A linear motion mechanism with precise linear motion has structural robustness and allows easy reduction in weight and size, simple production and easy operation. The linear motion mechanism includes: an elastic arrangement which is arranged to transform an input direction and an input displacement to an output direction and an output displacement, wherein the output direction is orthogonal to the input direction; an operating member which is arranged to deform the elastic arrangement in the input direction by the input displacement; and a movable member fixed to the elastic arrangement to move in the output direction by the output displacement.

Spindle for carrying out machining assisted by non-ultrasonic axial oscillations, including a tool-bearing shaft, and an exciting portion, for subjecting the shaft to non-ultrasonic axial oscillations, especially during its rotation. The exciting portion including a first exciting stage, having at least one piezoelectric actuator, and a second exciting stage, having at least one piezoelectric actuator, having a non-zero axial overlap with the first exciting stage, the actuators of the two stages being arranged so that their effects add.

Spindle for carrying out machining assisted by non-ultrasonic axial oscillations, including a tool-bearing shaft, and an exciting portion, for subjecting the shaft to non-ultrasonic axial oscillations, especially during its rotation. The exciting portion including a first exciting stage, having at least one piezoelectric actuator, and a second exciting stage, having at least one piezoelectric actuator, having a non-zero axial overlap with the first exciting stage, the actuators of the two stages being arranged so that their effects add.

The present disclosure involves occasions where precise two-dimensional motion takes place, and is applicable to XY motion stages for precise displacement compensation. The present disclosure particularly involves a stiffness-frequency adjustable XY micromotion stage based on stress stiffening, which includes X-direction and Y-direction motion sub-stages and corresponding drivers and a micromotion working table. The micromotion stage uses membrane sets that have tension levels thereof adjusted by bolts as a flexible hinge, so as to achieve independent adjustment of the vibration frequency of the XY micromotion stage. The present disclosure implements the foregoing configuration based on prestressed membrane, so the frequency is adjustable. The inherent frequency of the micromotion stage can be adjusted before or during operation according to various working conditions and driving frequency. The two feed motion direction are perpendicular so as to prevent the micromotion working table from coupling during two-dimensional motion.

The present disclosure involves occasions where precise two-dimensional motion takes place, and is applicable to XY motion stages for precise displacement compensation. The present disclosure particularly involves a stiffness-frequency adjustable XY micromotion stage based on stress stiffening, which includes X-direction and Y-direction motion sub-stages and corresponding drivers and a micromotion working table. The micromotion stage uses membrane sets that have tension levels thereof adjusted by bolts as a flexible hinge, so as to achieve independent adjustment of the vibration frequency of the XY micromotion stage. The present disclosure implements the foregoing configuration based on prestressed membrane, so the frequency is adjustable. The inherent frequency of the micromotion stage can be adjusted before or during operation according to various working conditions and driving frequency. The two feed motion direction are perpendicular so as to prevent the micromotion working table from coupling during two-dimensional motion.

A worktable system includes a base stage extending in a first direction and a second direction intersecting the first direction, and having a first stroke length, and a plurality of first stages disposed on the base stage adjacent to each corner portion of the base stage, and the plurality of first stages move in the first direction and the second direction by a second stroke length that is smaller than the first stroke length.

A worktable system includes a base stage extending in a first direction and a second direction intersecting the first direction, and having a first stroke length, and a plurality of first stages disposed on the base stage adjacent to each corner portion of the base stage, and the plurality of first stages move in the first direction and the second direction by a second stroke length that is smaller than the first stroke length.

A machining device (1) comprising a housing (2), a spindle (4) comprising at least one bearing, a pulse shaft (11), an amplitude disc (8) coupled to the pulse shaft (11) and arranged concentric to it, the pulse shaft (11) defining an axial direction (AD), the amplitude disc (8) further comprising at least one recess (20), in which a sled (24) is arranged. The sled (24) has an irregularity (28), which comprises a concave part as seen in a plane defined by the amplitude disc (8). The machining device (1) further comprising at least one first elastic element (12a), a first motion link (14a) and a first embedding disc (10a) comprising at least one contact element (26), the first embedding disc (10a) being arranged concentric to the amplitude disc (8) and the spindle (4) being coupled to the first embedding disc (10a), the first motion link (14a) being connected to the housing (2) and the first embedding disc (10a). The at least one first elastic element (12a) abutting the housing (2) with one end and the first embedding disc (10a) and/or the first motion link (14a) with the other end for pre-tensioning the first embedding disc (10a) towards the amplitude disc (8), whereby the contact element (26) of the first embedding disc (10a) is abutting the amplitude disc (8) and the irregularity (28) at least once per turn when the machining device is in use, so that a relative rotation between the amplitude disc (8) and the first embedding disc (10a) results in vibration in the spindle (4).

A machining device (1) comprising a housing (2), a spindle (4) comprising at least one bearing, a pulse shaft (11), an amplitude disc (8) coupled to the pulse shaft (11) and arranged concentric to it, the pulse shaft (11) defining an axial direction (AD), the amplitude disc (8) further comprising at least one recess (20), in which a sled (24) is arranged. The sled (24) has an irregularity (28), which comprises a concave part as seen in a plane defined by the amplitude disc (8). The machining device (1) further comprising at least one first elastic element (12a), a first motion link (14a) and a first embedding disc (10a) comprising at least one contact element (26), the first embedding disc (10a) being arranged concentric to the amplitude disc (8) and the spindle (4) being coupled to the first embedding disc (10a), the first motion link (14a) being connected to the housing (2) and the first embedding disc (10a). The at least one first elastic element (12a) abutting the housing (2) with one end and the first embedding disc (10a) and/or the first motion link (14a) with the other end for pre-tensioning the first embedding disc (10a) towards the amplitude disc (8), whereby the contact element (26) of the first embedding disc (10a) is abutting the amplitude disc (8) and the irregularity (28) at least once per turn when the machining device is in use, so that a relative rotation between the amplitude disc (8) and the first embedding disc (10a) results in vibration in the spindle (4).