In an embodiment, a wafer pod includes: a cavity configured to receive and store a wafer; an alignment fiducial within the cavity, wherein: the alignment fiducial comprises two lines orthogonal to each other, and the alignment fiducial is configured to be detected by a robotic arm alignment sensor disposed on a robotic arm, wherein the alignment fiducial defines an alignment orientation for a robotic arm gripper hand to enter into the cavity.

New and innovative systems and methods for calibrating and correcting sensors associated with a collaborative robot are disclosed. An example system comprises: at least one robotic arm; a sensor affixed to a location on the robotic arm, wherein the sensor measures force and torque across six degrees of freedom (6DOF); a processor; and memory. The system may receive, from the sensor, sensor input in real-time that indicate a measured force or torque. The system may generate, in real-time, sensor corrections that correspond to offset, linear, and non-linear deviations of the measured force in each sensor axis. The sensor corrections may correspond to offset, linear, and non-linear cross-coupling of the measured force between two or more sensor axes. The sensor corrections may be determined by applying offset, linear, and non nonlinear corrections to each degree of freedom (DOF) from every other DOF.

A calibration method for an industrial robot includes receiving a first model of the industrial robot, the first model is synchronized with an attitude state of the industrial robot located at a specific position in an actual environment; receiving an environment model around the industrial robot, the environment model including a second model of the industrial robot; obtaining registration information of the second model, at least by selecting at least three corresponding non-collinear point pairs in the first model and the second model to perform registration; and based on the registration information, calibrating a coordinate system of the environment model to a base coordinate system of the industrial robot.

A method for supporting designing and operation of a robotic system includes operating a computer-based Inventory configured to operate in a robotic system having Hardware Modules to perform a task, the Inventory including Hardware Module Descriptions including a unique identifier, a description of physical characteristics, a current status and historical data the Hardware Module. The method including the steps of collecting status data of the Hardware Module; collecting operating data representing usage of the Hardware Module and updating the historical data accordingly;

and at least one of the steps of scheduling maintenance actions to be performed on the Hardware Module; deriving or modifying, based on the operating data, historical data that is associated with a type of the Hardware Module.

Inspection robots with configurable interface plates are described. An example inspection robot may have a housing with at least three removable interface plates, each removable interface plate having a coupling interface for an electronic component on a first side, and coupled to at least one of a plurality of electronic boards on a second side. The example inspection robot may further include a drive module configured to couple to at least one of the removable interface plates, and a payload configured to couple to at least one of the removable interface plates. The example inspection robot may further include a means for operating the inspection robot in response to the drive module coupled to one of the removable interface plates, and the payload coupled to any other one of the removable interface plates.

Applied within an automated robotic manufacturing system that includes additive manufacturing capabilities, methods and enabling devices are disclosed for achieving precise multi-dimension positional alignment among a plurality of diverse took that are involved in collaboratively constructing a solid object. The enabling devices according to various embodiments include an automatically deployed contact sensing probe and a tool center point sensor that detects contact with tools in multiple axes. At least one disclosed method advantageously utilizes both sensing devices in complement.

A jig includes a disc body, a fixation pin, and a verification pin. The disc body has a first surface, an opposite a second surface, and a thickness separating the first surface from the second surface. A fixation aperture and a verification aperture extend through the thickness of the disc body and couple the first surface to the second surface of the disc body, the fixation aperture located radially outward of the verification aperture. The fixation pin is arranged to be slidably received within the fixation aperture to fix the disc body to an end effector within the semiconductor processing system. The verification pin is arranged to be slidably received within the verification aperture and supported by the disc body to indicate misregistration between the disc body and a load lock in the semiconductor processing system. Semiconductor processing systems and methods of teaching substrate handling are also described.

Provided is a method for controlling a robot including a base, a robot arm coupled to the base, and a drive unit including a motor for driving the robot arm. The method includes a first step of acquiring weight information including information on a weight of an end effector installed on the robot arm and a weight of an object to be worked by the end effector, a second step of determining a frequency component to be removed from a drive signal for driving the motor based on the weight information acquired in the first step, and a third step of removing the frequency component determined in the second step from the drive signal to generate a correction drive signal.

Provided is a method for controlling a robot including a base, a robot arm coupled to the base, and a drive unit including a motor for driving the robot arm. The method includes a first step of acquiring weight information including information on a weight of an end effector installed on the robot arm and a weight of an object to be worked by the end effector; a second step of determining a frequency component to be removed from a drive signal for driving the motor based on the weight information acquired in the first step; and a third step of removing the frequency component determined in the second step from the drive signal to generate a correction drive signal.

End effectors for use with a robotic object-gripping system, and related systems and methods, are disclosed herein. In some embodiments, the end effector includes a first mounting structure, a force sensor coupled to the first mounting structure, a second mounting structure coupled to the force sensor, and a gripper assembly coupled to the second mounting structure. The force sensor is beneath the longitudinal plane and is configured to measure forces along a vertical axis. The end effector also includes a first bracket coupled to the first mounting structure and a second bracket coupled to the second mounting structure. The first and second brackets are configured to connect to the connection tubes to isolate the connection tubes, and any forces therein, to a longitudinal direction between the first bracket and the second bracket, thereby reducing the noise on the force sensor from the connection tubes during operation.