An imprint apparatus for performing an imprint process of forming a pattern of an imprint material on a substrate using a mold, including a control unit configured to control a process concerning inspection of the imprint process, wherein the imprint process includes an arrangement process including stage driving of driving a stage between a first position below the mold and a second position below a dispenser, and in a case where a plurality of states are obtained, in each of which a shot region is sub-pixel shifted with respect to an imaging surface in accordance with the stage driving during the arrangement process, the control unit obtains a plurality of first sub-pixel shift images corresponding to the plurality of states, and inspects the imprint process based on the plurality of first sub-pixel shift images.