Patent classifications
B
B23
B23K
26/00
B23K26/08
B23K26/0869
B23K26/0892
B23K26/0892
Substrate treating apparatus and substrate treating method
12591175
·
2026-03-31
·
·
Disclosed is a substrate treating apparatus including a support unit that supports and rotates a substrate, a heating unit including a laser irradiator that irradiates laser light in a pattern formed in the substrate, a movement module that changes a location of the laser irradiator by moving the heating unit, and a controller that controls the support unit and the heating unit, the movement module moves the heating unit between a heating location, at which the laser light is irradiated to the substrate, and a standby location that deviates from the substrate, and the movement module rotates and linearly moves the heating unit.