A 5-axis processing machine includes a mounting table on which a tool and a work piece are placed; and a control unit; wherein the mounting table is moved relatively by three linear axes and two rotation axes based on NC data, the two rotation axes include a first axis and a second axis, when the control unit calculates a rotation angle of the two rotation axes, the control unit acquires an axis vector Na that specifies an actual first axis direction and an axis vector Nc that specifies an actual second axis direction, the control unit calculates a posture vector K that specifies a posture at a time of processing the work piece with respect to the tool from the NC data, the control unit calculates, as a solution of a following equation (4), an actual rotation angle θ around the first axis of the tool.

A 5-axis processing machine includes a mounting table on which a tool and a work piece are placed; and a control unit; wherein the mounting table is moved relatively by three linear axes and two rotation axes based on NC data, the two rotation axes include a first axis and a second axis, when the control unit calculates a rotation angle of the two rotation axes, the control unit acquires an axis vector Na that specifies an actual first axis direction and an axis vector Nc that specifies an actual second axis direction, the control unit calculates a posture vector K that specifies a posture at a time of processing the work piece with respect to the tool from the NC data, the control unit calculates, as a solution of a following equation (4), an actual rotation angle θ around the first axis of the tool.

An imaging unit of a processing apparatus includes a microscope, and an imaging element connected to the microscope and including a plurality of pixels that capture an image. A control unit has a target pattern storage section that stores a target pattern for performing pattern matching, and a rectilinear region detection section that detects a rectilinear region on the basis of an image from the imaging element, calculates a deviation angle between a direction of the rectilinear region detected by the rectilinear region detection section and a processing feeding direction, and adjusts a relative angle between the target pattern stored in the target pattern storage section and a characteristic pattern on a wafer, to perform the pattern matching.

A 5-axis processing machine includes a mounting table on which a tool and a work piece are placed; and a control unit including a calculation unit, a determination unit, and a correction unit; wherein the mounting table is moved relatively by three linear axes and two rotation axes based on NC data, the two rotation axes include a first axis and a second axis, the calculation unit calculates an orientation of the work piece with respect to the tool at a time of processing from NC data and a directions of rotation centers of an actual first axis and an actual second axis, the determination unit determines whether or not the calculated orientation of the work piece is included in an inoperable range, the inoperable range being the inoperable angle range, and the correction unit corrects the orientation of the work piece with respect to the tool.

A 5-axis processing machine includes a mounting table on which a tool and a work piece are placed; and a control unit including a calculation unit, a determination unit, and a correction unit; wherein the mounting table is moved relatively by three linear axes and two rotation axes based on NC data, the two rotation axes include a first axis and a second axis, the calculation unit calculates an orientation of the work piece with respect to the tool at a time of processing from NC data and a directions of rotation centers of an actual first axis and an actual second axis, the determination unit determines whether or not the calculated orientation of the work piece is included in an inoperable range, the inoperable range being the inoperable angle range, and the correction unit corrects the orientation of the work piece with respect to the tool.

This machining program generation device is provided with: a storage unit that stores machining conditions for respective tool regions determined on the basis of the number of effective edges in a multi-blade tool; a contact region calculation unit that calculates a tool region which comes into contact with a workpiece during machining on the basis of the shapes of the workpiece and the edge portion of the tool and of a tool path; and a machining program generation unit that generates a machining program on the basis of the tool path and the machining conditions stored in the storage unit in association with the tool region coming into contact with the workpiece.

This machining program generation device is provided with: a storage unit that stores machining conditions for respective tool regions determined on the basis of the number of effective edges in a multi-blade tool; a contact region calculation unit that calculates a tool region which comes into contact with a workpiece during machining on the basis of the shapes of the workpiece and the edge portion of the tool and of a tool path; and a machining program generation unit that generates a machining program on the basis of the tool path and the machining conditions stored in the storage unit in association with the tool region coming into contact with the workpiece.

A 5-axis processing machine includes a mounting table on which a tool and a work piece are placed; and a control unit; wherein the mounting table is moved relatively by three linear axes and two rotation axes based on NC data, the two rotation axes include a first axis and a second axis, when the control unit calculates a rotation angle of the two rotation axes, the control unit acquires an axis vector Na that specifies an actual first axis direction and an axis vector Nc that specifies an actual second axis direction, the control unit calculates a posture vector K that specifies a posture at a time of processing the work piece with respect to the tool from the NC data, the control unit calculates, as a solution of a following equation (4), an actual rotation angle θ around the first axis of the tool.

A 5-axis processing machine includes a mounting table on which a tool and a work piece are placed; and a control unit; wherein the mounting table is moved relatively by three linear axes and two rotation axes based on NC data, the two rotation axes include a first axis and a second axis, when the control unit calculates a rotation angle of the two rotation axes, the control unit acquires an axis vector Na that specifies an actual first axis direction and an axis vector Nc that specifies an actual second axis direction, the control unit calculates a posture vector K that specifies a posture at a time of processing the work piece with respect to the tool from the NC data, the control unit calculates, as a solution of a following equation (4), an actual rotation angle θ around the first axis of the tool.

A 5-axis processing machine includes a mounting table on which a tool and a work piece are placed; and a control unit including a calculation unit, a determination unit, and a correction unit; wherein the mounting table is moved relatively by three linear axes and two rotation axes based on NC data, the two rotation axes include a first axis and a second axis, the calculation unit calculates an orientation of the work piece with respect to the tool at a time of processing from NC data and a directions of rotation centers of an actual first axis and an actual second axis, the determination unit determines whether or not the calculated orientation of the work piece is included in an inoperable range, the inoperable range being the inoperable angle range, and the correction unit corrects the orientation of the work piece with respect to the tool.