There is provided a holding unit that holds a target object by a holding surface of a holding table. The holding unit includes a fixing mechanism that fixes the target object to the holding surface, a movement mechanism that moves the fixing mechanism, and a controller. The fixing mechanism includes a fastening member allowed to be disposed at a fixing position at which the fastening member fastens the target object and fixes the target object to the holding surface and a release position at which the fastening member releases the target object and a biasing member that biases the fastening member toward the side of the fixing position. The movement mechanism includes a pressing member that presses the fastening member and an actuator that moves the pressing member to position the fastening member to the release position.

There is provided a holding unit that holds a target object by a holding surface of a holding table. The holding unit includes a fixing mechanism that fixes the target object to the holding surface, a movement mechanism that moves the fixing mechanism, and a controller. The fixing mechanism includes a fastening member allowed to be disposed at a fixing position at which the fastening member fastens the target object and fixes the target object to the holding surface and a release position at which the fastening member releases the target object and a biasing member that biases the fastening member toward the side of the fixing position. The movement mechanism includes a pressing member that presses the fastening member and an actuator that moves the pressing member to position the fastening member to the release position.

A composite machining machine includes a first machining head, a second machining head, a workpiece holder, a cover, and a frame. The first machining head is movable in a first region to perform additive manufacturing on the workpiece in a second region. The second machining head is movable in the second region to perform cutting on the workpiece. The workpiece holder holds the workpiece in the second region. The cover covers the first region. The frame includes two columns and a beam member coupling the columns. The cover includes a region definition member openable at least partially. The region definition member defines the second region. The first machining head is movable in a guided manner in a range between the columns. The beam member is disposed so that the predetermined range lies inside the first region, and outside and above the second region.

A composite machining machine includes a first machining head, a second machining head, a workpiece holder, a cover, and a frame. The first machining head is movable in a first region to perform additive manufacturing on the workpiece in a second region. The second machining head is movable in the second region to perform cutting on the workpiece. The workpiece holder holds the workpiece in the second region. The cover covers the first region. The frame includes two columns and a beam member coupling the columns. The cover includes a region definition member openable at least partially. The region definition member defines the second region. The first machining head is movable in a guided manner in a range between the columns. The beam member is disposed so that the predetermined range lies inside the first region, and outside and above the second region.

A tool drive unit for a turning device for machining workpieces has a tool holder driven in a displaceable manner along an infeed direction by a first linear motor and driven in a pendular/displaceable manner in a direction transverse to the infeed direction by a second linear motor. Both linear motors have a moving coil/piezo element. The turning device has a main infeed drive, which produces a primary infeed movement of a turning tool in an infeed direction, and has a main transverse drive which produces a primary transverse movement in a transverse direction transversely to the infeed direction. The turning device has a secondary transverse drive whose movements are oriented in the same direction as the main transverse drive, wherein the turning tool and the axis of rotation can be moved towards one another and away from one another by the superimposition of primary and secondary transverse movements.

A machine tool (1) includes a spindle (32) supported on a support surface (37a) of a support body (37) with such an orientation that the longitudinal axis of the spindle extends along the support surface (37a). The spindle (32) is movable in a vertical direction that is perpendicular to the longitudinal axis of the spindle (32). The support body (37) is provided with a ventilation hole (80) extending through the support body (37) between the support surface (37a) and a surface (37b) facing in the direction opposite to the support surface (37a), to open toward the spindle (32).

The present invention provides a wafer centering device for a measurement apparatus, the device comprising: a body unit; a guide unit which is installed in the body unit, has a support part for supporting a wafer, and has a through-hole and; and a displacement unit which is formed to be moved in the through-hole and has a pusher for moving the wafer on the support part.

The present invention provides a wafer centering device for a measurement apparatus, the device comprising: a body unit; a guide unit which is installed in the body unit, has a support part for supporting a wafer, and has a through-hole and; and a displacement unit which is formed to be moved in the through-hole and has a pusher for moving the wafer on the support part.

A sliding table device includes a base unit, a sliding unit and a cover plate. The sliding unit includes two rails, two sliding blocks disposed respectively and slidably on the rails and each having an oil inlet, and a sliding seat mounted co-movably on the sliding blocks. The sliding seat includes a main portion having a flow passage and an insertion hole that interconnects the flow passage and external environment, two fixed portions mounted respectively to the sliding blocks and each having a connecting passage that communicates with the flow passage, and two guiding portions formed respectively on the fixed portions and each having a guiding passage that communicates with the corresponding connecting passage and the corresponding oil inlet. The cover plate covers a portion of the main portion, and the insertion hole is not covered by the cover plate.

A sliding table device includes a base unit, a sliding unit and a cover plate. The sliding unit includes two rails, two sliding blocks disposed respectively and slidably on the rails and each having an oil inlet, and a sliding seat mounted co-movably on the sliding blocks. The sliding seat includes a main portion having a flow passage and an insertion hole that interconnects the flow passage and external environment, two fixed portions mounted respectively to the sliding blocks and each having a connecting passage that communicates with the flow passage, and two guiding portions formed respectively on the fixed portions and each having a guiding passage that communicates with the corresponding connecting passage and the corresponding oil inlet. The cover plate covers a portion of the main portion, and the insertion hole is not covered by the cover plate.