The present invention provides, in one aspect, a router including a motor unit and a base configured to selectively receive the motor unit to support the router on a work piece surface. The motor unit includes a motor and a spindle configured to output a torque supplied by the motor. The base includes an input shaft configured to selectively couple to the spindle, an output shaft laterally offset from the input shaft, and a belt. The input shaft includes a first pulley and the output shaft includes a second pulley and a tool holder. The belt wraps around the first and second pulleys to rotationally couple the input shaft to the output shaft. When the motor unit is received into the base, the spindle couples to the input shaft.

A machine tool includes a table, a main shaft, and an electric heating piece. The table includes an upright post and a main shaft support element connected to the upright post. The main shaft is rotatably disposed at the main shaft support element of the table. The electric heating piece is disposed at the main shaft support element of the table and positioned on a side of the main shaft, wherein the side of the main shaft manifests a lower thermal deformation level. The regulation of the electric heating piece minimizes the nonlinear thermal deformation of the main shaft, thereby enhancing processing precision.

A router includes a motor unit and a base configured to selectively receive the motor unit to support the router on a work piece surface. The motor unit includes a motor and a spindle configured to output a torque supplied by the motor. The base includes an output shaft laterally offset from the spindle when the motor unit is received into the base, the output shaft including a tool holder. The base also includes a fan configured to generate airflow within the base.

An electrostatic chuck apparatus is provided that is capable of effectively reducing temperature imbalance of a wafer substrate that is heated to a high temperature. The electrostatic chuck apparatus includes a base including a cooling flow path through which a refrigerant may flow, an adiabatic layer on the base, a uniform heating plate on the adiabatic layer, a heating element between the adiabatic layer and the uniform heating plate, an insulating layer on the uniform heating plate and including a ceramic, a conductive layer on the insulating layer and having an area smaller than an area of the insulating layer, and a dielectric layer on the conductive layer and including a ceramic.

To perform cleaning in a machine while meeting a user's requirement to perform machining without supplying a coolant to a work or a tool, a machine tool that performs machining for a work using a tool includes a controller that performs mode switching between a half-wet machining mode in which a coolant is supplied to a non-machining area to remove chips in the machine tool during machining, and no coolant is supplied to a machining area, and at least one of a wet machining mode in which the coolant is supplied to the machining area and a dry machining mode in which no coolant is not supplied into the machine tool.