A vibration-type drive apparatus which increases productivity and also prevents undesired vibration from occurring during operation. The vibration-type drive apparatus has an elastic body, a vibrating body having an electro-mechanical energy conversion element mounted on the elastic body, a driven body that is brought into pressure contact with the vibrating body, and a pressurizing member that brings the driven body into pressure contact with the vibrating body. Relative positions of the vibrating body and the driven body change due to vibrations excited in the vibrating body. The pressurizing member has a positioning portion, and the driven body has a fitting-receiving portion that is to be fitted onto the positioning portion. During operation, the positioning portion and the fitting-receiving portion are not in contact with each other.

An actuator, a robot arm and a robot are disclosed. The actuator includes: a housing; a motor, including a motor stator and a motor rotor, wherein the motor stator is disposed on the housing, the motor rotor is rotatably connected to the housing, and the motor rotor covers the motor stator; a position encoder, disposed on the motor rotor; a motor driver, disposed on the housing, and electrically connected to the motor; a reducer, disposed on the housing, and parallelly disposed with the motor; and a transmission mechanism, connected to the motor rotor and the reducer respectively; wherein the reducer is configured to adjust a rotation speed output from the motor rotor.

A robot system includes: a robot including drive shafts; and a control device configured to control the robot, in which each of the drive shafts includes a drive unit configured to cause a second member to operate with respect to a first member, the drive unit includes a motor, a deceleration mechanism configured to decelerate rotation of the motor and supply the rotation to the first member and the second member, and an input-side detector configured to detect a rotation angle position of the motor, at least one drive unit includes an output-side detector configured to detect an operation position of the second member with respect to the first member, and the control device controls the motor such that each of the drive shafts with high responsiveness is caused to operate with priority, on the basis of the detected rotation angle position of the motor and the detected operation position.

A gripper head assembly is for a robotic gripping system and includes an actuator. The actuator includes: an actuator body having an attachment region configured to attach the actuator body to the gripper head; a drive element having a mounting section for a tool; a drive having a connector configured to receive an input; the drive being configured to move the drive element upon receiving the input; the drive element defining a through passage; the through passage having a first port for receiving at least one of negative pressure and positive pressure; and, the through passage having an outlet at the mounting section configured to supply the tool with the at least one of negative and positive pressure.

A servo and a robot with the servo are provided. The servo comprises a power input apparatus with a first output shaft, a deceleration apparatus, and a power output mechanism. The deceleration apparatus comprises a first-stage deceleration mechanism and a second-stage deceleration mechanism. The power output mechanism comprises a second output shaft and an output bearing fixedly installed on the second output shaft, wherein the second output shaft is an external spline output shaft. Through the external spline output shaft and the output bearing disposed on the power output mechanism, the servo could directly connect with an exterior component through the external spline output shaft, and the strength is improved. As a result, the friction between the servo and the exterior component is reduced, and the lifetime is therefore increased.

A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.

A magnetically reconfigurable robot joint motor includes a coil stator, a permanent magnet rotor and a magnetic reconfiguration unit. The magnetic reconfiguration unit is arranged around an outer periphery of the permanent magnet rotor, and a coil connected to a control circuit is wound on an outer layer of the magnetic reconfiguration unit. When it is necessary to execute low rotation speed or zero rotation speed operating conditions, the control circuit inputs current pulses of different strengths, so that the magnetic reconfiguration unit obtains permanent magnetization of corresponding degree, and generates a magnetic field which acts together with a magnetic field of the permanent magnet rotor, so as to maintain a torque required for output.

A modular robotic snake-arm assembly is described which is animated principally by an articulated drive shaft that threads the length of the snake-arm. The articulated drive shaft is driven by a motor in the fixed base. One or more clutch mechanisms in each segment couple with the articulated drive shaft so as to cause all snake arms further from the base to reorient in either one or two angles, in either direction. Snake-arm segments can be coupled end-to-end to form a robotic snake arm of great length.

The present invention is to provide an industrial robot, which is placed in vacuum for use, capable of efficiently cooling down hand- or arm-driving motors which are arranged inside the arm in air. The industrial robot is provided with a motor for rotating a second arm unit with respect to a first arm unit, a motor for rotating a hand with respect to the second arm unit, a reduction gear for reducing the rotation of the motor and transmitting it to the second arm unit, and a reduction gear for reducing the rotation of the motor and transmitting it to the hand; the hand and the arm are placed in vacuum. The reduction gears and are coaxially arranged so that the center of rotation of the second arm unit with respect to the first arm unit coincides with the axial centers of the reduction gears. The interior space of the hollow first arm unit is kept at atmospheric pressure in which the motors and the reduction gears are arranged.

A securing device for a rotatably mounted object with at least one receiving unit, which is fixed against rotation on a first component of the object with at least one clamping unit which is fixed against rotation to a second component of the object, which manually or by means of a rotary drive is moveable relative to the first component via a rotatably mounted joint about a rotational and/or swivel axis, and with at least one drive unit through which the clamping unit can be transferred from a release position, in which the first component and the second component are released for rotation relative to each other to a clamping position, in which the clamping unit frictionally and/or non-positively engages in the receiving unit, and the first component and the second component are fixed relative to each other against rotation about the rotary and/or swivel axis.