An operation method for a link actuating device provided with a target value input unit having a height direction target value input portion that allows input of a movement amount in a height direction or a coordinate position in the height direction, which causes the distal end posture of the link actuating device to be changed only in the height direction along a central axis of a proximal end side link hub. An input converter is provided to calculate, by using an inputted value, a target distal end posture of the link actuating device. The input converter further calculates a command operation amount of each actuator from the result of the calculation, and inputs the command operation amount to the control device.

A substrate processing apparatus, includes: a substrate transfer mechanism configured to advance and retreat a holding body that holds a substrate by symmetrically arranging two link mechanisms each including a driving arm and a driven arm; a processing module; a rotation angle measuring part configured to measure a rotation angle the driving arms; a holding body detection part configured to detect that a specific portion of the holding body is located at a predetermined position; and a controller configured to execute a step of acquiring a measurement value of the rotation angle of the driving arm, a step of obtaining a moving average of the measurement value of the rotation angle, and a step of obtaining a correction amount of the rotation angle so that a substrate transfer position of the holding body of the substrate transfer mechanism for the processing module becomes a reference position.

A working device includes a link actuation device and a control device for the link actuation device. The control device includes: a storage unit configured to store a plurality of the target positions; a calculation unit configured to sequentially read out the respective target positions stored to calculate movement amounts and movement speeds of the respective actuators between the target positions; and a control unit configured to operate the respective actuators by the movement amounts and at the movement speeds of the respective actuators calculated by the calculation unit. The control unit is capable of changing acceleration and deceleration times of the actuators for each of the target positions.

A method for compensating for accuracy errors of a hexapod is disclosed, said hexapod comprising a base, an actuation assembly having six linear translation actuators, a control unit, and a movable carriage comprising a platform connected to the base by means of the actuation assembly. The method includes a measurement step for determining geometry and positioning errors on the hexapod, the measurement step including sub-steps for determining positioning errors of the pivot centers on the carriage and on the base, for determining length errors of the actuators and for measuring positioning errors of the actuators along the path thereof, the compensation method also including a step for calculating, from measurements taken, error compensation values and a step for applying said error compensation values to the control unit of the hexapod, during subsequent use of said hexapod.

A non-Cartesian coordinate positioning machine that includes an extendable leg assembly for positioning a component such as a measurement probe within a working volume of the machine. The extendable leg assembly includes a first member and a second member which move relative to one another when the extendable leg assembly changes length. The first member including an axial arrangement of magnets forming part of a linear motor for extending and retracting the extendable leg assembly, and at least one resilient member for absorbing at least some of any axial thermal expansion or contraction of the magnets in use.

A diagnostic device is to be used for a link actuation device. A distal end side link hub to be coupled to a proximal end side link hub via three or more link mechanisms such that posture of the distal end side link hub is changeable. Each of the three or more link mechanisms is to be associated with a respective one of actuators. A predetermined action is to be carried out under a predetermined condition by driving each of the actuators. A preload applicator is to cause a preload to be applied to the link actuation device. A torque detector is to detect a drive torque of each of the actuators while a preload is being applied. A determiner is to determine whether or not the torque that is detected by the torque detector lies within a predetermined range. A notifier is to notify the determination result.

An electronic equipment assembly apparatus installs a mounted portion of a cable onto a connector of electronic equipment, the cable including a belt-shaped cable main body portion in which the mounted portion is formed in one end portion, and a reinforcing plate bonded to the one end portion side on one surface of the cable main body portion. The electronic equipment assembly apparatus includes: a cable holding tool which nips and holds the reinforcing plate by a blade and a chuck block; and a robot portion which moves the cable holding tool.

There is provided an electronic equipment assembly apparatus including: a cable mounting mechanism which holds a cable and installs the cable onto a connector; a lock operation mechanism which operates a lock mechanism provided in the connector; a locked-state checker which checks a state of the lock mechanism of the connector; and a controller which controls the cable mounting mechanism and the lock operation mechanism.

A controller for a parallel link mechanism includes a drive control unit that controls driving of a parallel link mechanism and a command section that gives a command for controlling an actuator to the drive control unit. The command section includes a natural frequency prediction unit that calculates a predicted value string of a natural frequency changing depending on the position of an end effector for each interpolation position of the end effector by using a dynamic model that simulates a mechanical system from a base to a link joint of the parallel link mechanism with a translational spring and simulates a mechanical system from the link joint to the end effector with one rigid body. The drive control unit includes a filter that changes a frequency component to be suppressed for each interpolation positions according to a predicted value string at each interpolation position of the end effector.

A coordinate positioning machine that includes: a structure moveable within a working volume of the machine, a hexapod metrology arrangement for measuring the position of the structure within the working volume, and a non-hexapod drive arrangement for moving the structure around the working volume. Also, a coordinate positioning machine including a structure moveable within a working volume of the machine, a drive arrangement for moving the structure around the working volume in fewer than six degrees of freedom, and a metrology arrangement for measuring the position of the structure within the working volume in more degrees of freedom than the drive arrangement.