A linear motion mechanism with precise linear motion has structural robustness and allows easy reduction in weight and size, simple production and easy operation. The linear motion mechanism includes: an elastic arrangement which is arranged to transform an input direction and an input displacement to an output direction and an output displacement, wherein the output direction is orthogonal to the input direction; an operating member which is arranged to deform the elastic arrangement in the input direction by the input displacement; and a movable member fixed to the elastic arrangement to move in the output direction by the output displacement.

A linear motion mechanism with precise linear motion has structural robustness and allows easy reduction in weight and size, simple production and easy operation. The linear motion mechanism includes: an elastic arrangement which is arranged to transform an input direction and an input displacement to an output direction and an output displacement, wherein the output direction is orthogonal to the input direction; an operating member which is arranged to deform the elastic arrangement in the input direction by the input displacement; and a movable member fixed to the elastic arrangement to move in the output direction by the output displacement.

A two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement. Two series flexible hinges are connected in parallel to form a moving pair. One end of the moving pair is fixed, and driving force is applied to the other end. The driving force is amplified by means of a lever to drive the moving pair to translate and rotate. The moving pair drives a first flexible hinge of a platform to rotate, thereby driving the platform to produce corresponding displacement. Four identical moving pairs and four identical first flexible hinges respectively constitute four branch hinges which are different in arrangement; two branch hinges opposite to the platform are in central symmetry and constitute one group, and the four branch hinges are divided into two groups in total. The piezoelectric driving mode can be adopted, and thus the linear displacement in the x-axis direction, the linear displacement in the y-axis direction and the angular displacement in the direction around the z-axis are generated for optical precision positioning and measurement.

A two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement. Two series flexible hinges are connected in parallel to form a moving pair. One end of the moving pair is fixed, and driving force is applied to the other end. The driving force is amplified by means of a lever to drive the moving pair to translate and rotate. The moving pair drives a first flexible hinge of a platform to rotate, thereby driving the platform to produce corresponding displacement. Four identical moving pairs and four identical first flexible hinges respectively constitute four branch hinges which are different in arrangement; two branch hinges opposite to the platform are in central symmetry and constitute one group, and the four branch hinges are divided into two groups in total. The piezoelectric driving mode can be adopted, and thus the linear displacement in the x-axis direction, the linear displacement in the y-axis direction and the angular displacement in the direction around the z-axis are generated for optical precision positioning and measurement.

The invention is directed at a positioning arm for positioning of a scan head of a surface scanning measurement devicesuch as a scanning probe microscopy devicerelative to a surface. The positioning arm comprises a base at a first end thereof for mounting the arm with the base to a static reference structure. The positioning arm further comprises a first and a second arm member extending from the base, the second arm member extending parallel to the first arm member. The arm comprises a bridge member at a second end thereof, connecting the first and the second arm members. The first and the second arm member are respectively connected to each one of said base and said bridge member by means of a hingeable connection. The positioning arm further comprises an actuator for inducing a relative displacement between the first and the second arm member in a longitudinal direction of said first and second arm member for swinging the second end of the positioning arm in a direction transverse to the lateral displacement. The bridge member comprises a support for supporting the scan head.

The invention is directed at a positioning arm for positioning of a scan head of a surface scanning measurement devicesuch as a scanning probe microscopy devicerelative to a surface. The positioning arm comprises a base at a first end thereof for mounting the arm with the base to a static reference structure. The positioning arm further comprises a first and a second arm member extending from the base, the second arm member extending parallel to the first arm member. The arm comprises a bridge member at a second end thereof, connecting the first and the second arm members. The first and the second arm member are respectively connected to each one of said base and said bridge member by means of a hingeable connection. The positioning arm further comprises an actuator for inducing a relative displacement between the first and the second arm member in a longitudinal direction of said first and second arm member for swinging the second end of the positioning arm in a direction transverse to the lateral displacement. The bridge member comprises a support for supporting the scan head.

A two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement. Two series flexible hinges are connected in parallel to form a moving pair. One end of the moving pair is fixed, and driving force is applied to the other end. The driving force is amplified by means of a lever to drive the moving pair to translate and rotate. The moving pair drives a first flexible hinge of a platform to rotate, thereby driving the platform to produce corresponding displacement. Four identical moving pairs and four identical first flexible hinges respectively constitute four branch hinges which are different in arrangement; two branch hinges opposite to the platform are in central symmetry and constitute one group, and the four branch hinges are divided into two groups in total. The piezoelectric driving mode can be adopted, and thus the linear displacement in the x-axis direction, the linear displacement in the y-axis direction and the angular displacement in the direction around the z-axis are generated for optical precision positioning and measurement.

A mounting device for mounting a machine tool to a floor area is provided. The mounting device includes mounting units that are attachable to the machine tool. Counter-mounting units are disposed on the floor area. The mounting device may also include electromagnets that are disposed on either the mounting units or the counter-mounting units. The machine tool can be mounted or removed by switching the electromagnets on and off. When one of the mounting units or the counter-mounting units includes the electromagnets, the other may include a ferromagnetic material.

A mounting device for mounting a machine tool to a floor area is provided. The mounting device includes mounting units that are attachable to the machine tool. Counter-mounting units are disposed on the floor area. The mounting device may also include electromagnets that are disposed on either the mounting units or the counter-mounting units. The machine tool can be mounted or removed by switching the electromagnets on and off. When one of the mounting units or the counter-mounting units includes the electromagnets, the other may include a ferromagnetic material.

A positioning apparatus comprises a base element provided for fastening to a robot, a base movably supported at the base element, and a piezoactuator by which the base is movable in a direction relative to the base element. A second piezoactuator is provided by which a counterweight is simultaneously movable in an opposite direction.