A measuring apparatus comprises an industrial robot and a sensor fastened to a movable arm of the robot. A calibration body comprises a calibration element, a carrier, and an alignment element rigidly arranged relative to the carrier. The alignment element interacts with a counter piece provided on a carrying structure. Data specifying the pose of the calibration element relative to the alignment element are encoded in an encoding zone which may be embodied as a data matrix code. The calibration body is initially aligned on the carrying structure with the aid of the alignment element and the counter piece. The sensor then approaches the encoding zone to read the data encoded therein. Subsequently, the pose of the calibration element relative to the carrying structure is determined using the previously read data. Finally, the pose of the calibration element is measured by the sensor to calibrate the measuring apparatus.

Embodiments described herein generally relate to an apparatus and method of performing a robot calibration process within a substrate processing system. In one embodiment, a calibration device is used to calibrate a robot having an end effector. The calibration device includes a body, a first side and a second side opposite to the first side. The calibration device further includes a sensor disposed on the second side of the body. In some embodiments, the sensor covers the entire second side of the body. In this configuration, because the sensor covers the entire second side of the body of the calibration device, the calibration device can be utilized to sense the contact between the sensor and various differently configured chamber components found in different types of processing chambers or stations disposed within a processing system during a calibration process performed in each of the different processing chambers or stations.

An industrial robot continuously and automatically executes a teaching step of learning a hand position that is the position of a hand when mounting a transported object to be placed in a predetermined position on a placing section, and a calibration step of correcting the hand position learned in the teaching step. In the calibration step, the hand is moved to the hand position identified in the teaching step, and a transported object for teaching placed in the predetermined position is mounted and taken out onto the hand. Thereafter, the hand is moved again to the hand position identified in the teaching step and the transported object for teaching is placed on the placing section. Afterward, the position of the transported object for teaching is detected by second sensors attached to the hand and the hand position is corrected based on the detection result by the second sensors.

An end effector calibration assembly includes an electronic controller, a first camera assembly communicatively coupled to the electronic controller, and a second camera assembly communicatively coupled to the electronic controller. A first image capture path of the first camera assembly intersects a second image capture path of the second camera assembly. The electronic controller receives image data from the first camera assembly, receives image data from the second camera assembly, and calibrates a position of the robot end effector based on the image data received from the first camera assembly and the second camera assembly.

A calibration device is provided. The calibration device includes a frame, a first optical sensing device, a second optical sensing device and a third optical sensing device. The frame includes a bottom plate and at least four sidewalls, wherein the sidewalls have a first grating hole, a second grating hole, a third grating hole and a fourth grating hole at a first height. The bottom plate has an image recognition pattern, a first measurement point, a second measurement point and a third measurement point.

Methods and apparatus related to generating a model for an object encountered by a robot in its environment, where the object is one that the robot is unable to recognize utilizing existing models associated with the robot. The model is generated based on vision sensor data that captures the object from multiple vantages and that is captured by a vision sensor associated with the robot, such as a vision sensor coupled to the robot. The model may be provided for use by the robot in detecting the object and/or for use in estimating the pose of the object.

A programming method for a robot arm includes setting and saving operational configurations of the robot arm, establishing an operation process of the robot arm, selecting the operational position icon for applying to the operation sub-process, displaying a selected operational position icon and an operational configuration sub-icon, modifying an operational configuration displayed on the operational configuration sub-icon for facilitating to execute a programming process of the robot arm.

Methods for managing a robot arm are disclosed. In one method, during a movement of the robot arm in an axis thereof, a signal collected by a sensor equipped at a frame of the robot arm is received. A change in strength of the received signal is detected, where the change is caused by an offset between a position of a reference mark equipped at the robot arm and a position of the sensor. An original point of the axis of the robot arm is determined based on the detected change. Further, robot systems, apparatuses, systems, and computer readable media for managing a robot arm in the robot systems are disclosed. The original point of the axis of the robot arm may be determined without a dedicated calibrating tool, and then the robot arm may be calibrated based on the original point accurately.

An assembling apparatus that is provided with transfer mechanisms in three orthogonal directions and is capable of assembling plural parts with a high degree of accuracy using a holding device attached to one of the transfer mechanisms is provided. The assembling apparatus includes an x-axis transfer mechanism 101; a y-axis transfer mechanism 103; a z-axis transfer mechanism 105; a holding device 107 for holding a work piece, the holding device being attached to the z-axis transfer mechanism such that the holding device is movable in the z-axis direction; a base 1000 having a surface parallel to the x-axis and the y-axis; a first camera 201 attached to the z-axis transfer mechanism such that the optical axis is in the z-axis direction; and a second camera 203 attached to the base such that the optical axis is in the z-axis direction.

Systems, devices, articles, and methods are illustrated and described herein. A method of operation in a robotic system including a processor, a first device, and a second device involves receiving, by the processor, a training set including a first plurality of positions in a first configuration space that represents physical configurations of the first device, a second plurality of positions in a second configuration space that represents physical configurations of the second device, and information that represents pairs of positions. A representative pair includes a first representative position in the first configuration space and a second representative position in the second configuration space. The method involves creating, by the processor, from the training set, information that represents a map between a first run-time position in the first configuration space, and a second run-time position in the second configuration space, and returning, by the processor, the information that represents the map.