted on the turret, no interference occurs with the docking device in the rearward direction when the turret rotates. As a result, it is possible to use the rotating tool holder, to which utilities supply is necessary, even in the turret which is provide with the docking device.

The invention relates to an expansion clamping device having a main body (2) and an expansion sleeve (5) which is inserted into the main body (2) or surrounds the body, forming a pressure chamber (8), the pressure chamber (8) being capable of being acted upon by a hydraulic medium with resilient deformation of the expansion sleeve (5). The expansion sleeve (5) is integrally fixed to the main body (2) at the front axial end region (16) and/or at the rear axial end region (17) of the pressure chamber (8) via a friction-welded connection (14).

An expansion sleeve for the sealed insertion into an axial receiving opening of a base body of a hydraulic expansion chuck. The expansion sleeve has a sleeve body extending along a longitudinal central axis, which has a central clamping bore for receiving and clamping a cylindrical shank of a machining tool. On the outer circumference in the region of the clamping bore, the sleeve body has a jacket surface, which forms a radially elastically deformable material web, which revolves in a ring-shaped manner and which delimits a pressure chamber with the inner circumferential surface of the receiving opening. To clamp tools in the large spectrum of shank diameters, in several recesses are formed in the sleeve body radially within the jacket surface, which recesses extend along the longitudinal central axis and are distributed around the clamping bore, preferably spaced apart equiangularly, and are closed with respect to the jacket surface and the clamping bore.

What is provided is a hydraulic expansion chuck (1) with a central clamping opening extending along a longitudinal central axis (5) for receiving and clamping a tool shank and a pressure chamber, which surrounds the clamping opening and to which pressurized fluid can be applied, and which is delimited from the clamping opening by means of a radially elastically deformable dividing wall (34). A plurality of expansion joints (38), which are distributed around the clamping opening and which extend along the longitudinal central axis (5) and which are open towards the clamping opening and closed towards the pressure chamber, are formed in the dividing wall (34).