B24B37/14

POLYURETHANE CMP PADS HAVING A HIGH MODULUS RATIO
20170087688 · 2017-03-30 ·

A chemical-mechanical polishing pad comprising a polyurethane polishing layer having a high storage modulus at low temperatures and a low storage modulus at high temperatures is disclosed. For example, the disclosed pad embodiments may be fabricated from a thermoplastic polyurethane having a ratio of storage modulus at 25 degrees C. to storage modulus at 80 degrees C. of 50 or more. The thermoplastic polyurethane polishing layer may further optionally have a Shore D hardness of 70 or more, a tensile elongation of 320 percent or less, a storage modulus at 25 degrees C. of 1200 MPa or more, and/or a storage modulus at 80 degrees C. of 15 MPa or less.

ABRASIVE ELEMENTS WITH PRECISELY SHAPED FEATURES, ABRASIVE ARTICLES FABRICATED THEREFROM AND METHODS OF MAKING THEREOF
20250326089 · 2025-10-23 ·

An abrasive article includes a plurality of abrasive features disposed on one or more abrasive elements. Each of the one or more abrasive elements includes a base having a first major surface from which the plurality of abrasive features extends. A first set of the plurality of abrasive features (i) has an average height, H.sub.1avg, (ii) a standard deviation of less than 10% of H.sub.1avg, and (iii) comprises between 5 and 130 abrasive features.