A laser processing system for micromachining a workpiece includes a laser source to generate laser pulses for processing a feature in a workpiece, a galvanometer-driven (galvo) subsystem to impart a first relative movement of a laser beam spot position along a processing trajectory with respect to the surface of the workpiece, and an acousto-optic deflector (AOD) subsystem to effectively widen a laser beam spot along a direction perpendicular to the processing trajectory. The AOD subsystem may include a combination of AODs and electro-optic deflectors. The AOD subsystem may vary an intensity profile of laser pulses as a function of deflection position along a dither direction to selectively shape the feature in the dither direction. The shaping may be used to intersect features on the workpiece. The AOD subsystem may also provide rastering, galvo error position correction, power modulation, and/or through-the-lens viewing of and alignment to the workpiece.

A laser processing system for micromachining a workpiece includes a laser source to generate laser pulses for processing a feature in a workpiece, a galvanometer-driven (galvo) subsystem to impart a first relative movement of a laser beam spot position along a processing trajectory with respect to the surface of the workpiece, and an acousto-optic deflector (AOD) subsystem to effectively widen a laser beam spot along a direction perpendicular to the processing trajectory. The AOD subsystem may include a combination of AODs and electro-optic deflectors. The AOD subsystem may vary an intensity profile of laser pulses as a function of deflection position along a dither direction to selectively shape the feature in the dither direction. The shaping may be used to intersect features on the workpiece. The AOD subsystem may also provide rastering, galvo error position correction, power modulation, and/or through-the-lens viewing of and alignment to the workpiece.

A process monitoring system for an additive manufacturing apparatus includes a scanner, a sensor device, and an optical focus-tracking device. The scanner includes an optical adjustment device that directs a melting beam emitted by a laser melting device onto a construction plane to generate a melting section of the construction plane. The sensor device may detect reflected radiation from the melting section and generate sensor data indicative of a size, shape, and/or temperature corresponding to the melting section. The optical focus-tracking device includes a focusing lens located between the scanner and the sensor device. The focusing lens may be actuatable by electronic machine data derived from the sensor data to impart a first focus adjustment with respect to the reflected radiation detected by the sensor followed by a second focus adjustment with respect to the melting beam directed by the optical adjustment device.

A process monitoring system for an additive manufacturing apparatus includes a scanner, a sensor device, and an optical focus-tracking device. The scanner includes an optical adjustment device that directs a melting beam emitted by a laser melting device onto a construction plane to generate a melting section of the construction plane. The sensor device may detect reflected radiation from the melting section and generate sensor data indicative of a size, shape, and/or temperature corresponding to the melting section. The optical focus-tracking device includes a focusing lens located between the scanner and the sensor device. The focusing lens may be actuatable by electronic machine data derived from the sensor data to impart a first focus adjustment with respect to the reflected radiation detected by the sensor followed by a second focus adjustment with respect to the melting beam directed by the optical adjustment device.

An apparatus for forming at least one three-dimensional article through successive fusion of parts of a powder bed, which parts corresponds to successive cross sections of the three-dimensional article, the apparatus comprising: a powder distributor configured for evenly distributing a layer of powder on top of a work table provided inside a build chamber; and at least one high energy beam source emanating at least one high energy beam configured for fusing the powder layer in selected locations corresponding to the cross section of the three-dimensional article, wherein the apparatus further comprising at least one target area arranged spaced apart from the layer of powder for emanating light when irradiated by the at least one high energy beam.

An apparatus for forming at least one three-dimensional article through successive fusion of parts of a powder bed, which parts corresponds to successive cross sections of the three-dimensional article, the apparatus comprising: a powder distributor configured for evenly distributing a layer of powder on top of a work table provided inside a build chamber; and at least one high energy beam source emanating at least one high energy beam configured for fusing the powder layer in selected locations corresponding to the cross section of the three-dimensional article, wherein the apparatus further comprising at least one target area arranged spaced apart from the layer of powder for emanating light when irradiated by the at least one high energy beam.

An evaluation method for evaluating laser machining in which irradiation region of a laser beam is moved relative to object to perform machining of object, includes a measurement step and an evaluation step. In the measurement step, a change in an intensity of light according to a movement of measurement region is measured by moving measurement region for measuring the intensity of light, relative to object. In the evaluation step, an evaluation of the laser machining is performed based on the change in the intensity of light according to the movement of measurement region. In the measurement step, measurement region is moved relative to object so that movement path of measurement region has a plurality of intersections with movement path of irradiation region.

An evaluation method for evaluating laser machining in which irradiation region of a laser beam is moved relative to object to perform machining of object, includes a measurement step and an evaluation step. In the measurement step, a change in an intensity of light according to a movement of measurement region is measured by moving measurement region for measuring the intensity of light, relative to object. In the evaluation step, an evaluation of the laser machining is performed based on the change in the intensity of light according to the movement of measurement region. In the measurement step, measurement region is moved relative to object so that movement path of measurement region has a plurality of intersections with movement path of irradiation region.

A processing system, which processes an object by irradiating the object with a processing light through an irradiation optical system, includes: an irradiation apparatus including at least a terminal optical element of the irradiation optical system; a movement apparatus that moves the irradiation apparatus; a first measurement apparatus that is disposed at the irradiation apparatus and measures a position of the object; a second measurement apparatus that measures the position of the object through at least the terminal optical element; and a third measurement apparatus that emits, from a position which is away from the irradiation apparatus, a measurement light toward the irradiation apparatus and measures the position of the irradiation apparatus by detecting the measurement light.

A laser reflow method includes a preparation step of preparing a workpiece including a board and semiconductor chips that each have bumps formed on one surface thereof and are placed on the board with the bumps interposed therebetween and a laser beam irradiation step of irradiating the semiconductor chips with a laser beam from a side of another surface opposite to the one surface, thereby reflowing bumps formed within an irradiated area of the workpiece. In the laser beam irradiation step, the irradiation with the laser beam is carried out while an irradiation range of the laser beam is changed in stages from a region including an outer peripheral portion of the irradiated area toward a region including a central portion of the irradiated area.