An operation method for a link actuating device provided with a target value input unit having a height direction target value input portion that allows input of a movement amount in a height direction or a coordinate position in the height direction, which causes the distal end posture of the link actuating device to be changed only in the height direction along a central axis of a proximal end side link hub. An input converter is provided to calculate, by using an inputted value, a target distal end posture of the link actuating device. The input converter further calculates a command operation amount of each actuator from the result of the calculation, and inputs the command operation amount to the control device.

A substrate processing apparatus, includes: a substrate transfer mechanism configured to advance and retreat a holding body that holds a substrate by symmetrically arranging two link mechanisms each including a driving arm and a driven arm; a processing module; a rotation angle measuring part configured to measure a rotation angle the driving arms; a holding body detection part configured to detect that a specific portion of the holding body is located at a predetermined position; and a controller configured to execute a step of acquiring a measurement value of the rotation angle of the driving arm, a step of obtaining a moving average of the measurement value of the rotation angle, and a step of obtaining a correction amount of the rotation angle so that a substrate transfer position of the holding body of the substrate transfer mechanism for the processing module becomes a reference position.

A working device includes a link actuation device and a control device for the link actuation device. The control device includes: a storage unit configured to store a plurality of the target positions; a calculation unit configured to sequentially read out the respective target positions stored to calculate movement amounts and movement speeds of the respective actuators between the target positions; and a control unit configured to operate the respective actuators by the movement amounts and at the movement speeds of the respective actuators calculated by the calculation unit. The control unit is capable of changing acceleration and deceleration times of the actuators for each of the target positions.

A parallel type integrated actuator is proposed. The actuator includes: a driving unit composed of a first motor, a second motor, a third motor, and a fourth motor; a first shaft, a second shaft, and a third shaft, each shaft being inserted into each other through a hollow structure and forming a co-axis, each shaft being capable of rotating relative to each other in an inserted state, and each shaft having the other end part thereof extending outside the driving unit; an distal end part disposed outside the driving unit and on which an actuator is mounted; a first link part, a second link part, and a third link part allowing the distal end part to rotate in pitching, yawing, and rolling directions; and a universal link part connecting the fourth rotor, which is a rotor of the fourth motor, and the distal end part to each other.

A parallel type integrated actuator is proposed. The actuator includes: a driving unit composed of a plurality of motors, each motor being stacked successively in a longitudinal direction of the driving unit, each motor having a stator fixed to a position outside the driving unit and a rotor positioned inside thereof, each motor rotating relative to each other; a plurality of shafts; a heat sink housing having a cylindrical shape formed around the outer surface of the driving unit, and having an inner circumferential surface thereof thermally connected with the plurality of stators and a plurality of flow paths formed on the outer circumferential surface thereof; and a blower fan installed on one end side of the driving unit, provided with a wing part disposed to be adjacent to one end side of the heat sink housing, wherein rotation generates convection for heat exchange.

A robot installation includes a first robot and a second robot. The first robot is attached to a fixed position in relation to the second robot such that the second robot lies within a reach of at least one drive arm of the first robot.

A dual linear delta assembly includes a frame, a first linear delta system, and a second linear delta system concentric with the first linear delta system. Each of the first linear delta system and the second linear delta system may include rails mounted to the frame, linear actuators, each linear actuator coupled to a respective rail of the rails and configured to translate along a longitudinal length of the respective rail, pairs of parallel rods each operably coupled to a respective linear actuator of the linear actuators, and a platform coupled to a longitudinal end of each of the pairs of parallel rods opposite the respective linear actuator of the linear actuators.

A center-of-gravity-of-load position calculator is provided which determines the position of the center of gravity of a physical load held by a horizontal four-axis robot arm. The center-of-gravity-of-load position calculator moves horizontally move the physical load a plurality of times in conditions where positions of a fourth axis are different from each other and measures degrees of torque acting on the fourth axis during such movement to calculate given first and second parameters. The center-of-gravity-of-load position calculator calculates the position of the center of gravity of the physical load as a function of the first and second parameters. This achieves fast and easy calculation of the position of the center of gravity of the physical load.

Devices, systems and methods of controlling movement of a host mechanical system using inertial forces imparted by an augmentable or morphable appendage. Such appendages are attached to the host mechanical system such that augmentation or morphing of the appendage to move a mass of the appendage from an extended to a retracted configuration imparts inertial forces to the supporting structure. Augmentation/morphing is controlled and coordinated such that imparted inertial forces facilitate a desired movement of the mechanical system. The imparted forces can include translation forces and/or rotational forces along one or more axes. The augmentation or morphing of the appendage can be performed concurrently with separately controlled coordinated movement of the appendage to facilitate a desired movement of the mechanical system. Such appendages can include, but are not limited to, telescoping and/or folding designs.

A distal end side link hub is coupled to a proximal end side link hub via three or more link mechanisms. Each link mechanism has a proximal side end link member, a distal side end link member, and an intermediate link member. The proximal side end link member has a bent portion and rotation shaft mounting portions. A rotation shaft is mounted to the rotation shaft mounting portion. A bevel gear, forming a part of a gear mechanism for transmitting rotary motion of a posture control actuator to the proximal side end link member, is mounted on the rotation shaft mounting portion and disposed in a space between two virtual planes obtained by extending a radially inner edge and a radially outer edge of one end of the bent portion in a longitudinal direction of the rotation shaft mounting portion.